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    • 2. 发明申请
    • METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING VERTICAL TRANSISTOR
    • 制造具有垂直晶体管的半导体器件的方法
    • US20090170302A1
    • 2009-07-02
    • US12335668
    • 2008-12-16
    • Jong Han SHINHyung Soon PARKJum Yong PARKSung Jun KIM
    • Jong Han SHINHyung Soon PARKJum Yong PARKSung Jun KIM
    • H01L21/3205
    • H01L29/66666H01L29/4236H01L29/42376H01L29/7827
    • A method for manufacturing a semiconductor device having a vertical transistor includes forming hard masks on a semiconductor substrate to expose portions of the semiconductor substrate. Then the exposed portions of the semiconductor substrate are etched to define grooves in the semiconductor substrate. A gate conductive layer is formed on the hard masks and surfaces of the grooves to a thickness that does not completely fill the grooves. A sacrificial layer is formed on the gate conductive layer to completely fill the grooves. A partial thickness of the sacrificial layer is removed to expose the gate conductive layer and portions of the gate conductive layer formed on the hard masks and on sidewalls of upper portions of the grooves are removed. The remaining sacrificial layer is completely removed. Gates are formed on sidewalls of lower portions of the grooves by etching the gate conductive layer.
    • 一种制造具有垂直晶体管的半导体器件的方法包括:在半导体衬底上形成硬掩模以暴露半导体衬底的部分。 然后蚀刻半导体衬底的暴露部分以在半导体衬底中限定凹槽。 在硬掩模和凹槽的表面上形成栅极导电层至不完全填充凹槽的厚度。 牺牲层形成在栅极导电层上以完全填充凹槽。 去除牺牲层的部分厚度以露出栅极导电层,并且去除形成在硬掩模上的栅极导电层的部分以及沟槽上部的侧壁上的部分。 剩余的牺牲层被完全去除。 通过蚀刻栅极导电层在栅极的下部的侧壁上形成栅极。
    • 6. 发明申请
    • Actuator for Active Roll Control System
    • 主动滚动控制系统执行机构
    • US20100007103A1
    • 2010-01-14
    • US12499523
    • 2009-07-08
    • Sung Jun KIMHae Ryong ChoiSang Ho Lee
    • Sung Jun KIMHae Ryong ChoiSang Ho Lee
    • B60G21/055
    • B60G21/0555B60G2202/422B60G2204/1224B60G2204/4193
    • An actuator for an active roll control system that connects a stabilizer bar with a lower arm may include a screw housing having a space, a power transmitter slidably mounted in an upper interior circumference of the screw housing, and having an upper end portion connected to one end of the stabilizer bar and a lower end portion slidably movable in the space wherein the lower end portion of the power transmitter includes a screw groove and a screw thread is formed at an interior circumference of an inlet portion, a lead screw being inserted in the screw groove of the power transmitter and threaded to the screw thread of the inlet portion and having a screw rotation shaft integrally connected to a lower end thereof, and a drive motor mounted at a lower portion of the screw housing and having a rotation shaft connected to the screw rotation shaft.
    • 用于将稳定杆与下臂连接的主动滚动控制系统的致动器可以包括具有空间的螺旋壳体,可滑动地安装在螺钉壳体的上部内周中的动力传递器,并且具有连接到一个 所述稳定杆的端部和在所述动力变送器的下端部具有螺纹槽的空间可滑动地移动的下端部,在所述入口部的内周形成有螺纹, 电动变送器的螺纹槽,并且与入口部分的螺纹螺纹连接,并且具有与其下端一体连接的螺杆旋转轴,以及安装在螺钉壳体的下部的驱动马达,其具有连接到 螺杆旋转轴。