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    • 1. 发明授权
    • Multi-waveguide layer H-tree distribution device
    • 多波导层H树分布装置
    • US06876794B2
    • 2005-04-05
    • US10364624
    • 2003-02-10
    • Jun-Fei ZhengIan Young
    • Jun-Fei ZhengIan Young
    • G02B6/12G02B6/125G02B6/43G02B6/26
    • G02B6/125G02B6/43G02B2006/1215
    • An optical network is formed of multiple H-tree distribution devices, separated into different waveguide layers. The optical network receives an input optical signal, such as an optical clock signal, and makes duplicate copies of that input signal. The duplicate copies are routed through the connected H-tree distribution devices, which are arranged to produce identical, synchronized copies of the clock signal. The network can take the form of a 1×2N device, where 2N represents the number of these output signals. The H-tree distribution devices forming the network are of varying size and may be formed in different waveguide layers with different index of refraction differentials between the H-tree devices and surrounding claddings. In some forms, the optical network is integrated with optical-to-electrical converters, i.e., photodetectors, which take the optical output signals and convert them to synchronized electrical signals that may be communicated to digital circuits.
    • 光网络由多个H树分布设备组成,分离成不同的波导层。 光网络接收诸如光时钟信号的输入光信号,并且重复该输入信号。 复制副本通过连接的H树分发设备进行路由,这些设备被配置为产生相同的同步的时钟信号副本。 网络可以采取1x2 设备的形式,其中2 表示这些输出信号的数量。 形成网络的H树分布设备具有不同的尺寸,并且可以形成在H树设备和周围包层之间具有不同折射率差异的不同波导层中。 在一些形式中,光网络与光电转换器(即,光电检测器)集成,其获取光输出信号并将其转换为可传送到数字电路的同步电信号。
    • 2. 发明授权
    • Variable bending radius H-tree distribution device
    • 可变弯曲半径H树分布装置
    • US06968104B2
    • 2005-11-22
    • US10364611
    • 2003-02-10
    • Jun-Fei ZhengIan YoungDongwhan Ahn
    • Jun-Fei ZhengIan YoungDongwhan Ahn
    • G02B6/12G02B6/125G02B6/26
    • G02B6/125G02B2006/12173G02B2006/12176
    • An optical network, in the form of a 1×2N splitter, includes a series of interconnected distribution devices of varying size. Each distribution device may be an H-tree distribution device having an input waveguide and four output waveguides that provide in-phase, equal intensity copies of a signal received on the input waveguide. The network may include a primary H-tree distribution device and a plurality of secondary H-tree distribution devices each of a smaller size than the primary H-tree distribution device. Individual H-tree distribution devices may have a first stage Y-branch and a second stage Y-branch each of different radii of curvature. Further still, progressively smaller radius of curvature Y-branches may be used to form the 1×2N splitter, where N may be an even or odd integer.
    • 形式为1×2 N分离器的光网络包括一系列具有不同尺寸的相互连接的分配装置。 每个分配设备可以是具有输入波导和四个输出波导的H树分配设备,其提供在输入波导上接收的信号的同相等强度副本。 网络可以包括主H树分发设备和每个比主H树分发设备更小的多个次H树分发设备。 各个H树分配装置可以具有不同的曲率半径的第一阶段Y分支和第二阶段Y分支。 此外,仍然可以使用逐渐变小的曲率半径Y分支来形成1x2分割器,其中N可以是偶数或奇数整数。
    • 4. 发明申请
    • SYSTEM FOR THE DELIVERY OF GERMANIUM-BASED PRECURSOR
    • 用于输送基于锗的前驱体的系统
    • US20110124182A1
    • 2011-05-26
    • US12952183
    • 2010-11-22
    • Jun-Fei Zheng
    • Jun-Fei Zheng
    • H01L21/20C23C16/00
    • C23C16/4485C23C16/305C23C16/45514H01L21/02532H01L21/0262
    • A supply of a germanium precursor such as germanium n-butylamidinate is provided in close proximity to a microelectronic device substrate to be contacted therewith for deposition of germanium-containing material on the substrate. Specific arrangements are described, including tray and reservoir structures from which solid, liquid, suspended or dissolved germanium precursor can be volatilized for transport to the substrate surface together with other precursors, carrier gases, co-reactants or the like. In such manner, the germanium precursor can be activated independently of the activation of other precursors, within the deposition chamber, to achieve highly efficient formation of germanium-containing material on the substrate, e.g., a GST film of a phase change memory device.
    • 提供锗前体如正丁基脒基锗的供应,靠近与其接触的微电子器件基底,用于在基底上沉积含锗材料。 描述了具体的布置,包括托盘和储存器结构,固体,液体,悬浮或溶解的锗前体可以与其它前体,载气,共反应物等一起挥发以运输到基底表面。 以这种方式,可以在沉积室内独立于其它前体的活化来独立地激活锗前体,以实现在衬底上高效形成含锗材料,例如相变存储器件的GST膜。
    • 9. 发明授权
    • Hollow GST structure with dielectric fill
    • 空心GST结构与介质填充
    • US08410468B2
    • 2013-04-02
    • US12824749
    • 2010-06-28
    • Jun-Fei Zheng
    • Jun-Fei Zheng
    • H01L29/02
    • H01L45/124H01L45/06H01L45/144H01L45/1616H01L45/1641H01L45/1691
    • A memory cell structure, including a substrate having a via therein bound at first and second ends thereof by electrodes. The via is coated on side surfaces thereof with GST material defining a core that is hollow or at least partially filled with material, e.g., germanium or dielectric material. One or more of such memory cell structures may be integrated in a phase change memory device. The memory cell structure can be fabricated in a substrate containing a via closed at one end thereof with a bottom electrode, by conformally coating GST material on sidewall surface of the via and surface of the bottom electrode enclosing the via, to form an open core volume bounded by the GST material, optionally at least partially filling the open core volume with germanium or dielectric material, annealing the GST material film, and forming a top electrode at an upper portion of the via.
    • 一种存储单元结构,包括其第一端和第二端通过电极在其中结合的通孔的衬底。 通孔在其侧表面上涂覆有GST材料,其中GST材料限定了中空的或至少部分地填充有材料(例如锗或电介质材料)的芯。 这种存储单元结构中的一个或多个可以集成在相变存储器件中。 存储单元结构可以通过在通孔的侧壁表面和包围通孔的底部电极的表面上保形地涂覆GST材料,在包含通孔闭合的通孔的基板中制造,形成开放芯体积 由GST材料限定,任选地用锗或介电材料至少部分地填充开芯体积,退火GST材料膜,并在通孔的上部形成顶电极。