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1. 发明授权

US07446474B2 Hetero-junction electron emitter with Group III nitride and activated alkali halide 失效
标题翻译：具有III族氮化物和活性碱卤化物的异质结电子发射体
公开(公告)号：US07446474B2
公开(公告)日：2008-11-04
申请号：US11090094
申请日：2005-03-25
申请人： Juan Ramon Maldonado , Francisco J. Machuca , Steven T. Coyle
发明人： Juan Ramon Maldonado , Francisco J. Machuca , Steven T. Coyle
IPC分类号： H01J40/06
CPC分类号： H01J1/34 , B82Y10/00 , B82Y40/00 , H01J3/021 , H01J9/12 , H01J37/073 , H01J37/3177 , H01J2237/06333 , H01J2237/31762 , H01J2237/31774 , H01J2237/31779
摘要： A photocathode is capable of generating an electron beam from incident light. The photocathode comprises a light permeable support having a light receiving surface and an opposing surface. A Group III nitride layer is provided on the opposing surface of the support. The Group III nitride layer comprises at least one Group III element and nitrogen. An alkali halide layer is provided on the Group III nitride layer. The alkali halide can be a cesium halide, such as cesium bromide or iodide.
摘要翻译：光电阴极能够从入射光产生电子束。光电阴极包括具有光接收表面和相对表面的透光性支撑体。在载体的相对表面上设置III族氮化物层。 III族氮化物层包含至少一种III族元素和氮。在III族氮化物层上设置碱金属卤化物层。碱金属卤化物可以是卤化铯，如溴化铯或碘化物。

2. 发明授权

US07161162B2 Electron beam pattern generator with photocathode comprising low work function cesium halide 失效
标题翻译：具有光电阴极的电子束图案发生器，其包含低功函数卤化铯
公开(公告)号：US07161162B2
公开(公告)日：2007-01-09
申请号：US10282324
申请日：2002-10-10
申请人： Juan Ramon Maldonado , Steven T. Coyle
发明人： Juan Ramon Maldonado , Steven T. Coyle
IPC分类号： H01J37/073 , H01J37/317
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/073 , H01J37/3177 , H01J2237/06333 , H01J2237/31762 , H01J2237/31774 , H01J2237/31779
摘要： An electron beam pattern generator comprises a laser beam generator to generate a laser beam. A photocathode receives the laser beam and generates one or more electron beams. The photocathode comprises cesium halide material, such as for example, cesium bromide or iodide. The cesium halide material may have a decreased workfunction that allows efficient operation at a wavelength of the laser beam of at least about 200 nm. Electron optics are provided to focus the electron beams onto a substrate that is supported on a substrate support.
摘要翻译：电子束图案发生器包括产生激光束的激光束发生器。光电阴极接收激光束并产生一个或多个电子束。光电阴极包括卤化铯材料，例如溴化铯或碘化铯。卤化铯材料可以具有降低的功能，其允许在至少约200nm的激光束的波长下的有效操作。提供电子光学器件以将电子束聚焦到被支撑在衬底支撑件上的衬底上。

3. 发明授权

US07015467B2 Generating electrons with an activated photocathode 失效
标题翻译：用激活的光电阴极产生电子
公开(公告)号：US07015467B2
公开(公告)日：2006-03-21
申请号：US10697715
申请日：2003-10-29
申请人： Juan Ramon Maldonado , Steven T. Coyle
发明人： Juan Ramon Maldonado , Steven T. Coyle
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J9/12 , B82Y10/00 , B82Y40/00 , H01J1/34 , H01J3/021 , H01J37/073 , H01J37/3177 , H01J2237/06333 , H01J2237/31762 , H01J2237/31774 , H01J2237/31779
摘要： An electron beam apparatus comprises a beam source to generate a radiation beam that is directed onto a photocathode to generate an electron beam. The photocathode comprises an electron-emitting material composed of activated alkali halide, such as for example, cesium bromide or cesium iodide. The activated alkali halide has a lower minimum electron emission energy level than the same material in the un-activated state, and provides efficient photoyields when exposed to radiation having an energy level that is higher than the minimum electron emission energy level. The emitted electrons can be collimated into beams and used to write on, inspect, or irradiate a workpiece.
摘要翻译：电子束装置包括用于产生被引导到光电阴极上以产生电子束的辐射束的光束源。光电阴极包括由活化的碱金属卤化物，例如溴化铯或碘化铯组成的电子发射材料。活化的碱金属卤化物在未激活状态下具有比相同材料更低的最小电子发射能量水平，并且当暴露于具有高于最小电子发射能级的能级的辐射时，提供有效的光电子场。发射的电子可以被准直成束，并用于写入，检查或照射工件。

4. 发明授权

US06376984B1 Patterned heat conducting photocathode for electron beam source 失效
标题翻译：用于电子束源的图形导热光电阴极
公开(公告)号：US06376984B1
公开(公告)日：2002-04-23
申请号：US09364274
申请日：1999-07-29
申请人： Andres Fernandez , Marian Mankos , Tai-Hon Philip Chang , Kim Lee , Steven T. Coyle
发明人： Andres Fernandez , Marian Mankos , Tai-Hon Philip Chang , Kim Lee , Steven T. Coyle
IPC分类号： H01J3150
CPC分类号： B82Y10/00 , H01J1/34 , H01J37/073 , H01J2201/02 , H01J2237/31779
摘要： A photocathode emitter as a source of electron beams, having an optically transmissive substrate patterned to define a protrusion, heat conducting material occupying the space surrounding the protrusion, and a photoemitter layer over the protrusion. The photoemitter is positioned on the side of the substrate opposite the surface on which the illumination is incident, and has an irradiation region at the contact with the top of the protrusion patterned on the substrate, and an emission region opposite the irradiation region, these regions being defined by the path of the illumination. The heat conducting material around the protrusion conducts heat away from this focused region of illumination on the photocathode to allow higher currents to be achieved from the photocathode and thus permits higher throughput rates in applications including electron beam lithography. In one version, the photocathode is fabricated using microfabrication techniques, to achieve a small emission spot size.
摘要翻译：作为电子束源的光电阴极发射体，具有图案化以限定突起的光学透射基底，占据突起周围的空间的导热材料，以及突出部上的光电发射体层。光发射器位于与照射入射的表面相对的一侧上，并且具有与在基板上图案化的突起的顶部接触的照射区域和与照射区域相对的发射区域，这些区域由照明的路径定义。突起周围的导热材料将热量从该聚焦光照射区域传导到光电阴极上，以允许从光电阴极获得更高的电流，从而在包括电子束光刻的应用中允许较高的生产率。在一个版本中，使用微细加工技术制造光电阴极，以实现小的发射点尺寸。

5. 发明授权

US06724002B2 Multiple electron beam lithography system with multiple beam modulated laser illumination 失效
标题翻译：具有多光束调制激光照明的多电子束光刻系统
公开(公告)号：US06724002B2
公开(公告)日：2004-04-20
申请号：US10055121
申请日：2002-01-22
申请人： Marian Mankos , Steven T. Coyle , Andres Fernandez , Allan L. Sagle , Paul C. Allen , Xiaolan Chen , Douglas Holmgren , Windsor Owens , Jeffrey Sullivan , Tim Thomas , Mark A. Gesley
发明人： Marian Mankos , Steven T. Coyle , Andres Fernandez , Allan L. Sagle , Paul C. Allen , Xiaolan Chen , Douglas Holmgren , Windsor Owens , Jeffrey Sullivan , Tim Thomas , Mark A. Gesley
IPC分类号： H01J4016
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/70375 , H01J37/3175 , H01J2237/31779
摘要： An electron beam lithography system includes a laser for generating a laser beam, and a beam splitter for splitting the laser beam into a plurality of light beams. The intensity of the light beams is individually modulated. The light beams are of sufficient energy such that, when they impinge on a photocathode, electrons are emitted. Modulation of the light beams controls modulation of the resulting electron beams. The electron beams are provided to an electron column for focusing and scanning control. Finally, the electron beams are used to write a scanning surface, for example, using an interlaced writing strategy.
摘要翻译：电子束光刻系统包括用于产生激光束的激光器和用于将激光束分成多个光束的分束器。光束的强度被单独调制。光束具有足够的能量，使得当它们撞击光电阴极时，发射电子。光束的调制控制所得电子束的调制。电子束被提供到用于聚焦和扫描控制的电子柱。最后，使用电子束来写入扫描表面，例如使用隔行写入策略。

6. 发明授权

US06759800B1 Diamond supported photocathodes for electron sources 失效
标题翻译：用于电子源的金刚石负载光电阴极
公开(公告)号：US06759800B1
公开(公告)日：2004-07-06
申请号：US09363926
申请日：1999-07-29
申请人： Andres Fernandez , Timothy Thomas , Xiaolan Chen , Steven T. Coyle , Ming Yu , Marian Mankos
发明人： Andres Fernandez , Timothy Thomas , Xiaolan Chen , Steven T. Coyle , Ming Yu , Marian Mankos
IPC分类号： H01J4006
CPC分类号： B82Y10/00 , H01J1/34
摘要： A photocathode as a source of electron beams, having a substrate of optically transmissive diamond and a photoemitter. A photocathode with a single emitting region provides a single electron beam; a photocathode with multiple emitting regions provides multiple electron beams. The photoemitter is positioned on the side of the diamond substrate opposite the surface on which the illumination is incident, and has an irradiation region at the contact with the optically transmissive diamond, and an emission region opposite the irradiation region, these regions being defined by the path of the illumination. The diamond substrate at the irradiation region/emission region interface conducts heat away from this focused region of illumination on the photocathode. Alternately, a diamond film is used for heat conduction, while another material is used as a substrate to provide structural support. The thermal conductivity of diamond is at least three orders of magnitude greater than that of fused silica, which is an alternative substrate material for photocathodes. This allows for efficient conduction of heat away from the irradiation region/emission region interface, and therefore allows higher currents to be achieved from the photocathode. This, in turn, permits higher throughput rates in applications including electron beam lithography.
摘要翻译：作为电子束源的光电阴极，具有透光金刚石和光电发射体的基底。具有单个发射区域的光电阴极提供单个电子束; 具有多个发射区域的光电阴极提供多个电子束。光发射器位于与照射入射的表面相对的金刚石基底的一侧，并且具有与光学透射金刚石接触的照射区域和与照射区域相对的发射区域，这些区域由照明路径。在照射区域/发射区域界面处的金刚石基底将热量远离该聚焦照明区域在光电阴极上。或者，金刚石膜用于热传导，而另一种材料用作基底以提供结构支撑。金刚石的热导率比熔融石英的热导率高至少三个数量级，熔融石英是光电阴极的替代基材。这允许热量从照射区域/发射区域界面有效地传导，因此允许从光电阴极获得更高的电流。这反过来又允许在包括电子束光刻的应用中更高的生产率。

7. 发明授权

US07800075B2 Multi-function module for an electron beam column 有权
标题翻译：电子束柱多功能模块
公开(公告)号：US07800075B2
公开(公告)日：2010-09-21
申请号：US12194220
申请日：2008-08-19
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
IPC分类号： G21K1/08 , H01J3/14 , H01J3/26 , H01J49/42
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
摘要翻译：用于电子束柱的多功能模块包括上电极和下电极以及中心环电极。上电极和下电极具有多极并且能够偏转或校正通过电极的电子束的像差。可以独立于施加到上电极和下电极的电压而将电压施加到中心环电极，以将电子束聚焦在衬底上。

8. 发明申请

US20080308751A1 MULTI-FUNCTION MODULE FOR AN ELECTRON BEAM COLUMN 有权
标题翻译：电子束柱的多功能模块
公开(公告)号：US20080308751A1
公开(公告)日：2008-12-18
申请号：US12194220
申请日：2008-08-19
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
IPC分类号： A61N5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
摘要翻译：用于电子束柱的多功能模块包括上电极和下电极以及中心环电极。上电极和下电极具有多极并且能够偏转或校正通过电极的电子束的像差。可以独立于施加到上电极和下电极的电压而将电压施加到中心环电极，以将电子束聚焦在衬底上。

9. 发明授权

US07427765B2 Electron beam column for writing shaped electron beams 有权
标题翻译：用于写入成形电子束的电子束柱
公开(公告)号：US07427765B2
公开(公告)日：2008-09-23
申请号：US11243363
申请日：2005-10-03
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
IPC分类号： A61N5/00 , G21G5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： An electron beam column comprises a thermal field emission electron source to generate an electron beam, an electron beam blanker, a beam shaping module, and electron beam optics comprising a plurality of electron beam lenses. In one version, the optical parameters of the electron beam blanker, beam shaping module, and electron beam optics are set to achieve an acceptance semi-angle β of from about ¼ to about 3 mrads, where the acceptance semi-angle β is half the angle subtended by the electron beam at the writing plane. The beam-shaping module can also operate as a single lens using upper and lower projection lenses. A multifunction module for an electron beam column is also described.
摘要翻译：电子束柱包括产生电子束的热场发射电子源，电子束消除器，光束整形模块和包括多个电子束透镜的电子束光学器件。在一个版本中，电子束消隐器，光束整形模块和电子束光学器件的光学参数被设置为实现约¼至约3mrads的接受半角β，其中接受半角β是一半在写平面处电子束对着的角度。光束成形模块也可以使用上下投影透镜作为单个透镜进行操作。还描述了用于电子束柱的多功能模块。

10. 发明授权

US07372195B2 Electron beam source having an extraction electrode provided with a magnetic disk element 有权
标题翻译：电子束源，其具有设置有磁盘元件的抽出电极
公开(公告)号：US07372195B2
公开(公告)日：2008-05-13
申请号：US11286802
申请日：2005-11-22
申请人： Steven T. Coyle , Michael R. Scheinfein , William J. Devore
发明人： Steven T. Coyle , Michael R. Scheinfein , William J. Devore
IPC分类号： H01J27/02 , H01J27/26
CPC分类号： H01J37/065 , H01J37/143 , H01J2237/06316 , H01J2237/06341
摘要： An electron beam source for use in an electron gun. The electron beam source includes an emitter terminating in a tip. The emitter is configured to generate an electron beam. The electron beam source further includes a suppressor electrode laterally surrounding the emitter such that the tip of the emitter protrudes through the suppressor electrode and an extractor electrode disposed adjacent the tip of the emitter. The extractor electrode comprises a magnetic disk whose magnetic field is aligned with an axis of the electron beam.
摘要翻译：一种用于电子枪的电子束源。电子束源包括终端在尖端中的发射器。发射极被配置为产生电子束。电子束源还包括横向围绕发射器的抑制电极，使得发射极的尖端突出通过抑制电极和与发射极的顶端相邻设置的提取电极。提取器电极包括其磁场与电子束的轴线对齐的磁盘。

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