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    • 2. 发明授权
    • Electroactive polymer actuator and method of manufacturing the same
    • 电动聚合物致动器及其制造方法
    • US08384271B2
    • 2013-02-26
    • US12855785
    • 2010-08-13
    • Jong-Oh KwonSeung-Tae Choi
    • Jong-Oh KwonSeung-Tae Choi
    • H01L41/047
    • H01L41/293G02B3/14H01L41/0474H01L41/083H01L41/0833H01L41/27Y10T29/42Y10T29/49165
    • A multilayer electroactive polymer actuator and a method of manufacturing the same. The multilayer electroactive polymer actuator is divided into an actuating area and a non-actuating area. A plurality of driving electrodes, each formed on a side of the respective polymer layer to correspond to the actuating area. A plurality of extension electrodes connected to the driving electrodes and a common electrode for vertically connecting the extension electrodes are formed to correspond to the non-actuating area. A via hole is formed through the plurality of non-actuating layers and has a diameter which increases in a stepwise manner upwards. The common electrode is formed in the via hole. The driving electrode includes an alloy of aluminum and copper. The extension electrode is formed of material having a small reactivity with respect to laser as compared to the reactivity of the polymer layer.
    • 一种多层电活性聚合物致动器及其制造方法。 多层电活性聚合物致动器被分成致动区域和非致动区域。 多个驱动电极,各自形成在相应聚合物层的一侧以对应于致动区域。 连接到驱动电极的多个延伸电极和用于垂直连接延伸电极的公共电极形成为对应于非致动区域。 穿过多个非致动层形成通孔,并且其直径以逐步的方式向上增加。 公共电极形成在通孔中。 驱动电极包括铝和铜的合金。 与聚合物层的反应性相比,延伸电极由相对于激光的反应性小的材料形成。