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1. 发明授权

US6162655A Method of fabricating an expanded beam optical waveguide device 有权
标题翻译：制造扩展光束光波导器件的方法
公开(公告)号：US6162655A
公开(公告)日：2000-12-19
申请号：US228218
申请日：1999-01-11
申请人： John Evan Johnson , Leonard Jan-Peter Ketelsen , Janet L. Lentz , Charles H. Joyner , Sharon Kay Sputz
发明人： John Evan Johnson , Leonard Jan-Peter Ketelsen , Janet L. Lentz , Charles H. Joyner , Sharon Kay Sputz
IPC分类号： G02B6/12 , G02B6/122 , H01S5/026 , H01S5/10 , H01S5/20 , H01S5/50 , H01L21/302
CPC分类号： G02B6/1228 , G02B2006/12195 , H01S5/026 , H01S5/0265 , H01S5/1014 , H01S5/1032 , H01S5/2077 , H01S5/50
摘要： A method of fabricating an expanded beam optical waveguide device (e.g., a laser), comprises the steps of (a) forming a first semiconductor waveguide region having first and second sections of different thickness and an intermediate vertical taper section of varying thickness coupling the first and second sections to one another, the first waveguide region being effective to expand the size of the beam as it propagates from the first section to the second section, (b) forming a second semiconductor region (e.g., a laser active region) on the first waveguide region, (c) etching the second region so as to form an essentially vertical first surface of length A-B which extends obliquely across the propagation axis of the device, (d) forming a third semiconductor region (e.g., a cladding region) on the second region and over the first surface, and (e) etching an elongated mesa along the axis, the mesa extending through at least the second region and the first surface so as to form a second waveguide region having an oblique, essentially second vertical surface which has a length a-b
摘要翻译：一种制造扩展光束光波导器件（例如，激光器）的方法包括以下步骤：（a）形成具有不同厚度的第一和第二部分的第一半导体波导区域和具有变化厚度的中间垂直锥形部分，和第二部分，第一波导区域有效地在从第一部分传播到第二部分时扩大光束的尺寸，（b）在第二部分上形成第二半导体区域（例如，激光有源区域）（c）蚀刻所述第二区域以便形成长度为AB的基本上垂直的第一表面，所述第一表面倾斜延伸穿过所述器件的传播轴线，（d）在所述第一区域上形成第三半导体区域（例如包层区域）所述第二区域和所述第一表面之上，以及（e）沿着所述轴线蚀刻细长的台面，所述台面至少延伸穿过所述第二区域和所述第一表面，以形成第二波导区域具有斜长，基本上第二垂直表面，其具有长度ab

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