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    • 2. 发明授权
    • Angular velocity sensor having a balanced tuning fork structure and the
method of manufacture
    • 具有平衡音叉结构的角速度传感器及其制造方法
    • US5445025A
    • 1995-08-29
    • US92354
    • 1993-07-15
    • Jiro TeradaHiroshi TakenakaMasaharu UshiharaMasami TamuraHitoshi NishimuraKikuo Kaino
    • Jiro TeradaHiroshi TakenakaMasaharu UshiharaMasami TamuraHitoshi NishimuraKikuo Kaino
    • G01C19/56G01P9/04
    • G01C19/5607
    • An angular velocity sensor having a tuning-fork structure comprising a first vibrator including a first actuator and a first detector each attached to a metal plate and joined orthogonally to each other, and a second vibrator including a second actuator and a second detector each attached to another metal plate and joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in a generally parallel relationship along the axis of detection of the sensor. The first and second detectors have a rectangular plate shape each holding a piezoelectric element. The rectangular plate shape has a lengthwise edge and a widthwise edge where the lengthwise edge parallel to the axis of detection of the sensor and is longer than the width wise edge. At least one of the lengthwise edges of the detectors has a beveled surface formed by removing metal at an angle from the lengthwise edge of the detector to balance the sensor.
    • 一种具有音叉结构的角速度传感器,包括第一振动器,所述第一振动器包括第一致动器和第一检测器,每个第一振动器附接到金属板并且彼此正交连接;以及第二振动器,其包括第二致动器和第二检测器, 另一个金属板并且正交地彼此连接,两个振动器通过电极块以传感器的检测轴线大致平行的关系彼此耦合。 第一和第二检测器具有矩形板状,每个保持一个压电元件。 矩形板形状具有纵向边缘和宽度方向边缘,其中纵向边缘平行于传感器的检测轴线并且比宽度边缘长。 检测器的纵向边缘中的至少一个具有通过从检测器的纵向边缘以一定角度去除金属而形成的斜面,以平衡传感器。