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    • 1. 发明授权
    • Chemical vapor deposition vaporizer
    • 化学气相沉积蒸发器
    • US06210485B1
    • 2001-04-03
    • US09352629
    • 1999-07-13
    • Jun ZhaoLee LuoXiaoliang JinFrank ChangCharles DornfestPo Tang
    • Jun ZhaoLee LuoXiaoliang JinFrank ChangCharles DornfestPo Tang
    • C23C1600
    • C23C16/4481
    • The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the vaporization of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, for deposition on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules. The vaporizer comprises thermally controlled components which are adapted for easy assembly and disassembly. A main vaporizing section provides a large heated surface for flash vaporization. A high conductance blocker is disposed at a lower end of the vaporizer to provide an extended vaporization surface. Optionally, a filter may be employed to capture unvaporized precursor droplets.
    • 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于蒸发金属氧化物膜如钡,锶,氧化钛(BST)膜的装置和方法,用于沉积在硅晶片上,以使集成电路电容器用于高容量动态存储器模块。 蒸发器包括适于容易组装和拆卸的热控部件。 主蒸发部分提供用于闪蒸的大的加热表面。 高电导阻挡器设置在蒸发器的下端以提供延长的蒸发表面。 任选地,可以使用过滤器来捕获未汽化的前体液滴。
    • 2. 发明授权
    • High temperature filter for CVD apparatus
    • CVD设备用高温过滤器
    • US06635114B2
    • 2003-10-21
    • US09467296
    • 1999-12-17
    • Jun ZhaoCharles DornfestFrank ChangXiaoliang JinPo Tang
    • Jun ZhaoCharles DornfestFrank ChangXiaoliang JinPo Tang
    • C23C1600
    • C23C16/4402C23C16/4481C23C16/4486
    • The present invention generally provides a deposition chamber for depositing materials which require vaporization, especially low volatility precursors, which are transported as a liquid to a vaporizer to be converted to vapor phase through one or more vaporizing elements and which must be transported at elevated temperatures to prevent unwanted condensation on chamber components. In one aspect, the chamber comprises a series of heated temperature controlled internal liners as vaporizing surfaces which are configured for rapid removal, cleaning and/or replacement and preferably are made of a material having a thermal coefficient of expansion close to that of the deposition material. The vaporizing surfaces “flash” sprayed liquid precursors on the surface of the vaporizing surfaces and then purify the flashed precursors before flowing further into the system. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules. Preferably, internal surfaces of the chamber are adjustable and maintainable at a suitable temperature above ambient, e.g., about 150° C. to about 300° C., to prevent decomposition and/or condensation of vaporized material on the chamber and related gas flow surfaces.
    • 本发明通常提供一种用于沉积需要蒸发的材料,特别是低挥发性前体的沉积室,其作为液体被输送到蒸发器,以通过一个或多个汽化元件转化为气相,并且必须在升高的温度下运输至 防止腔室部件发生不必要的冷凝。 在一个方面,腔室包括一系列加热的受温度控制的内衬,作为蒸发表面,其被构造用于快速去除,清洁和/或更换,并且优选地由具有接近沉积材料的热膨胀系数的材料制成 。 蒸发表面在蒸发表面的表面上“闪蒸”喷射的液体前体,然后在进一步进入系统之前净化闪光的前体。 特别考虑的是用于在硅晶片上沉积诸如钡,锶,氧化钛(BST)膜的金属氧化物膜的装置和方法,以使集成电路电容器用于高容量动态存储器模块。 优选地,室的内表面是可调节的并且可在高于环境温度(例如约150℃至约300℃)的合适温度下保持,以防止气化材料在室和相关气流表面上的分解和/或冷凝 。
    • 10. 发明授权
    • Auto-feed built-in a paper shredder
    • 自动进纸内置纸粉碎机
    • US08074912B2
    • 2011-12-13
    • US12645360
    • 2009-12-22
    • Frank Chang
    • Frank Chang
    • B02C7/02B02C23/00
    • B02C18/2283B02C18/0007B02C2018/003
    • Disclosed is an auto-feed built-in a paper shredder, including a pair of bisecting lids that are each provided at an inside thereof with a paper press, a paper receiving compartment, an auto-feed, and a paper shredding device located exactly below the auto-feed, wherein the auto-feed includes a paper tray, a paper inlet and two roller assemblies; the paper inlet and the paper shredding device located therebelow are aligned along an identical central axis; the two roller assemblies are provided at opposing sides of the paper inlet in parallel and project into the paper tray, whereby after placing a pile of paper into the paper receiving compartment to be supported by the paper tray, and closing the bisecting lids, the paper presses provided at the insides of the lids would apply a force against the pile of paper, such that a bottommost paper of the pile of paper would be folded in half by the two rollers rotating towards each other and then fed into the paper inlet to be subsequently shredded by the paper shredding device located below the paper inlet.
    • 公开了一种自动进料内置的切碎机,包括一对平分盖,其内侧均设置有压纸机,纸容纳室,自动进给和位于正好下方的切纸装置 自动进给,其中自动进给包括纸盘,纸入口和两个辊组件; 位于其下方的进纸口和切纸装置沿着相同的中心轴线排列; 两个辊组件平行地设置在纸入口的相对侧并突出到纸盘中,由此在将一堆纸放置在纸容纳室中以由纸盘支撑并且闭合平分盖之后,纸张 设置在盖子内侧的压力将对纸张施加力,使得纸堆中的最下面的纸张将被两个相互转动的辊折叠成一半,然后被送入纸张入口 随后由位于进纸口下方的切纸装置切碎。