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    • 1. 发明授权
    • Machine vision technique for manufacturing semiconductor wafers
    • 用于制造半导体晶片的机器视觉技术
    • US08139231B2
    • 2012-03-20
    • US12113492
    • 2008-05-01
    • John W. SchwabGang LiuDavid J. Michael
    • John W. SchwabGang LiuDavid J. Michael
    • G01B11/14
    • H01L31/022425H01L21/681H01L21/682H01L31/18Y02E10/50
    • A vision system is provided to determine a positional relationship between a photovoltaic device wafer on a platen and a printing element, such as a printing screen, on a remote side of the photovoltaic device wafer from the platen. A source emits ultraviolet light along a path that is transverse to a longitudinal axis of an aperture through the platen, and a diffuser panel is located along that path. A reflector directs the light from the diffuser panel toward the aperture. A video camera is located along the longitudinal axis of the aperture and produces an image using light received from the platen aperture, wherein some of that received light was reflected by the wafer. A band-pass filter is placed in front of the camera to block ambient light. The use of diffused ultraviolet light enhances contrast in the image between the wafer and the printing element.
    • 提供了一种视觉系统,用于确定平台上的光伏器件晶片与光伏器件晶片远离印版的远程侧的印刷元件(例如印刷丝网)之间的位置关系。 源沿着与穿过压板的孔的纵向轴线横向的路径发射紫外光,并且漫射板位于沿着该路径的位置。 反射器将来自扩散板的光引向光圈。 摄像机沿着孔的纵向轴线定位,并使用从压板孔接收的光产生图像,其中一些接收的光被晶片反射。 带通滤波器放置在相机的前面以阻挡环境光。 使用扩散的紫外光增强了晶片和印刷元件之间的图像的对比度。
    • 2. 发明申请
    • MACHINE VISION TECHNIQUE FOR MANUFACTURING SEMICONDUCTOR WAFERS
    • 制造半导体波长的机器视觉技术
    • US20090274361A1
    • 2009-11-05
    • US12113492
    • 2008-05-01
    • John W. SchwabGang LiuDavid J. Michael
    • John W. SchwabGang LiuDavid J. Michael
    • G06K9/00
    • H01L31/022425H01L21/681H01L21/682H01L31/18Y02E10/50
    • A vision system is provided to determine a positional relationship between a photovoltaic device wafer on a platen and a printing element, such as a printing screen, on a remote side of the photovoltaic device wafer from the platen. A source emits ultraviolet light along a path that is transverse to a longitudinal axis of an aperture through the platen, and a diffuser panel is located along that path. A reflector directs the light from the diffuser panel toward the aperture. A video camera is located along the longitudinal axis of the aperture and produces an image using light received from the platen aperture, wherein some of that received light was reflected by the wafer. A band-pass filter is placed in front of the camera to block ambient light. The use of diffused ultraviolet light enhances contrast in the image between the wafer and the printing element.
    • 提供了一种视觉系统,用于确定平台上的光伏器件晶片与光伏器件晶片远离印版的远程侧的印刷元件(例如印刷丝网)之间的位置关系。 源沿着与穿过压板的孔的纵向轴线横向的路径发射紫外光,并且漫射板位于沿着该路径的位置。 反射器将来自扩散板的光引向光圈。 摄像机沿着孔的纵向轴线定位,并使用从压板孔接收的光产生图像,其中一些接收的光被晶片反射。 带通滤波器放置在相机的前面以阻挡环境光。 使用扩散的紫外光增强了晶片和印刷元件之间的图像的对比度。