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    • 5. 发明申请
    • CMOS VARACTOR
    • US20090057742A1
    • 2009-03-05
    • US11847378
    • 2007-08-30
    • Sungjae LeeScott keith Springer
    • Sungjae LeeScott keith Springer
    • H01L29/94H01L21/8238
    • H01L29/93H01L27/0808H01L27/0811H01L29/94
    • A varactor and method of fabricating the varactor. The varactor includes a silicon body in a silicon layer of an SOI substrate; a polysilicon electrode comprising a gate region and a plate region separated from the body by a gate dielectric layer, the gate and plate regions contiguous, the electrode electrically connected to a first pad; and a source formed in the body on a first side of the gate region, a drain formed in the body on a second and opposite side of the gate region, and a body contact formed in the body on a side of the plate region away from the gate region, the source, drain and body contact, separated from each other by regions of the body under the electrode, the source, drain and body contact electrically connected to each other and to a second pad.
    • 变容二极管和制造变容二极管的方法。 变容二极管包括SOI衬底的硅层中的硅体; 多晶硅电极,其包括栅极区域和通过栅极介电层与所述主体分离的板状区域,所述栅极和所述板区域邻接,所述电极电连接到第一焊盘; 以及形成在所述主体中的所述栅极区域的第一侧上的源极,在所述栅极区域的第二相对侧上形成在所述主体中的漏极,以及在所述主体中形成在所述板区域的远离所述栅极区域的一侧的主体接触 栅极区域,源极,漏极和本体接触,通过电极下方的主体区域彼此分离,源极,漏极和主体接触彼此电连接并连接到第二焊盘。