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    • 3. 发明授权
    • Wafer check valve assembly and related methods of use
    • 晶圆止回阀总成及相关使用方法
    • US08887757B2
    • 2014-11-18
    • US13418048
    • 2012-03-12
    • Gary A. MorenJoshua Lee HootsJon Terence StonePaul M. Gutmann
    • Gary A. MorenJoshua Lee HootsJon Terence StonePaul M. Gutmann
    • F16K15/00
    • F16K15/033F16K15/03F16K27/0227Y10T137/7857Y10T137/7898Y10T137/7903
    • Provided is a wafer check valve assembly comprising a body having a mating side including first, second and third surfaces and a shaft groove, a tapered surface of the mating side extends from the third surface toward an inlet side of the body and from a first end to a second end of a port opening; a retainer having a mating side including fourth, fifth and sixth surfaces; and a disc with a shaft; wherein, when the body, retainer and disc are mated together: the shaft is housed between the body and the retainer and within the shaft groove, the first and fourth surfaces are proximal, the second and fifth surfaces are proximal, and the third and sixth surfaces proximal, so to define a pocket housing a gasketing material to form a seal between the body and retainer and to secure together the body, retainer, and disc.
    • 提供了一种晶片止回阀组件,其包括具有包括第一,第二和第三表面的配合侧的主体和轴槽,配合侧的锥形表面从主体的第三表面朝向主体的入口侧延伸,并且从第一端 到端口开口的第二端; 具有包括第四,第五和第六表面的配合侧的保持器; 和带有轴的盘; 其特征在于,当主体,保持器和盘配合在一起时:轴被容纳在主体和保持器之间并且在轴槽内,第一和第四表面是近端的,第二和第五表面是近端的,而第三和第六 表面近侧,从而限定一个容纳垫圈材料的口袋,以在本体和保持器之间形成密封并将本体,保持器和盘固定在一起。