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    • 6. 发明授权
    • Laser machining method for precision machining
    • 激光加工方法用于精密加工
    • US06635850B2
    • 2003-10-21
    • US10047952
    • 2002-01-15
    • Jun AmakoMasami MuraiTsutomu OtaTomio Sonehara
    • Jun AmakoMasami MuraiTsutomu OtaTomio Sonehara
    • B23K2636
    • B23K26/0676B23K26/0622B23K26/066B23K26/067G02F1/13439
    • A laser machining method and apparatus performs high-speed and high-precision machining on a thin film and a liquid crystal panel. The apparatus includes: a plurality of pulse laser generators, drivers for alternately driving a plurality of pulse laser generators to generate laser beams delayed in phase between each other; collimators for making the generated laser beams equal in quality; a wave plate for converting the laser beams into elliptically polarized laser beams; and a phase grating for dividing each laser beam emitted by each of the plurality of laser beam generators into a plurality of laser beams; such that an object to be processed is selectively illuminated with the plurality of laser beams produced by the phase grating. The phase grating has structure on its surface for dividing each of the laser beams into equal intensity beams. Open grooves are formed having uniform shape and quality.
    • 激光加工方法和装置在薄膜和液晶面板上进行高速高精度加工。 该装置包括:多个脉冲激光发生器,用于交替驱动多个脉冲激光发生器以产生彼此相位延迟的激光束的驱动器; 用于使所生成的激光束的质量相等的准直器; 用于将激光束转换成椭圆偏振激光束的波片; 以及相位光栅,用于将由所述多个激光束发生器中的每一个发射的每个激光束分成多个激光束; 使得由相位光栅产生的多个激光束选择性地照射被处理物体。 相位光栅在其表面上具有用于将每个激光束分成相等强度光束的结构。 形成具有均匀形状和质量的开放凹槽。
    • 7. 发明授权
    • Laser machining apparatus with rotatable phase grating
    • 具有旋转相位光栅的激光加工设备
    • US6031201A
    • 2000-02-29
    • US890128
    • 1997-07-09
    • Jun AmakoMasami MuraiTsutomu OtaTomio Sonehara
    • Jun AmakoMasami MuraiTsutomu OtaTomio Sonehara
    • B23K26/06B23K26/067B23K26/40G02F1/1343
    • B23K26/0676B23K26/0622B23K26/066B23K26/067G02F1/13439
    • A laser machining method and apparatus for performing high-speed and high-precision machining on a thin film deposited on a substrate, as well as a liquid crystal panel. The apparatus includes: a plurality of pulse laser generators; a system for alternately driving a plurality of pulse laser generators so that the plurality of pulse laser generators generate laser beams having a delay in phase between each other; a system for making the laser beams generated by the plurality of laser beam generators equal in quality; a system for converting the laser beams generated by the plurality of laser beam generators into elliptically polarized laser beams; and a system for dividing each laser beam emitted by each of the plurality of laser beam generators into a plurality of laser beams; whereby an object to be processed is selectively illuminated with the plurality of laser beams produced by the beam-dividing system. The system for dividing each laser beam emitted by each of the plurality of laser beam generators into a plurality of laser beams is embodied by a phase grating. The phase grating has a structure on its surface which divides each laser beam into a sub plurality of laser beams having equal intensity, from which open grooves having a uniform shape and uniform quality can be formed. The liquid crystal panel includes an electrode structure in which open grooves are formed on an ITO film by using the apparatus. Open grooves (electrode gaps) having a constant width less than 10 .mu.m are uniformly formed in a display area at constant intervals. Thus, the liquid crystal panel according to the present invention provides a much greater contrast ratio and much better visibility performance than conventional techniques, wherein these are primary factors which doming the display quality.
    • 一种用于对沉积在基板上的薄膜以及液晶面板进行高速高精度加工的激光加工方法和装置。 该装置包括:多个脉冲激光发生器; 用于交替地驱动多个脉冲激光发生器的系统,使得所述多个脉冲激光发生器产生具有相互延迟的激光束; 用于使由多个激光束发生器产生的激光束的质量相等的系统; 用于将由所述多个激光束发生器产生的激光束转换为椭圆偏振激光束的系统; 以及用于将由所述多个激光束发生器中的每一个发射的每个激光束分成多个激光束的系统; 从而通过由分束系统产生的多个激光束选择性地照射待处理的物体。 用于将由多个激光束发生器中的每一个发射的每个激光束分割为多个激光束的系统由相位光栅实现。 相位光栅在其表面上具有将每个激光束分成具有相等强度的子多个激光束的表面的结构,由此可以形成具有均匀形状和均匀质量的开口槽。 液晶面板包括通过使用该装置在ITO膜上形成开槽的电极结构。 以恒定间隔均匀地形成具有小于10μm的恒定宽度的开口槽(电极间隙)。 因此,根据本发明的液晶面板提供比常规技术更大的对比度和更好的可见性,其中这些技术是显示质量的主要因素。