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1. 发明申请

US20090130463A1 Coated Substrates and Methods for their Preparation 审中-公开
标题翻译：涂层基材及其制备方法
公开(公告)号：US20090130463A1
公开(公告)日：2009-05-21
申请号：US11992871
申请日：2006-09-18
申请人： John Dean Albaugh , Masaaki Amako , Robert Charles Camilletti , Dong Choi , William Weidner , Ludmil Zambov
发明人： John Dean Albaugh , Masaaki Amako , Robert Charles Camilletti , Dong Choi , William Weidner , Ludmil Zambov
IPC分类号： B32B27/00 , B05D1/36
CPC分类号： H01L21/3122 , C08J7/045 , H01L21/02126 , H01L21/02216 , H01L21/02282 , H01L21/02348 , H01L21/3124 , H01L21/318 , H01L51/5256 , Y10T428/31663
摘要： Coated substrates comprising an inorganic barrier coating and an interfacial coating, wherein the interfacial coating comprises a cured product of a silicone resin having silicon-bonded radiation-sensitive groups; and methods of preparing the coated substrates.
摘要翻译：包括无机阻隔涂层和界面涂层的涂覆基材，其中所述界面涂层包含具有硅键合的辐射敏感基团的硅树脂的固化产物; 以及制备涂覆的基材的方法。

2. 发明授权

US5693701A Tamper-proof electronic coatings 失效
标题翻译：防篡改电子涂料
公开(公告)号：US5693701A
公开(公告)日：1997-12-02
申请号：US548851
申请日：1995-10-26
申请人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： B05D7/24 , C01B33/12 , C04B35/14 , C04B35/622 , C09D183/02 , C09D183/04 , C23C26/00 , H01L21/306 , H01L21/56 , H01L23/58 , H05K3/28 , C08K3/32
CPC分类号： H01L23/573 , C04B35/14 , C04B35/62222 , C09D183/02 , C09D183/04 , C23C26/00 , H01L21/56 , C04B2111/00844 , C04B2111/2007 , C04B2235/96 , H01L2924/0002 , Y10T428/31663
摘要： Disclosed is a method of forming tamper-proof coatings on electronic devices. The method comprises applying a coating of a silica precursor resin and an inorganic salt onto the electronic device, wherein the inorganic salt is one which reacts with a wet etch to yield an acid or base that damages the electronic device. The coated electronic device is then heated at a temperature sufficient to convert the silica precursor resin to a silica containing ceramic matrix.
摘要翻译：公开了一种在电子设备上形成防篡改涂层的方法。该方法包括将二氧化硅前体树脂和无机盐的涂层施加到电子器件上，其中无机盐是与湿蚀刻反应以产生损坏电子器件的酸或碱的物质。然后将涂覆的电子器件在足以将二氧化硅前体树脂转化为含二氧化硅的陶瓷基体的温度下加热。

3. 发明授权

US5730792A Opaque ceramic coatings 失效
标题翻译：不透明陶瓷涂料
公开(公告)号：US5730792A
公开(公告)日：1998-03-24
申请号：US725791
申请日：1996-10-04
申请人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： C04B41/50 , C04B41/52 , C04B41/87 , C04B41/89 , H01L21/316 , H01L21/48 , H01L23/498 , C09D183/04
CPC分类号： H01L23/573 , C04B41/5035 , C04B41/52 , C04B41/87 , C04B41/89 , H01L21/316 , H01L21/481 , H01L23/291 , H01L23/49894 , H01L2924/0002
摘要： Thick opaque ceramic coatings are used to protect delicate microelectronic devices against excited energy sources, radiation, light, abrasion, and wet etching techniques. The thick opaque ceramic coating are prepared from a mixture containing tungsten carbide (WC), tungsten metal (W), and phosphoric anhydride, i.e., phosphorous pentoxide (P.sub.2 O.sub.5), carried in an aqueous alkanol dispersion of colloidal silica and partial condensate of methylsilanetriol. The coating is pyrolyzed to form a ceramic SiO.sub.2 containing coating. A second coating of plasma enhanced chemical vapor deposited (PECVD) silicon carbide (SiC), diamond, or silicon nitride (Si.sub.3 N.sub.4), can be applied over the thick opaque ceramic coating to provide hermeticity. These coatings are useful on patterned wafers, electronic devices, and electronic substrates. The thick opaque ceramic coating is unique because the methyl silsesquioxane resin is resistant to etching using wet chemicals, i.e., acids such as H.sub.3 PO.sub.4 and H.sub.2 SO.sub.4, or bases.
摘要翻译：厚不透明陶瓷涂层用于保护精细的微电子器件免受激发的能量源，辐射，光，磨蚀和湿蚀刻技术。厚的不透明陶瓷涂层由含有碳化钨（WC），钨金属（W）和磷酸酐（即五氧化二磷（P 2 O 5））的混合物制备，所述五氧化二磷（P 2 O 5）载于胶态二氧化硅的烷基醇水溶液和甲基硅烷三醇的部分缩合物中。将涂层热解，形成含陶瓷SiO2涂层。等离子体增强化学气相沉积（PECVD）碳化硅（SiC），金刚石或氮化硅（Si3N4）的第二涂层可以施加在厚的不透明陶瓷涂层上以提供气密性。这些涂层在图案化的晶片，电子器件和电子基片上是有用的。厚的不透明陶瓷涂层是独特的，因为甲基倍半硅氧烷树脂对使用湿化学品，即酸如H 3 PO 4和H 2 SO 4或碱的蚀刻是耐受的。

4. 发明授权

US5710203A Electronic coating compositions 失效
标题翻译：电子涂料组合物
公开(公告)号：US5710203A
公开(公告)日：1998-01-20
申请号：US334988
申请日：1994-11-07
申请人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： C01B33/12 , C03C17/00 , C03C17/34 , C04B41/50 , C04B41/87 , C09D183/04 , C09D183/05 , C09K11/02 , C14C11/00 , C23C18/12 , H01L23/58 , C08K3/10 , C04B38/00
CPC分类号： C04B41/87 , C03C17/007 , C03C17/009 , C03C17/3411 , C03C17/3417 , C03C17/3435 , C03C17/3441 , C04B41/009 , C04B41/5035 , C09D183/04 , C09K11/02 , C14C11/00 , C23C18/1208 , C23C18/1212 , C23C18/122 , C23C18/1225 , C23C18/127 , C23C18/1279 , H01L23/573 , H01L23/58 , C03C2217/45 , C03C2217/465 , C03C2217/47 , C03C2217/475 , C03C2217/479 , C04B2111/00844 , C04B2111/80 , C04B2111/94 , H01L27/02 , H01L2924/0002
摘要： Disclosed are compositions which can be used to form tamper-proof coatings on electronic devices. These compositions contain a silica precursor resin and a filler which reacts in an oxidizing atmosphere to liberate heat. Such compositions form coatings which, when oxidized by techniques such as plasma etching, wet etching, or cross-sectioning, liberate heat which causes destruction of the underlying substrate and, thus, inhibits further examination.
摘要翻译：公开了可用于在电子设备上形成防篡改涂层的组合物。这些组合物含有二氧化硅前体树脂和在氧化气氛中反应以释放热量的填料。这样的组合物形成涂层，当通过诸如等离子体蚀刻，湿蚀刻或横截面的技术进行氧化时，释放导致下面基底破坏的热量，从而抑制进一步检查。

5. 发明授权

US5916944A Tamper-proof electronic coatings 失效
公开(公告)号：US5916944A
公开(公告)日：1999-06-29
申请号：US939833
申请日：1997-09-29
申请人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： C01B33/12 , C03C17/00 , C03C17/34 , C04B41/50 , C04B41/87 , C09D183/04 , C09D183/05 , C09K11/02 , C14C11/00 , C23C18/12 , H01L23/58 , C08K5/04
CPC分类号： C04B41/87 , C03C17/007 , C03C17/009 , C03C17/3411 , C03C17/3417 , C03C17/3435 , C03C17/3441 , C04B41/009 , C04B41/5035 , C09D183/04 , C09K11/02 , C14C11/00 , C23C18/1208 , C23C18/1212 , C23C18/122 , C23C18/1225 , C23C18/127 , C23C18/1279 , H01L23/573 , H01L23/58 , C03C2217/45 , C03C2217/465 , C03C2217/47 , C03C2217/475 , C03C2217/479 , C04B2111/00844 , C04B2111/80 , C04B2111/94 , H01L27/02 , H01L2924/0002
摘要： Disclosed is a method of forming tamper-proof coatings on electronic devices. The method comprises applying a coating of a silica precursor resin and a filler onto the electronic device, wherein the filler is one which reacts in an oxidizing atmosphere to liberate enough heat to damage the electronic device. The coated electronic device is then heated at a temperature sufficient to convert the silica precursor resin to a silica containing ceramic matrix.

6. 发明授权

US5744244A Tamper-proof electronic coatings 失效
标题翻译：防篡改电子涂料
公开(公告)号：US5744244A
公开(公告)日：1998-04-28
申请号：US878134
申请日：1997-06-19
申请人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： B05D7/24 , C01B33/12 , C04B35/14 , C04B35/622 , C09D183/02 , C09D183/04 , C23C26/00 , H01L21/306 , H01L21/56 , H01L23/58 , H05K3/28 , B32B9/04
CPC分类号： H01L23/573 , C04B35/14 , C04B35/62222 , C09D183/02 , C09D183/04 , C23C26/00 , H01L21/56 , C04B2111/00844 , C04B2111/2007 , C04B2235/96 , H01L2924/0002 , Y10T428/31663
摘要： Disclosed is a method of forming tamper-proof coatings on electronic devices. The method comprises applying a coating of a silica precursor resin and an inorganic salt onto the electronic device, wherein the inorganic salt is one which reacts with a wet etch to yield an acid or base that damages the electronic device. The coated electronic device is then heated at a temperature sufficient to convert the silica precursor resin to a silica containing ceramic matrix.
摘要翻译：公开了一种在电子设备上形成防篡改涂层的方法。该方法包括将二氧化硅前体树脂和无机盐的涂层施加到电子器件上，其中无机盐是与湿蚀刻反应以产生损坏电子器件的酸或碱的物质。然后将涂覆的电子器件在足以将二氧化硅前体树脂转化为含二氧化硅的陶瓷基体的温度下加热。

7. 发明授权

US5807611A Electronic coatings 失效
标题翻译：电子涂料
公开(公告)号：US5807611A
公开(公告)日：1998-09-15
申请号：US725718
申请日：1996-10-04
申请人： Clayton R. Bearinger , Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Clayton R. Bearinger , Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： C09D1/00 , C09D183/05 , H01L21/316 , H01L23/29 , H01L23/498 , B05D3/02
CPC分类号： H01L23/573 , H01L23/291 , H01L23/49894 , H01L2924/0002 , H01L2924/09701
摘要： The present invention relates to a ceramic coating composition comprising a preceramic material such as silicon oxide precursors, silicon carbonitride precursors, silicon carbide precursors, and silicon nitride precursors and a flux material such as B.sub.2 O.sub.3, PbO.sub.2, P.sub.2 O.sub.5, and Bi.sub.2 O.sub.3. The present invention also relates to a substrate such as an electronic device having said coating applied and ceramified thereon.
摘要翻译：本发明涉及一种陶瓷涂料组合物，其包含诸如氧化硅前体，碳氮化硅前体，碳化硅前体和氮化硅前体的预陶瓷材料和助焊剂材料如B2O3，PbO2，P2O5和Bi2O3。本发明还涉及一种诸如电子器件的衬底，其上涂覆有所述涂层并在其上陶瓷化。

8. 发明授权

US5776235A Thick opaque ceramic coatings 失效
标题翻译：厚不透明陶瓷涂层
公开(公告)号：US5776235A
公开(公告)日：1998-07-07
申请号：US725790
申请日：1996-10-04
申请人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： B05D7/00 , B05D7/24 , C04B41/50 , C04B41/52 , C04B41/87 , C04B41/89 , C09D183/05 , C09D183/16 , C23C26/00 , H01L21/314 , H01L21/316 , H01L21/318 , H01L23/29 , H01L23/31 , H01L23/58 , C09D183/12 , B05D3/02
CPC分类号： C04B41/009 , C04B41/5035 , C04B41/52 , C04B41/87 , C04B41/89 , H01L21/3146 , H01L21/316 , H01L21/3185 , H01L23/3171 , H01L23/58 , C04B2111/00844 , C04B2111/20 , C04B2111/80 , H01L2924/0002
摘要： Thick opaque ceramic coatings are used to protect delicate microelectronic devices against excited energy sources, radiation, light, abrasion, and wet etching techniques. The thick opaque ceramic coating are prepared from a mixture containing phosphoric anhydride, i.e., phosphorous pentoxide (P.sub.2 O.sub.5), and a pre-ceramic silicon-containing material. It is preferred to also include tungsten carbide (WC) and tungsten metal (W) in the coating mixture. The coating is pyrolyzed to form a ceramic SiO.sub.2 containing coating. A second coating of plasma enhanced chemical vapor deposited (PECVD) silicon carbide (SiC), diamond, or silicon nitride (Si.sub.3 N.sub.4), can be applied over the thick opaque ceramic coating to provide hermeticity. These coatings are useful on patterned wafers, electronic devices, and electronic substrates. The thick opaque ceramic coating is unique because it is resistant to etching using wet chemicals, i.e., acids such as H.sub.3 PO.sub.4 and H.sub.2 SO.sub.4, or bases.
摘要翻译：厚不透明陶瓷涂层用于保护精细的微电子器件免受激发的能量源，辐射，光，磨蚀和湿蚀刻技术。厚不透明陶瓷涂层由含有磷酸酐，即五氧化二磷（P 2 O 5）和预陶瓷含硅材料的混合物制备。在涂料混合物中还优选包括碳化钨（WC）和钨金属（W）。将涂层热解，形成含陶瓷SiO2涂层。等离子体增强化学气相沉积（PECVD）碳化硅（SiC），金刚石或氮化硅（Si3N4）的第二涂层可以施加在厚的不透明陶瓷涂层上以提供气密性。这些涂层在图案化的晶片，电子器件和电子基片上是有用的。厚的不透明陶瓷涂层是独特的，因为它耐腐蚀使用湿化学品，即酸如H 3 PO 4和H 2 SO 4或碱。

9. 发明授权

US5753374A Protective electronic coating 失效
标题翻译：保护电子涂层
公开(公告)号：US5753374A
公开(公告)日：1998-05-19
申请号：US563255
申请日：1995-11-27
申请人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： C04B41/89 , C09D1/00 , H01L23/29 , H01L23/31 , H01L23/58 , B32B9/04
CPC分类号： H01L23/573 , H01L2924/0002 , Y10T428/31667
摘要： A method for forming a cap on an electronic device to prevent inspection. First, a silica-containing ceramic is applied to the surface the electronic device to planarize the surface. Next, a silicon carbide coating is applied to the surface of the silica containing ceramic to form a hermetic barrier. A layer of porous silica-containing ceramic is then formed on the surface of the silicon carbide coating. Finally, the porous silica-containing ceramic is impregnated with an opaque material.
摘要翻译：一种用于在电子设备上形成盖以防止检查的方法。首先，将含二氧化硅的陶瓷施加到电子器件的表面以使表面平坦化。接下来，将碳化硅涂层施加到含二氧化硅陶瓷的表面以形成气密屏障。然后在碳化硅涂层的表面上形成一层含多孔二氧化硅的陶瓷。最后，用不透明材料浸渍多孔二氧化硅的陶瓷。

10. 发明授权

US6144106A Electronic coatings 失效
标题翻译：电子涂料
公开(公告)号：US6144106A
公开(公告)日：2000-11-07
申请号：US939241
申请日：1997-09-29
申请人： Clayton R. Bearinger , Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
发明人： Clayton R. Bearinger , Robert Charles Camilletti , Loren Andrew Haluska , Keith Winton Michael
IPC分类号： B05D7/00 , B05D7/24 , B32B9/00 , H01L21/312 , H01L23/29 , H01L23/31 , H01L23/58
CPC分类号： H01L23/573 , H01L23/296 , H01L23/3192 , H01L2924/0002 , Y10S257/922
摘要： The instant invention pertains to a multi-layer tamper proof electronic coating wherein the first layer is a protecting layer produced from a preceramic silicon containing material and at least one filler. The second layer is a resin sealer coat produced from a sealer resin selected from the group consisting of colloidal inorganic-based siloxane resins, benzocyclobutene based resins, polyimide polymers, siloxane polyimides and parylenes. An optional third layer is a cap coating layer selected from SiO.sub.2 coating, SiO.sub.2 /ceramic oxide coating, silicon containing coatings, silicon carbon containing coatings, silicon nitrogen containing coatings, silicon oxygen nitrogen coatings, silicon nitrogen carbon containing coatings and/or diamond like coatings. An optional fourth layer is a resin overcoat produced from an overcoat resin selected from the group consisting of colloidal inorganic-based siloxane resins, benzocyclobutene based resins, polyimide polymers, siloxane polyimides, parylenes, photoresist polymers, siloxane room temperature vulcanizable compositions, or other organic polymer. The use of the multi-layer coating on the electronic device results in an electronic device that is resistant to analytical techniques such as ozone, UV-ozone, gaseous free radicals and ions, vapor or liquid borne reactive species, plasma, abrasion, radiation, light, wet etching and others; moisture; chemicals and other environmental contaminants; shock and erosion, delamination and/or separation.
摘要翻译：本发明涉及多层防篡改电子涂层，其中第一层是由含陶瓷硅材料和至少一种填料制成的保护层。第二层是由选自胶体无机基硅氧烷树脂，苯并环丁烯基树脂，聚酰亚胺聚合物，硅氧烷聚酰亚胺和对二甲苯基的密封树脂制成的树脂密封剂涂层。可选的第三层是选自SiO 2涂层，SiO 2 /陶瓷氧化物涂层，含硅涂层，含硅碳涂层，含硅氮涂层，硅氧氮涂层，含氮氮碳涂层和/或金刚石类涂层的覆盖层。任选的第四层是由选自胶体无机基硅氧烷树脂，苯并环丁烯基树脂，聚酰亚胺聚合物，硅氧烷聚酰亚胺，对二甲苯基，光致抗蚀剂聚合物，硅氧烷室温可硫化组合物或其它有机物的外涂层树脂生产的树脂外涂层聚合物。在电子设备上使用多层涂层导致电子装置耐分析技术如臭氧，紫外线臭氧，气态自由基和离子，蒸汽或液体反应物质，等离子体，磨损，辐射，光，湿蚀等; 湿气; 化学品和其他环境污染物; 冲击和侵蚀，分层和/或分离。

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