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    • 10. 发明授权
    • Process for production of a structure of color filter layer system regions
    • 生产彩色滤光片系统区域结构的工艺
    • US06238583B1
    • 2001-05-29
    • US09097751
    • 1998-06-16
    • Johannes EdlingerReinhard SpergerHelmut Schoch
    • Johannes EdlingerReinhard SpergerHelmut Schoch
    • B05D506
    • G02B5/201
    • A first coating layer structure 3a is produced by coating, alignment, exposure and development. On this coating layer structure 3a is deposited the first colour filter layer system 5a0,5a1. Over the entire colour filter layer system 5 is deposited a sacrificial layer 7. Outside the vacuum container the coating layer structure is dissolved and with it the colour filter layer system regions 5a0 are removed. A further process of coating, alignment, exposure and development is carried out to create a coating layer structure 3b. Next the second colour filter layer system 5b and the second sacrificial layer 7b are deposited. Thereby the sacrificial layer 7 withstands the step of dissolving the coating and can be removed finally without damaging the colour filter layer system regions. Accordingly, any flakes 9 remaining from the lift-off are removed with the sacrificial layer 7.
    • 通过涂布,对准,曝光和显影来制造第一涂层结构3a。 在该涂层结构体3a上沉积第一滤色器层系统5a0,5a1。 在整个滤色器层系统5上沉积牺牲层7.在真空容器的外部,涂层结构被溶解,并且除去滤色器层系统区域5a0。 进行另外的涂布,取向,曝光和显影工艺以形成涂层结构3b。 接下来,沉积第二滤色器层系统5b和第二牺牲层7b。 因此,牺牲层7可以承受溶解涂层的步骤,并且可以最终去除,而不会损坏滤色器层系统区域。 因此,从牺牲层7去除从剥离物残留的任何薄片9。