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    • 3. 发明授权
    • Method for forming a cleaved facet of semiconductor device
    • 用于形成半导体器件的切割面的方法
    • US08871612B2
    • 2014-10-28
    • US13440640
    • 2012-04-05
    • Young Hun HanDong Han Yoo
    • Young Hun HanDong Han Yoo
    • H01L21/301
    • H01L33/0095H01L33/007H01L33/16
    • Embodiments disclose a method including forming at least one compound semiconductor layer on a top r-face of a substrate, forming a line for cleavage on a bottom r-face of the substrate along a length of a guide line, wherein the guide line extends in a (11-22)-plane direction of the substrate, wherein the guide line extends from one portion of an edge to another portion of the edge, and wherein the edge is disposed between the top r-face and the bottom r-face of the substrate, and applying a force to the bottom r-face of the substrate to cleave the substrate along the line for cleavage in the (11-22)-plane direction and to form a cleaved facet along a c-plane of the at least one compound semiconductor.
    • 实施例公开了一种方法,包括在基板的顶部r面上形成至少一个化合物半导体层,沿着导向线的长度在基板的底部r面上形成用于切割的线,其中引导线延伸在 基板的(11-22)平面方向,其中所述引导线从边缘的一部分延伸到所述边缘的另一部分,并且其中所述边缘设置在所述边缘的顶部r面和底部r面之间 衬底,并且向衬底的底部r面施加一个力以沿着线切割衬底以在(11-22)平面方向上进行切割,并沿着至少在该平面方向的c面上形成一个切割面 一种化合物半导体。
    • 4. 发明申请
    • METHOD FOR FORMING A CLEAVED FACET OF SEMICONDUCTOR DEVICE
    • 用于形成半导体器件的清洁表面的方法
    • US20130217209A1
    • 2013-08-22
    • US13440640
    • 2012-04-05
    • Young Hun HANDong Han Yoo
    • Young Hun HANDong Han Yoo
    • H01L21/78
    • H01L33/0095H01L33/007H01L33/16
    • Embodiments disclose a method including forming at least one compound semiconductor layer on a top r-face of a substrate, forming a line for cleavage on a bottom r-face of the substrate along a length of a guide line, wherein the guide line extends in a (11-22)-plane direction of the substrate, wherein the guide line extends from one portion of an edge to another portion of the edge, and wherein the edge is disposed between the top r-face and the bottom r-face of the substrate, and applying a force to the bottom r-face of the substrate to cleave the substrate along the line for cleavage in the (11-22)-plane direction and to form a cleaved facet along a c-plane of the at least one compound semiconductor.
    • 实施例公开了一种方法,包括在基板的顶部r面上形成至少一个化合物半导体层,沿着导向线的长度在基板的底部r面上形成用于切割的线,其中引导线延伸在 基板的(11-22)平面方向,其中所述引导线从边缘的一部分延伸到所述边缘的另一部分,并且其中所述边缘设置在所述边缘的顶部r面和底部r面之间 衬底,并且向衬底的底部r面施加一个力以沿着线切割衬底以在(11-22)平面方向上进行切割,并沿着至少在该平面方向的c面上形成一个切割面 一种化合物半导体。
    • 5. 发明申请
    • METHOD FOR FORMING A CLEAVED FACET OF SEMICONDUCTOR DEVICE
    • 用于形成半导体器件的清洁表面的方法
    • US20130217162A1
    • 2013-08-22
    • US13440321
    • 2012-04-05
    • Young Hun HANDong Han Yoo
    • Young Hun HANDong Han Yoo
    • H01L21/78
    • H01L21/0245H01L21/0242H01L21/02433H01L21/02516H01L21/02538H01L33/0095
    • Embodiments disclose a method including forming at least one compound semiconductor layer on a top r-face of a substrate, forming a line for cleavage on a bottom r-face of the substrate along a length of a guide line, wherein the guide line extends in a (11-20)-plane direction of the substrate, wherein the guide line extends from one portion of an edge to another portion of the edge, and wherein the edge is disposed between the top r-face and the bottom r-face of the substrate, and applying a force to the bottom r-face of the substrate to cleave the substrate along the line for cleavage in the (11-20)-plane direction and to form a cleaved facet along a m-plane of the at least one compound semiconductor.
    • 实施例公开了一种方法,包括在基板的顶部r面上形成至少一个化合物半导体层,沿着导向线的长度在基板的底部r面上形成用于切割的线,其中引导线延伸在 基板的(11-20)平面方向,其中所述引导线从边缘的一部分延伸到所述边缘的另一部分,并且其中所述边缘设置在所述边缘的顶部r面和底部r面之间 并且向衬底的底部r面施加一个力,沿着(11-20)平面方向上的切割线切割衬底,并沿着至少在(11-20))平面方向上的m平面形成切割面 一种化合物半导体。
    • 6. 发明授权
    • Method for forming a cleaved facet of semiconductor device
    • 用于形成半导体器件的切割面的方法
    • US08912528B2
    • 2014-12-16
    • US13440321
    • 2012-04-05
    • Young Hun HanDong Han Yoo
    • Young Hun HanDong Han Yoo
    • H01L21/02
    • H01L21/0245H01L21/0242H01L21/02433H01L21/02516H01L21/02538H01L33/0095
    • Embodiments disclose a method including forming at least one compound semiconductor layer on a top r-face of a substrate, forming a line for cleavage on a bottom r-face of the substrate along a length of a guide line, wherein the guide line extends in a (11-20)-plane direction of the substrate, wherein the guide line extends from one portion of an edge to another portion of the edge, and wherein the edge is disposed between the top r-face and the bottom r-face of the substrate, and applying a force to the bottom r-face of the substrate to cleave the substrate along the line for cleavage in the (11-20)-plane direction and to form a cleaved facet along a m-plane of the at least one compound semiconductor.
    • 实施例公开了一种方法,包括在基板的顶部r面上形成至少一个化合物半导体层,沿着导向线的长度在基板的底部r面上形成用于切割的线,其中引导线延伸在 基板的(11-20)平面方向,其中所述引导线从边缘的一部分延伸到所述边缘的另一部分,并且其中所述边缘设置在所述边缘的顶部r面和底部r面之间 并且向衬底的底部r面施加一个力,沿着(11-20)平面方向上的切割线切割衬底,并沿着至少在(11-20))平面方向上的m平面形成切割面 一种化合物半导体。