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    • 4. 发明申请
    • ELECTRONIC DEVICE INCLUDING A TRENCH AND A CONDUCTIVE STRUCTURE THEREIN
    • 电子设备,其中包括TRENCH和导电结构
    • US20110068344A1
    • 2011-03-24
    • US12958002
    • 2010-12-01
    • Gary H. Loechelt
    • Gary H. Loechelt
    • H01L29/78
    • H01L29/7802H01L21/2815H01L29/04H01L29/0634H01L29/0873H01L29/0878H01L29/1095H01L29/402H01L29/417H01L29/41766H01L29/42376H01L29/66719H01L29/66727H01L2924/0002H01L2924/00
    • An electronic device can include a transistor. In an embodiment, the transistor can include a semiconductor layer having a primary surface and a conductive structure. The conductive structure can include a horizontally-oriented doped region lying adjacent to the primary surface, an underlying doped region spaced apart from the primary surface and the horizontally-oriented doped region, and a vertically-oriented conductive region extending through a majority of the thickness of the semiconductor layer and electrically connecting the doped horizontal region and the underlying doped region. In another embodiment, the transistor can include a gate dielectric layer, wherein the field-effect transistor is designed to have a maximum gate voltage of approximately 20 V, a maximum drain voltage of approximately 30 V, and a figure of merit no greater than approximately 30 mΩ*nC.A process of forming an electronic device can include providing a workpiece comprising a substrate, including an underlying doped region, and a semiconductor layer overlying the underlying doped region, wherein the semiconductor layer has a primary surface spaced apart from the underlying doped region. The process can also include forming a vertically-oriented conductive region extending from the primary surface to the underlying doped region, and forming a horizontally-oriented doped region adjacent to the primary surface. In a finished form of the electronic device, the horizontally-oriented doped region extends further in a lateral direction toward a region where a source region has been or will be formed, as compared to the vertically-oriented conductive region. The electronic device includes a transistor that includes the underlying doped region, the vertically-oriented conductive region, and the horizontally-oriented doped region.
    • 电子器件可以包括晶体管。 在一个实施例中,晶体管可以包括具有主表面和导电结构的半导体层。 导电结构可以包括位于与主表面相邻的水平取向的掺杂区域,与初级表面和水平取向的掺杂区域间隔开的下面的掺杂区域以及延伸穿过厚度的大部分的垂直取向的导电区域 并且电连接掺杂的水平区域和下面的掺杂区域。 在另一个实施例中,晶体管可以包括栅极电介质层,其中场效应晶体管被设计为具有大约20V的最大栅极电压,大约30V的最大漏极电压和不大于大约的品质因数 30 m&OHgr; * nC。 形成电子器件的工艺可以包括提供包括衬底的工件,包括下面的掺杂区域和覆盖下面的掺杂区域的半导体层,其中半导体层具有与下面的掺杂区域间隔开的主表面。 该方法还可以包括形成从主表面延伸到下掺杂区的垂直取向的导电区,以及形成与主表面相邻的水平取向的掺杂区。 在电子器件的成品形式中,与垂直取向的导电区域相比,水平取向的掺杂区域在横向方向上进一步朝向已经或将要形成源极区域的区域延伸。 电子器件包括晶体管,其包括下面的掺杂区域,垂直取向的导电区域和水平取向的掺杂区域。
    • 5. 发明授权
    • Process of forming an electronic device including a trench and a conductive structure therein
    • 在其中形成包括沟槽和导电结构的电子器件的工艺
    • US07902017B2
    • 2011-03-08
    • US12337271
    • 2008-12-17
    • Gary H. Loechelt
    • Gary H. Loechelt
    • H01L21/00
    • H01L29/0878H01L21/2815H01L29/0847H01L29/402H01L29/4175H01L29/42376H01L29/66659H01L29/66689H01L29/66696H01L29/7816H01L29/7835
    • A process of forming an electronic device can include providing a workpiece comprising a substrate, including an underlying doped region, and a semiconductor layer overlying the underlying doped region, wherein the semiconductor layer has a primary surface spaced apart from the underlying doped region. The process can also include forming a vertically-oriented conductive region extending from the primary surface to the underlying doped region, and forming a horizontally-oriented doped region adjacent to the primary surface. In a finished form of the electronic device, the horizontally-oriented doped region extends further in a lateral direction toward a region where a source region has been or will be formed, as compared to the vertically-oriented conductive region. The electronic device includes a transistor that includes the underlying doped region, the vertically-oriented conductive region, and the horizontally-oriented doped region.
    • 形成电子器件的工艺可以包括提供包括衬底的工件,包括下面的掺杂区域和覆盖下面的掺杂区域的半导体层,其中半导体层具有与下面的掺杂区域间隔开的主表面。 该方法还可以包括形成从主表面延伸到下掺杂区的垂直取向的导电区,以及形成与主表面相邻的水平取向的掺杂区。 在电子器件的成品形式中,与垂直取向的导电区域相比,水平取向的掺杂区域在横向方向上进一步朝向已经或将要形成源极区域的区域延伸。 电子器件包括晶体管,其包括下面的掺杂区域,垂直取向的导电区域和水平取向的掺杂区域。