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    • 9. 发明授权
    • Non-resonant drive for adaptive trajectory of a scanner system having a MEMS device
    • 具有MEMS装置的扫描器系统的自适应轨迹的非谐振驱动
    • US07679804B2
    • 2010-03-16
    • US11796230
    • 2007-04-26
    • Dean R. BrownWyatt O. DavisGregory T. GibsonRichard A. James
    • Dean R. BrownWyatt O. DavisGregory T. GibsonRichard A. James
    • G02B26/08
    • G02B26/085G02B7/1821
    • Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may be driven in a non-resonant mode of operation. The drive signal provided to the MEMS device may be tailored to prevent the MEMS device from exhibiting resonance characteristics and to cause the MEMS device to operate non-resonantly. In one or more embodiments, a filter may be used to tailor the frequency components of the drive signal, for example to sufficiently attenuate frequency components at or near the resonant frequency of the drive signal. A direct current signal may be provided to the MEMS device to provide an offset to scanned light beam for example to provide beam steering, and the sweep range and/or sweep frequency may be adjusted for example to steer the scanning field of view off axis from the user pointing axis.
    • 简而言之,根据一个或多个实施例,可以以非谐振工作模式驱动用于扫描器系统的MEMS装置。 可以调整提供给MEMS器件的驱动信号,以防止MEMS器件表现出谐振特性,并使MEMS器件非谐振地工作。 在一个或多个实施例中,可以使用滤波器来定制驱动信号的频率分量,例如以充分衰减在驱动信号的谐振频率处或附近的频率分量。 可以向MEMS器件提供直流信号以提供扫描光束的偏移,例如以提供光束转向,并且可以调整扫描范围和/或扫描频率以例如将扫描视场偏离轴线 用户指向轴。