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    • 1. 发明授权
    • Dehydration and purification of isopropyl alcohol to an ultradry and
ultrapure level
    • 脱水和纯化异丙醇超纯超纯水平
    • US5868906A
    • 1999-02-09
    • US691427
    • 1996-08-02
    • John A. AdamsGerald A. KrulikChristopher BlattDavid Persichini
    • John A. AdamsGerald A. KrulikChristopher BlattDavid Persichini
    • B01D3/14B01D61/36C07C29/80C07C29/82C07C31/10B01D3/00
    • B01D61/362B01D3/146C07C29/80C07C29/82Y10S159/27Y10S203/17
    • A method for the on-site reprocessing of isopropyl alcohol used in semiconductor manufacturing, to generate an ultradry and ultrapure isopropyl alcohol. This ultradry and ultrapure isopropyl alcohol is produced through a pervaporation step, followed by double distillation. In the first distillation step, an autonomous azeotropic self-stripping distillation column is used to produce an ultradry and partially purified isopropyl alcohol. In the next step, the isopropyl alcohol is distilled in an overhead product distillation column, to produce an ultrapure and ultradry isopropyl alcohol. Alternatively, if the feed isopropyl alcohol contains less than 2000 ppm water, the pervaporation step may be omitted.The resulting isopropyl alcohol has between a high of 100 parts per million (ppm) and a low of 0.1 ppm of water in the isopropyl alcohol. It also has zero particles per milliliter of a size larger than 2.0 microns, zero to 2 particles per milliliter of a size of 0.5 micron to 2.0 microns, zero to 30 particles per milliliter of a size between 0.1 microns and 0.5 microns, an unspecified number of particles per milliliter below 0.1 microns, 1 part per trillion (ppt) to 1 part per billion (ppb) of any specific trace impurity such as metals, anions, and cations, and 10 ppt to 10 ppm of any other specific trace organic substances.
    • 用于半导体制造中的异丙醇的现场再处理方法,以产生超纯和超纯异丙醇。 通过全蒸发步骤生产超纯超纯异丙醇,然后进行双蒸馏。 在第一蒸馏步骤中,使用自主共沸自剥离蒸馏塔来生产超纯和部分纯化的异丙醇。 在下一步骤中,将异丙醇在塔顶馏出物蒸馏塔中蒸馏,生成超纯和超纯异丙醇。 或者,如果进料异丙醇含有少于2000ppm的水,则可以省略渗透蒸发步骤。 得到的异丙醇在异丙醇中的百万分之100ppm(ppm)和0.1ppm的低含量之间。 它还具有每毫升小于2.0微米的零颗粒,每毫升为零至2微米的0.5微米至2.0微米的零微粒,每毫升0.1微米至0.5微米之间的每毫升为零至30微米,未指定数量 每毫升0.1微米以下的颗粒,每万亿分之1份(ppt)至十亿分之一(ppb)的任何特定痕量杂质如金属,阴离子和阳离子,10磅至10ppm的任何其他特定微量有机物质 。