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    • 2. 发明授权
    • Cathode sputtering apparatus on the magnetron principle with a hollow
cathode and a cylindrical target
    • 具有空心阴极和圆柱形靶的磁控管原理的阴极溅射装置
    • US4966677A
    • 1990-10-30
    • US344244
    • 1989-04-27
    • Hans AichertRainer GegenwartReiner KuklaKlaus WilmesJorg Kieser
    • Hans AichertRainer GegenwartReiner KuklaKlaus WilmesJorg Kieser
    • C23C14/34H01J37/34
    • C23C14/3407H01J37/3405
    • Cathode sputtering apparatus having a hollow cathode on the magnetron principle with a cathode base (5) in which a hollow target (9) with a cylindrical sputtering surface (10) and a cylindrical outer surface is disposed. The cathode base (5) has a cooling passage (6). The target is externally surrounded by a magnet system (18) with magnet poles for the production of a rotationally symmetrical tunnel of magnetic lines of force closed on the circumference and over the sputtering surface. Outside of the space surrounded by the sputtering surface (10) there is disposed at least one anode (3, 4). A transport path for a substrate to be coated passes through the target (9) and the at least one anode.The cooling passage (6) is sealed off from the target (9) by a wall (7). Due to a narrow clearance, as soon as the target (9) reaches its operating temperature it comes in thermal contact with the wall (7). The [north] pole faces (N) of the magnet system (18) are on one side and the other [south] pole faces (S) lie on the other side of the end faces of the target (9) and radially on a radius which is equal to or greater than the radius of the sputtering surface (10). The magnet system (18) is held at a freely adjustable ("floating") potential in operation by insulating spaces (11, 19, 10).
    • 在具有阴极基体(5)的磁控管原理上具有空心阴极的阴极溅射装置设置有具有圆柱形溅射表面(10)的中空靶(9)和圆柱形外表面。 阴极基座(5)具有冷却通道(6)。 目标被具有磁极的磁体系统(18)外部包围,用于产生在圆周上和溅射表面上的磁力线的旋转对称的隧道。 在由溅射表面(10)围绕的空间的外部设置有至少一个阳极(3,4)。 待涂覆的基底的输送路径穿过靶(9)和至少一个阳极。 冷却通道(6)通过壁(7)与靶(9)密封。 由于狭窄的间隙,只要目标(9)达到其工作温度,它就与墙壁(7)热接触。 磁体系(18)的[北]极面(N)位于一侧,另一[南]极面(S)位于靶(9)端面的另一侧, 半径等于或大于溅射表面(10)的半径。 磁体系统(18)通过绝缘空间(11,19,10)保持在操作中可自由调节(“浮动”)的电位。
    • 7. 发明授权
    • Variable high-current resistor, especially for use as protective element
in power switching applications & circuit making use of high-current
resistor
    • 可变大电流电阻,特别用作电力开关应用中的保护元件,并利用大电流电阻
    • US5644283A
    • 1997-07-01
    • US381927
    • 1995-02-14
    • Hubert Grosse-WildeJorg KieserWilfried JaehnerFritz PohlReinhard StegerGert Vogel
    • Hubert Grosse-WildeJorg KieserWilfried JaehnerFritz PohlReinhard StegerGert Vogel
    • H01C10/10H01C10/12H02H9/02H01C7/10
    • H02H9/026H01C10/10
    • A variable high-current resistor, especially for use as a protective element in power switching technology has already been proposed, which contains carbon as a resistance material, at least one boundary layer with a transition zone to another electric conductor being provided. By applying a contact pressure, the resistance in the transition zone can be kept low. Under the prior art, the resistance is converted into a highly resistive state by means of Joulean heat. In accordance with the invention, the contact pressure of the variable high-current resistor is able to be selectively influenced, the carbon- and/or carbon-black-containing layer being pressed by the surface pressure with a preset first value against the other conductor to adjust the low-resistance state of the resistor, and that, in the event of a short-circuit, this contact pressure being able to be reduced in a short enough time to a second value, at which the resistance in the transition zone goes up by at least two orders of magnitude. High-current resistors of this type are able to be used in conjunction with circuit-breakers, power semiconductors, contactors and vacuum contactors.
    • PCT No.PCT / DE93 / 00721 Sec。 371日期:1995年2月14日 102(e)1995年2月14日PCT PCT 1993年8月11日PCT公布。 公开号WO94 / 06130 日期1994年3月17日已经提出了特别用作功率开关技术中的保护元件的可变大电流电阻器,其包含碳作为电阻材料,至少一个具有与另一导体的过渡区的边界层 提供。 通过施加接触压力,过渡区域中的电阻可以保持较低。 在现有技术中,通过Joulean热将电阻转换成高电阻状态。 根据本发明,能够选择性地影响可变高电流电阻器的接触压力,所述含碳和/或含碳黑的层被表面压力按预定的第一值抵抗另一导体 以调节电阻器的低电阻状态,并且在短路的情况下,该接触压力能够在足够短的时间内减小到过渡区域中的电阻达到第二值 上升至少两个数量级。 这种类型的大电流电阻器可以与断路器,功率半导体,接触器和真空接触器结合使用。
    • 8. 发明授权
    • Sputtering cathode based on the magnetron principle
    • 基于磁控管原理的溅射阴极
    • US4933064A
    • 1990-06-12
    • US126776
    • 1987-11-30
    • Michael GeislerJorg KieserReiner Kukla
    • Michael GeislerJorg KieserReiner Kukla
    • C23C14/36C23C14/34C23C14/35H01J37/34
    • H01J37/3423H01J37/3408H01J37/3426H01J37/3452
    • A sputtering cathode for the coating of substrates. The cathode has a base, a target of nonmagnetic material, and a magnet system having exposed pole faces for the production of a tunnel of magnetic lines of force overarching the sputtering surface. The target is provided with at least two continuous projections lying one inside the other, which contain at least one sputtering surface between them, and have confronting wall surfaces. The pole faces are located on both sides of the projections and sputtering surface between them such that magnetic lines of force issue perpendicularly from the one wall surface and, after crossing the sputtering surface, re-enter perpendicularly the opposite wall surface. The magnet system has permanent magnets magnetized parallel to the projections, which are yoked together on the sides facing away from the projections by a soft-magnetic base, and are provided on the sides facing the projections with soft-magnetic pole shoes extending over at least a part of the height of the projections.
    • 用于涂覆基材的溅射阴极。 阴极具有基极,非磁性材料的靶,以及具有暴露极面的磁体系统,用于产生覆盖溅射表面的磁力线的隧道。 目标设置有至少两个连续的突起,一个在另一个内部,其在它们之间包含至少一个溅射表面,并且具有面对的壁表面。 极面位于突起的两侧并且在它们之间的溅射表面,使得磁力线从一个壁表面垂直地发生,并且在穿过溅射表面之后,垂直地重新进入相​​对的壁表面。 磁体系统具有平行于凸起磁化的永久磁体,它们通过软磁性底座在背对凸起的侧面上一起被钩住,并且在面向突出部的侧面上设置有至少延伸的软磁极靴 投影高度的一部分。