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1. 发明申请

US20090122304A1 Apparatus and Method for Wafer Edge Exclusion Measurement 审中-公开
标题翻译：晶圆边缘排除测量的装置和方法
公开(公告)号：US20090122304A1
公开(公告)日：2009-05-14
申请号：US12188887
申请日：2008-08-08
申请人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael D. Robbins , Paul F. Forderhase
发明人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael D. Robbins , Paul F. Forderhase
IPC分类号： G01N21/88 , H05B37/02
CPC分类号： G01N21/4738 , G01N21/9503
摘要： A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. An automatic defect characterization processor is provided.
摘要翻译：衬底照明和检查系统提供用于照明和检查衬底，特别是衬底边缘。该系统使用具有设置在其外部或内部的多个光的光漫射器，用于提供衬底的均匀漫射照明。光扩散器的光学和成像系统外部用于检查包括镜面的基板的多个表面。提供自动缺陷表征处理器。

2. 发明申请

US20090116727A1 Apparatus and Method for Wafer Edge Defects Detection 审中-公开
标题翻译：晶圆边缘缺陷检测装置及方法
公开(公告)号：US20090116727A1
公开(公告)日：2009-05-07
申请号：US12188849
申请日：2008-08-08
申请人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael D. Robbins , Paul F. Forderhase
发明人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael D. Robbins , Paul F. Forderhase
IPC分类号： G06K9/00
CPC分类号： G01N21/4738 , G01N21/9503
摘要： A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system a image processor to automatically detect and characterize defects on the wafer's edge.
摘要翻译：衬底照明和检查系统提供用于照明和检查衬底，特别是衬底边缘。该系统用于自动检测和表征晶圆边缘缺陷的图像处理器。

3. 发明授权

US07508504B2 Automatic wafer edge inspection and review system 失效
标题翻译：自动晶圆边缘检查和审查系统
公开(公告)号：US07508504B2
公开(公告)日：2009-03-24
申请号：US11891657
申请日：2007-08-09
申请人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael D Robbins , Paul F. Forderhase
发明人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael D Robbins , Paul F. Forderhase
IPC分类号： G01N21/00
CPC分类号： G01N21/4738 , G01N21/9503
摘要： A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.
摘要翻译：衬底照明和检查系统提供用于照明和检查衬底，特别是衬底边缘。该系统使用具有设置在其外部或内部的多个光的光漫射器，用于提供衬底的均匀漫射照明。光扩散器的光学和成像系统外部用于检查包括镜面的基板的多个表面。光学元件可以相对于基板边缘的中心点径向旋转，以允许对基板边缘的所有表面进行聚焦检查。

4. 发明申请

US20080030731A1 Automatic wafer edge inspection and review system 失效
标题翻译：自动晶圆边缘检查和审查系统
公开(公告)号：US20080030731A1
公开(公告)日：2008-02-07
申请号：US11891657
申请日：2007-08-09
申请人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael Robbins , Paul Forderhase
发明人： Ju Jin , Satish Sadam , Vishal Verma , Zhiyan Huang , Siming Lin , Michael Robbins , Paul Forderhase
IPC分类号： G01J4/00 , G01N21/25 , G01N21/47
CPC分类号： G01N21/4738 , G01N21/9503
摘要： A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.
摘要翻译：衬底照明和检查系统提供用于照明和检查衬底，特别是衬底边缘。该系统使用具有设置在其外部或内部的多个光的光漫射器，用于提供衬底的均匀漫射照明。光扩散器的光学和成像系统外部用于检查包括镜面的基板的多个表面。光学元件可以相对于基板边缘的中心点径向旋转，以允许对基板边缘的所有表面进行聚焦检查。

5. 发明申请

US20060008151A1 Shape feature extraction and classification 有权
标题翻译：形状特征提取和分类
公开(公告)号：US20060008151A1
公开(公告)日：2006-01-12
申请号：US11003187
申请日：2004-12-03
申请人： Siming Lin , Kevin Crotty , Nicolas Vazquez
发明人： Siming Lin , Kevin Crotty , Nicolas Vazquez
IPC分类号： G06K9/46 , G06K9/62
CPC分类号： G06K9/6292 , G06K9/48
摘要： System and method for analyzing an image. A received image, comprising an object or objects, is optionally preprocessed. Invariant shape features of the object(s) are extracted using a generalized invariant feature descriptor. The generalized invariant feature descriptor may comprise a generalized invariant feature vector comprising components corresponding to attributes of each object, e.g., related to circularity, elongation, perimeter-ratio-based convexity, area-ratio-based convexity, hole-perimeter-ratio, hole-area-ratio, and/or functions of Hu Moment 1 and/or Hu Moment 2. Non-invariant features, e.g., scale and reflection, may be extracted to form corresponding feature vectors. The object is classified by computing differences between the generalized invariant feature vector (and optionally, non-invariant feature vectors) and respective generalized invariant feature vectors corresponding to reference objects, determining a minimum difference corresponding to a closest reference object or class of reference objects of the plurality of reference objects, and outputting an indication of the closest reference object or class as the classification.
摘要翻译：用于分析图像的系统和方法。可选地，包括对象的接收图像被预处理。使用广义不变特征描述符提取对象的不变形状特征。广义不变特征描述符可以包括广义不变特征向量，其包括对应于每个对象的属性的组件，例如与圆度，伸长率，基于周期比的凸度，面积比的凸度，孔周长比，孔 - 面积比和/或胡力矩1和/或胡力矩2的函数。可以提取非恒定特征，例如比例和反射，以形成对应的特征向量。通过计算广义不变特征向量（和可选地，非不变特征向量）与对应于参考对象的相应广义不变特征向量之间的差异来分类对象，确定对应于最接近的参考对象或参考对象的类别的最小差异多个参考对象，并且输出最接近的参考对象或类的指示作为分类。

6. 发明授权

US07668376B2 Shape feature extraction and classification 有权
标题翻译：形状特征提取和分类
公开(公告)号：US07668376B2
公开(公告)日：2010-02-23
申请号：US11003187
申请日：2004-12-03
申请人： Siming Lin , Kevin M. Crotty , Nicolas Vazquez
发明人： Siming Lin , Kevin M. Crotty , Nicolas Vazquez
IPC分类号： G06K9/46
CPC分类号： G06K9/6292 , G06K9/48
摘要： System and method for analyzing an image. A received image, comprising an object or objects, is optionally preprocessed. Invariant shape features of the object(s) are extracted using a generalized invariant feature descriptor. The generalized invariant feature descriptor may comprise a generalized invariant feature vector comprising components corresponding to attributes of each object, e.g., related to circularity, elongation, perimeter-ratio-based convexity, area-ratio-based convexity, hole-perimeter-ratio, hole-area-ratio, and/or functions of Hu Moment 1 and/or Hu Moment 2. Non-invariant features, e.g., scale and reflection, may be extracted to form corresponding feature vectors. The object is classified by computing differences between the generalized invariant feature vector (and optionally, non-invariant feature vectors) and respective generalized invariant feature vectors corresponding to reference objects, determining a minimum difference corresponding to a closest reference object or class of reference objects of the plurality of reference objects, and outputting an indication of the closest reference object or class as the classification.
摘要翻译：用于分析图像的系统和方法。可选地，包括对象的接收图像被预处理。使用广义不变特征描述符提取对象的不变形状特征。广义不变特征描述符可以包括广义不变特征向量，其包括对应于每个对象的属性的组件，例如与圆度，伸长率，基于周期比的凸度，面积比的凸度，孔周长比，孔 - 面积比和/或胡力矩1和/或胡力矩2的函数。可以提取非恒定特征，例如比例和反射，以形成对应的特征向量。通过计算广义不变特征向量（和可选地，非不变特征向量）与对应于参考对象的相应的广义不变特征向量之间的差异来分类对象，确定对应于最接近的参考对象或参考对象的类别的最小差异多个参考对象，并且输出最接近的参考对象或类的指示作为分类。

7. 发明授权

US07039229B2 Locating regions in a target image using color match, luminance pattern match and hill-climbing techniques 有权
标题翻译：使用颜色匹配，亮度图案匹配和爬山技术来定位目标图像中的区域
公开(公告)号：US07039229B2
公开(公告)日：2006-05-02
申请号：US10005548
申请日：2001-10-26
申请人： Siming Lin , Dinesh Nair , Darren R. Schmidt
发明人： Siming Lin , Dinesh Nair , Darren R. Schmidt
IPC分类号： G09K9/00
CPC分类号： G06K9/6293 , G06K9/3241 , G06K9/4652
摘要： A system and method for locating regions in a target image matching a template image with respect to color and pattern information. The template image is characterized with regard to pattern and color. A first-pass search is made using color information from the color characterization of the template image to find color match candidate locations preferably via a hill-climbing technique. For each color match candidate location, a luminance pattern matching search is performed, optionally using a hill-climbing technique, on a region proximal to the location, producing final match regions. For each final match region a hue plane pattern match score may be calculated using pixel samples from the interior of each pattern. A final color match score may be calculated for each final match region. A final score is calculated from luminance pattern match, color match, and possibly hue pattern match, scores, and the scores and sum output.
摘要翻译：一种用于在与颜色和图案信息相匹配的模板图像中定位目标图像中的区域的系统和方法。模板图像的特征在于图案和颜色。使用来自模板图像的颜色表征的颜色信息进行首次搜索，以优选地通过爬山技术来找到匹配候选位置。对于每个颜色匹配候选位置，在靠近该位置的区域上执行亮度图案匹配搜索（可选地使用爬山技术），产生最终匹配区域。对于每个最终匹配区域，可以使用来自每个图案的内部的像素样本来计算色调平面图案匹配分数。可以针对每个最终匹配区域计算最终颜色匹配分数。从亮度模式匹配，颜色匹配和可能的色调模式匹配，分数以及得分和总和输出计算最终得分。

8. 发明授权

US07046842B2 System and method for color characterization using fuzzy pixel classification with application in color matching and color match location 有权
公开(公告)号：US07046842B2
公开(公告)日：2006-05-16
申请号：US09737531
申请日：2000-12-13
申请人： Siming Lin , Dinesh Nair , Darren Schmidt
发明人： Siming Lin , Dinesh Nair , Darren Schmidt
IPC分类号： G06K9/00
CPC分类号： G06K9/3241 , G06K9/4652 , G06K9/6293 , G06T7/001 , G06T2207/10024 , G06T2207/30141
摘要： A system and method for measuring the similarity of multiple-color images and for locating regions of a target image having color information that matches, at least to a degree, the color information of a template image. A color characterization method operates to characterize the colors of an image and to measure the similarity between multiple-color images. For each image pixel, the method determines a color category or bin for the respective pixel based on HSI values of the respective pixel, wherein the color category is one of a plurality of possible color categories in HSI color space. In various embodiments, the weight of the pixel may be fractionally distributed across a plurality of color categories, e.g., as determined by applying fuzzy pixel classification with a fuzzy membership function. The percentage of pixels assigned to each category is then determined. The percentage of pixels in each color category is then used as a color feature vector to represent the color information of the color image. A quantitative measurement of the color similarity between color images is then computed based on the distance between their color feature vectors. Once the color information of a template image has been characterized, a target image may be searched in order to locate regions within the target image having matching color information. In one embodiment, a coarse-to-fine heuristic may be utilized, in which multiple search stages of decreasing granularity are performed. A first-stage search may operate to identify a list of candidate match regions based on the city-block distance of the color feature vector computed using a sub-sampling scheme. These candidate match regions may then be examined in further detail in order to determine final matches.

9. 发明授权

US06963425B1 System and method for locating color and pattern match regions in a target image 有权
标题翻译：用于在目标图像中定位颜色和图案匹配区域的系统和方法
公开(公告)号：US06963425B1
公开(公告)日：2005-11-08
申请号：US09638271
申请日：2000-08-14
申请人： Dinesh Nair , Siming Lin , Darren Schmidt , Nicolas Vazqúez
发明人： Dinesh Nair , Siming Lin , Darren Schmidt , Nicolas Vazqúez
IPC分类号： G06F15/00 , G06K1/00
CPC分类号： G06T7/0006 , G06K9/4652 , G06K9/6203 , G06T7/90 , G06T2207/30141
摘要： A system and method for locating regions in a target image that match a template image with respect to color and pattern information. The method may comprise performing a first-pass search using color information obtained in a color characterization analysis of the template image in order to find a plurality of color match candidate locations. For each color match candidate location, a region proximal to the location may then be searched in detail, based on pattern information obtained in a pattern analysis of the template image.
摘要翻译：一种用于在目标图像中定位与模板图像相对于颜色和图案信息匹配的区域的系统和方法。该方法可以包括使用在模板图像的颜色表征分析中获得的颜色信息来执行第一遍搜索，以便找到多个颜色匹配候选位置。对于每个颜色匹配候选位置，可以基于在模板图像的模式分析中获得的模式信息来详细搜索靠近该位置的区域。

10. 发明授权

US06944331B2 Locating regions in a target image using color matching, luminance pattern matching and hue plane pattern matching 有权
标题翻译：使用颜色匹配，亮度图案匹配和色调平面图案匹配来定位目标图像中的区域
公开(公告)号：US06944331B2
公开(公告)日：2005-09-13
申请号：US10014945
申请日：2001-10-26
申请人： Darren R. Schmidt , Kevin L. Schultz , Siming Lin , Dinesh Nair
发明人： Darren R. Schmidt , Kevin L. Schultz , Siming Lin , Dinesh Nair
IPC分类号： G06F15/00 , G06K9/00 , G06K9/62 , G06T5/00 , G06T7/00 , G06T7/40 , H03F1/26 , H04B15/00
CPC分类号： G06T7/001 , G06T7/32 , G06T7/90 , G06T2200/24 , G06T2207/10016
摘要： A system and method for locating regions in a target image that match a template image with respect to color and pattern information. The template image is characterized with regard to pattern and color. The method comprises performing a first-pass search using color information from the color characterization of the template image to find one or more color match candidate locations. For each color match candidate location, a luminance, i.e., gray scale, pattern matching search is performed on a region proximal to the location, producing one or more final match regions. For each final match region a hue plane pattern match score may be calculated using pixel samples from the interior of each pattern. A final color match score may be calculated for each final match region. A weighted sum of luminance pattern match, hue pattern match, and color match scores may be calculated, and the scores and sum output.
摘要翻译：一种用于在目标图像中定位与模板图像相对于颜色和图案信息匹配的区域的系统和方法。模板图像的特征在于图案和颜色。该方法包括使用来自模板图像的颜色表征的颜色信息来执行首次搜索以找到一个或多个颜色匹配候选位置。对于每个颜色匹配候选位置，在靠近该位置的区域上执行亮度，即灰度，模式匹配搜索，产生一个或多个最终匹配区域。对于每个最终匹配区域，可以使用来自每个图案的内部的像素样本来计算色调平面图案匹配分数。可以针对每个最终匹配区域计算最终颜色匹配分数。可以计算亮度模式匹配，色调模式匹配和颜色匹配分数的加权和，并计算得分和总和输出。

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