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1. 发明授权

US06993828B2 Method for manufacturing metal thin film resistor 失效
标题翻译：制造金属薄膜电阻的方法
公开(公告)号：US06993828B2
公开(公告)日：2006-02-07
申请号：US10468725
申请日：2002-02-22
申请人： Jo-Woong Ha , Seung-Hyun Kim , Dong-Yeon Park , Dong-Su Lee , Hyun-Jung Woo
发明人： Jo-Woong Ha , Seung-Hyun Kim , Dong-Yeon Park , Dong-Su Lee , Hyun-Jung Woo
IPC分类号： H01C17/06
CPC分类号： H01C17/003 , H01C17/288 , Y10T29/49082 , Y10T29/49099 , Y10T29/49101 , Y10T29/49103
摘要： A metal resistor and a method for manufacturing the resistor are provided. A first insulation film is formed on a substrate, a photosensitive film is applied on the insulation film, and an insulation film pattern is formed by patterning the insulation film. After a metal thin film is formed among the insulation film pattern and on the photosensitive film, with removing the photo-sensitive film is a metal thin film pattern formed among the insulation film pattern. On the metal thin film pattern and the insulation film pattern is a second insulation film formed and at the pad region of the metal thin film pattern is a lead wire connected, after that, a metal thin film resistor is manufactured with forming a preservation film on and around the lead wire. Using a pattern-forming process by etching of the insulation film for forming the metal thin film pattern, the deterioration of the device or the lowering of the durability can be overcome, the resistance of the metal thin film resistor can be easily controlled, and the resolving power can be improved by producing the high-resistance metal thin film temperature having reduced line with of the metal thin film pattern.
摘要翻译：提供一种金属电阻器和制造该电阻器的方法。在基板上形成第一绝缘膜，在绝缘膜上施加感光性膜，通过图案化绝缘膜形成绝缘膜图案。在绝缘膜图案和感光膜上形成金属薄膜之后，去除感光膜是在绝缘膜图案之间形成的金属薄膜图案。在金属薄膜图案和绝缘膜图案上形成第二绝缘膜，并且在金属薄膜图案的焊盘区域处是连接的引线，之后制造形成保鲜膜的金属薄膜电阻器并围绕导线。通过蚀刻用于形成金属薄膜图案的绝缘膜的图案形成处理，可以克服器件的劣化或耐久性的降低，可以容易地控制金属薄膜电阻器的电阻，并且通过生产具有金属薄膜图案的线路减小的高电阻金属薄膜温度，可以提高分辨率。

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