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    • 1. 发明授权
    • Tileable sensor array
    • 可分层传感器阵列
    • US08659148B2
    • 2014-02-25
    • US12956194
    • 2010-11-30
    • John Eric TkaczykLowell Scott SmithCharles Edward BaumgartnerRobert Gideon WodnickiRayette Ann FisherCharles Gerard WoychikRobert Stephen Lewandowski
    • John Eric TkaczykLowell Scott SmithCharles Edward BaumgartnerRobert Gideon WodnickiRayette Ann FisherCharles Gerard WoychikRobert Stephen Lewandowski
    • H01L23/34
    • H01L27/20A61B8/4483H01L27/14634H01L27/14658H01L2224/16225H01L2924/01322H01L2924/1461H01L2924/00
    • A method for forming a tileable detector array is presented. The method includes forming a detector module, where forming the detector module includes providing a sensor array having a first side and a second side, where the sensor array includes a first plurality of contact pads disposed on the second side of the sensor array, disposing the sensor array on an interconnect layer, where the interconnect layer includes a redistribution layer having a first side and a second side, where the redistribution layer includes a second plurality of contact pads disposed on the first side, an integrated circuit having a plurality of through vias disposed therethrough, where a first side of the integrated circuit is operationally coupled to the second side of the redistribution layer, where the sensor array is disposed on the interconnect layer such that the first plurality of contact pads on the second side of the sensor array are aligned with the second plurality of contact pads on the first side of the redistribution layer, operationally coupling the first plurality of contact pads on the second side of the sensor array to the second plurality of contact pads on the redistribution layer to form a sensor stack, coupling the sensor stack to a substrate to form the detector module, and tiling a plurality of detector modules on a second substrate to form the tileable detector array.
    • 提出了一种形成可瓦片检测器阵列的方法。 该方法包括形成检测器模块,其中形成检测器模块包括提供具有第一侧和第二侧的传感器阵列,其中传感器阵列包括设置在传感器阵列的第二侧上的第一组多个接触垫, 传感器阵列,其中所述互连层包括具有第一侧和第二侧的再分配层,其中所述再分布层包括设置在所述第一侧上的第二多个接触焊盘,具有多个通孔的集成电路 其中集成电路的第一侧可操作地耦合到再分布层的第二侧,其中传感器阵列设置在互连层上,使得传感器阵列的第二侧上的第一组多个接触焊盘是 与再分配层的第一侧上的第二多个接触焊盘对准,可操作地连接冷杉 传感器阵列的第二侧上的多个接触焊盘连接到再分配层上的第二多个接触焊盘,以形成传感器堆叠,将传感器堆叠耦合到衬底以形成检测器模块,并且平铺多个检测器模块 在第二基板上形成可瓦片检测器阵列。
    • 2. 发明申请
    • TILEABLE SENSOR ARRAY
    • 可传感器阵列
    • US20120133001A1
    • 2012-05-31
    • US12956194
    • 2010-11-30
    • John Eric TkaczykLowell Scott SmithCharles Edward BaumgartnerRobert Gideon WodnickiRayette Ann FisherCharles Gerard WoychikRobert Stephen Lewandowski
    • John Eric TkaczykLowell Scott SmithCharles Edward BaumgartnerRobert Gideon WodnickiRayette Ann FisherCharles Gerard WoychikRobert Stephen Lewandowski
    • H01L27/00H01L31/18H01L21/60
    • H01L27/20A61B8/4483H01L27/14634H01L27/14658H01L2224/16225H01L2924/01322H01L2924/1461H01L2924/00
    • A method for forming a tileable detector array is presented. The method includes forming a detector module, where forming the detector module includes providing a sensor array having a first side and a second side, where the sensor array includes a first plurality of contact pads disposed on the second side of the sensor array, disposing the sensor array on an interconnect layer, where the interconnect layer includes a redistribution layer having a first side and a second side, where the redistribution layer includes a second plurality of contact pads disposed on the first side, an integrated circuit having a plurality of through vias disposed therethrough, where a first side of the integrated circuit is operationally coupled to the second side of the redistribution layer, where the sensor array is disposed on the interconnect layer such that the first plurality of contact pads on the second side of the sensor array are aligned with the second plurality of contact pads on the first side of the redistribution layer, operationally coupling the first plurality of contact pads on the second side of the sensor array to the second plurality of contact pads on the redistribution layer to form a sensor stack, coupling the sensor stack to a substrate to form the detector module, and tiling a plurality of detector modules on a second substrate to form the tileable detector array.
    • 提出了一种形成可瓦片检测器阵列的方法。 该方法包括形成检测器模块,其中形成检测器模块包括提供具有第一侧和第二侧的传感器阵列,其中传感器阵列包括设置在传感器阵列的第二侧上的第一组多个接触垫, 传感器阵列,其中所述互连层包括具有第一侧和第二侧的再分配层,其中所述再分布层包括设置在所述第一侧上的第二多个接触焊盘,具有多个通孔的集成电路 其中集成电路的第一侧可操作地耦合到再分布层的第二侧,其中传感器阵列设置在互连层上,使得传感器阵列的第二侧上的第一组多个接触焊盘是 与再分配层的第一侧上的第二多个接触焊盘对准,可操作地连接冷杉 传感器阵列的第二侧上的多个接触焊盘连接到再分配层上的第二多个接触焊盘,以形成传感器堆叠,将传感器堆叠耦合到衬底以形成检测器模块,并且平铺多个检测器模块 在第二基板上形成可瓦片检测器阵列。
    • 6. 发明授权
    • Switching circuitry for reconfigurable arrays of sensor elements
    • 用于可重构阵列的传感器元件的开关电路
    • US07280435B2
    • 2007-10-09
    • US10978196
    • 2004-10-29
    • Kai Erik ThomeniusRayette Ann FisherRobert Gideon WodnickiChristopher Robert HazardLowell Scott SmithDavid Martin Mills
    • Kai Erik ThomeniusRayette Ann FisherRobert Gideon WodnickiChristopher Robert HazardLowell Scott SmithDavid Martin Mills
    • H04R17/00A61B8/00
    • H03M11/00B06B1/0207B06B1/0292G01N29/262G01N2291/044G01N2291/106
    • A device comprising an array of sensors that are reconfigurable by means of a switching network. The sensors may be optical, thermal or pressure sensors or ultrasonic transducers. More specifically, the device comprises: a multiplicity of sensor elements; a plurality of bus lines; a set of access switches for selectively connecting a set of the sensor elements in a row to a bus line, one of the access switches being connected to a first sensor element; a multiplicity of sets of matrix switches, each of the sets of matrix switches selectively connecting a respective sensor element of the multiplicity of sensor elements to a respective set of adjacent sensor elements, one of the matrix switches being connected to the first sensor element and to a second sensor element that is not a member of the set of sensor elements; and control circuitry that controls the access switches and the matrix switches in accordance with a selected switching configuration such that the first sensor element is connected to the bus line via said one access switch, while at the same time the second sensor element is connected to said one access switch via said one matrix switch.
    • 一种包括可通过交换网络重新配置的传感器阵列的设备。 传感器可以是光学,热或压力传感器或超声换能器。 更具体地,该装置包括:多个传感器元件; 多条总线; 一组接入开关,用于选择性地将一行中的传感器元件连接到总线,其中一个接入开关连接到第一传感器元件; 多个矩阵开关组,每组矩阵开关选择性地将多个传感器元件的相应传感器元件连接到相应的一组相邻传感器元件,矩阵开关中的一个连接到第一传感器元件,并且 第二传感器元件,其不是该组传感器元件的构件; 以及控制电路,其根据选择的开关配置来控制接入开关和矩阵开关,使得第一传感器元件经由所述一个接入开关连接到总线,同时第二传感器元件连接到所述 一个接入开关经由所述一个矩阵开关。