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    • 7. 发明授权
    • Chemical vapor deposition method for depositing diamond using a high
temperature vacuum substrate mount
    • 使用高温真空基板安装沉积金刚石的化学气相沉积方法
    • US5665430A
    • 1997-09-09
    • US953908
    • 1992-09-30
    • Kathleen DoverspikeJames E. Butler
    • Kathleen DoverspikeJames E. Butler
    • C23C16/27C23C16/458C30B25/02C23C16/26
    • C23C16/275C23C16/458C30B25/02C30B29/04
    • A method for the chemical vapor deposition of diamond includes the steps of:(a) applying a thermally conductive paint between a substrate seed crystal and an end surface of a vacuum line [having an inner surface and an outer surface], the vacuum line protruding through a mount;(b) holding within a chemical vapor deposition flame the substrate seed crystal upon the mount by applying a vacuum to the substrate seed crystal via the vacuum line protruding through the mount, wherein a portion of an outer surface of the vacuum line in contact with the mount is coated with a thermally conductive lubricant;(c) flowing a heat exchanging fluid through the mount to maintain the surface of the substrate seed crystal at a temperature suitable for chemical vapor deposition of diamond; and(d) directing a deposition species for chemical vapor deposition to deposit diamond onto a surface of the substrate seed crystal.
    • 用于金刚石化学气相沉积的方法包括以下步骤:(a)在衬底晶种和真空线[具有内表面和外表面]的端面之间施加导热涂料,真空管线突出 穿过山 (b)通过经由所述安装件突出的所述真空管线向所述基板籽晶施加真空,将所述基板晶种保持在化学气相沉积火焰中,所述真空管线的外表面的一部分与所述基板籽晶接触, 安装件涂有导热润滑剂; (c)使热交换流体流过所述安装座,以将所述基底晶种的表面保持在适于金刚石化学气相沉积的温度; 和(d)引导用于化学气相沉积的沉积物质将金刚石沉积到基底晶种的表面上。