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2. 发明授权

US5581350A Method and system for calibrating an ellipsometer 失效
标题翻译：用于校准椭偏仪的方法和系统
公开(公告)号：US5581350A
公开(公告)日：1996-12-03
申请号：US471997
申请日：1995-06-06
申请人： Xing Chen , Philip D. Flanner, III , Kiron B. Malwankar , Jennming Chen
发明人： Xing Chen , Philip D. Flanner, III , Kiron B. Malwankar , Jennming Chen
IPC分类号： G01N21/21 , G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： A method for calibrating an ellipsometer, and an ellipsometer including a processor programmed to control the analyzer, polarizer, and other ellipsometer components, and to process the data measured by the ellipsometer to perform the calibration method automatically. Where the ellipsometer's polarizer rotates and the analyzer remains fixed during measurement, the method determines coarse approximations of values A.sub.0 and P.sub.0, and then processes reflectivity data obtained at two or more analyzer angles to determine refined approximations of the values A.sub.0 and P.sub.0, where P.sub.0 is the angle of the polarizer's optical axis at an initial time, and A.sub.0 is the offset of the actual orientation angle of the analyzer from a nominal analyzer angle. Preferably the ellipsometer is a spectroscopic ellipsometer, the reflectivity data determine a tan.psi. spectrum and a cos.DELTA. spectrum for each of the analyzer angles, and the coarse approximations of A.sub.0 and P.sub.0 are refined by processing the reflectivity data by performing regression on A.sub.0 and P.sub.0 until the differences among the tan.psi. and cos.DELTA. spectra for several analyzer angles are minimized. Where the ellipsometer's analyzer rotates and the polarizer remains fixed during measurement, the method coarsely determines values A'.sub.0 and P'.sub.0, and then processes reflectivity data obtained at two or more polarizer angles to determine refined approximations of the values A'.sub.0 and P'.sub.0, where P'.sub.0 is the angle of the analyzer's optical axis at an initial time, and A'.sub.0 is the offset of the actual orientation angle of the polarizer from a nominal polarizer angle.
摘要翻译：用于校准椭偏仪的方法以及椭圆计，其包括被编程为控制分析仪，偏振器和其它椭偏仪组件的处理器，并且处理由椭偏仪测量的数据以自动执行校准方法。在测量期间，椭偏仪偏振器旋转并且分析仪保持固定，该方法确定值A0和P0的粗近似值，然后处理在两个或更多分析器角度获得的反射率数据，以确定值A0和P0的精确近似，其中P0为偏振器的光轴在初始时的角度，A0是分析仪的实际取向角与标称分析仪角度的偏移。优选地，椭偏仪是分光椭偏仪，反射率数据确定每个分析器角度的tan psi光谱和cosDDTA光谱，并且通过在A0和P0上进行回归处理反射率数据来改善A0和P0的粗略近似直到几个分析仪角度的tan psi和cos DELTA光谱之间的差异最小化。在椭偏仪的分析仪旋转和偏振器在测量期间保持固定的情况下，该方法粗略地确定值A'0和P'0，然后处理在两个或多个偏振器角度处获得的反射率数据，以确定值A'0和P的精确近似 '0，其中P'0是初始时分析仪的光轴的角度，A'0是偏振器与标称偏振器角度的实际定向角的偏移。

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