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1. 发明申请

US20120140889A1 FAST MEASUREMENT OF X-RAY DIFFRACTION FROM TILTED LAYERS 有权
标题翻译：从倾斜层快速测量X射线衍射
公开(公告)号：US20120140889A1
公开(公告)日：2012-06-07
申请号：US12958420
申请日：2010-12-02
申请人： John Wall , David Jacques , Boris Yokhin , Alexander Krokhmal , Paul Ryan , Richard Bytheway , David Berman , Matthew Wormington
发明人： John Wall , David Jacques , Boris Yokhin , Alexander Krokhmal , Paul Ryan , Richard Bytheway , David Berman , Matthew Wormington
IPC分类号： G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束指向具有多个单晶层的样品的表面，所述样品具有至少第一层和形成在第一层上并相对于第一层倾斜的第二层。在将感测到的X射线分解为角度的同时，同时检测从第一和第二层中的每一个衍射的X射线，以便产生至少包括由于第一层的第一衍射峰的衍射光谱，以及由于第二层造成的第二衍射峰。分析衍射光谱以识别至少第二层的特征。

2. 发明授权

US08437450B2 Fast measurement of X-ray diffraction from tilted layers 有权
$Fast measurement of X-ray diffraction from tilted layers$
标题翻译：从倾斜层快速测量X射线衍射
公开(公告)号：US08437450B2
公开(公告)日：2013-05-07
申请号：US12958420
申请日：2010-12-02
申请人： John Wall , David Jacques , Boris Yokhin , Alexander Krokhmal , Paul Ryan , Richard Bytheway , David Berman , Matthew Wormington
发明人： John Wall , David Jacques , Boris Yokhin , Alexander Krokhmal , Paul Ryan , Richard Bytheway , David Berman , Matthew Wormington
IPC分类号： G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束指向具有多个单晶层的样品的表面，所述样品具有至少第一层和形成在第一层上并相对于第一层倾斜的第二层。在将感测到的X射线分解为角度的同时，同时检测从第一和第二层中的每一个衍射的X射线，以便产生至少包括由于第一层的第一衍射峰的衍射光谱，以及由于第二层造成的第二衍射峰。分析衍射光谱以识别至少第二层的特征。

3. 发明授权

US08731138B2 High-resolution X-ray diffraction measurement with enhanced sensitivity 有权
$High-resolution X-ray diffraction measurement with enhanced sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US08731138B2
公开(公告)日：2014-05-20
申请号：US13547073
申请日：2012-07-12
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/20 , G01N23/203 , G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

4. 发明申请

US20110164730A1 High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity 有权
$High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US20110164730A1
公开(公告)日：2011-07-07
申请号：US12683436
申请日：2010-01-07
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Ofengenden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Ofengenden , David Berman , Matthew Wormington
IPC分类号： G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

5. 发明申请

US20120281814A1 High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity 有权
$High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US20120281814A1
公开(公告)日：2012-11-08
申请号：US13547073
申请日：2012-07-12
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

6. 发明授权

US08243878B2 High-resolution X-ray diffraction measurement with enhanced sensitivity 有权
$High-resolution X-ray diffraction measurement with enhanced sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US08243878B2
公开(公告)日：2012-08-14
申请号：US12683436
申请日：2010-01-07
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/20 , G01N23/203 , G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

7. 发明授权

US08687766B2 Enhancing accuracy of fast high-resolution X-ray diffractometry 有权
$Enhancing accuracy of fast high-resolution X-ray diffractometry$
标题翻译：提高快速高分辨率X射线衍射的准确性
公开(公告)号：US08687766B2
公开(公告)日：2014-04-01
申请号：US13180568
申请日：2011-07-12
申请人： Matthew Wormington , Alexander Krohmal , David Berman , Gennady Openganden
发明人： Matthew Wormington , Alexander Krohmal , David Berman , Gennady Openganden
IPC分类号： G01N23/20 , G01T1/24
CPC分类号： G01T7/00 , G01N23/207 , G01T1/17
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到样品的表面，并感测从样品衍射的X射线，同时将感测的X射线分解为角度的函数，以便产生衍射光谱的样品。对衍射光谱进行校正，以补偿会聚光束的不均匀性。

8. 发明申请

US20120014508A1 ENHANCING ACCURACY OF FAST HIGH-RESOLUTION X-RAY DIFFRACTOMETRY 有权
标题翻译：提高快速高分辨率X射线衍射的准确度
公开(公告)号：US20120014508A1
公开(公告)日：2012-01-19
申请号：US13180568
申请日：2011-07-12
申请人： Matthew Wormington , Alexander Krohmal , David Berman , Gennady Openganden
发明人： Matthew Wormington , Alexander Krohmal , David Berman , Gennady Openganden
IPC分类号： G01N23/20 , G01T1/24
CPC分类号： G01T7/00 , G01N23/207 , G01T1/17
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到样品的表面，并感测从样品衍射的X射线，同时将感测的X射线分解为角度的函数，以便产生衍射光谱的样品。对衍射光谱进行校正，以补偿会聚光束的不均匀性。

9. 发明授权

US08781070B2 Detection of wafer-edge defects 有权
标题翻译：检测晶圆边缘缺陷
公开(公告)号：US08781070B2
公开(公告)日：2014-07-15
申请号：US13570271
申请日：2012-08-09
申请人： Matthew Wormington , Paul Ryan , John Leonard Wall
发明人： Matthew Wormington , Paul Ryan , John Leonard Wall
IPC分类号： G01N23/20
CPC分类号： G01N23/20 , G01N2223/6116 , G01N2223/646
摘要： Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides. The apparatus includes an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk. An X-ray detector is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode. A motion assembly is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk. A processor is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk.
摘要翻译：用于检查盘的装置，其包括结晶材料并具有第一和第二侧。该装置包括X射线源，其被配置为引导X射线束照射在盘的第一侧的区域上。 X射线检测器定位成以反射模式接收和形成从盘的第一侧的区域衍射的X射线的输入图像。运动组件被配置为使盘相对于X射线源和检测器旋转，使得该区域在靠近盘的边缘的圆周路径上扫描。处理器被配置为沿着圆周路径处理由X射线检测器形成的输入图像，以便产生指示沿着盘的边缘的缺陷的复合输出图像。

10. 发明申请

US20130039471A1 Detection of Wafer-Edge Defects 有权
标题翻译：检测晶圆边缘缺陷
公开(公告)号：US20130039471A1
公开(公告)日：2013-02-14
申请号：US13570271
申请日：2012-08-09
申请人： Matthew Wormington , Paul Ryan , John Leonard Wall
发明人： Matthew Wormington , Paul Ryan , John Leonard Wall
IPC分类号： G01N23/207
CPC分类号： G01N23/20 , G01N2223/6116 , G01N2223/646
摘要： Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides. The apparatus includes an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk. An X-ray detector is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode. A motion assembly is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk. A processor is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk.
摘要翻译：用于检查盘的装置，其包括结晶材料并具有第一和第二侧。该装置包括X射线源，其被配置为引导X射线束照射在盘的第一侧的区域上。 X射线检测器定位成以反射模式接收和形成从盘的第一侧的区域衍射的X射线的输入图像。运动组件被配置为使盘相对于X射线源和检测器旋转，使得该区域在靠近盘的边缘的圆周路径上扫描。处理器被配置为沿着圆周路径处理由X射线检测器形成的输入图像，以便产生指示沿着盘的边缘的缺陷的复合输出图像。

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