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    • 6. 发明申请
    • Copper layer and a method for manufacturing said copper layer
    • 铜层及其制造方法
    • US20070281457A1
    • 2007-12-06
    • US11604756
    • 2006-11-28
    • Jinn P. ChuChon-Hsin Lin
    • Jinn P. ChuChon-Hsin Lin
    • H01L21/44
    • H01L21/2855H01L21/76855H01L21/76876
    • A copper layer on a substrate has a copper seed layer and an interface. The copper seed layer contains insoluble substances that are insoluble with copper. The interface is formed between the copper seed layer and the substrate. The copper layer replaces a conventional barrier and has significantly improved thermal stability to obtain some properties such as a fine microstructure, high thermal stability and an excellent low electrical resistivity. The copper seed layer is formed by a sputtering process in a vacuum and clean atmosphere with an operational gas of argon or a mixture of argon and a trace-amount of nitrogen. The interface is formed when the copper layer on the substrate are annealed. The insoluble substances in the copper seed layer are in a range of 0.5 to 3.5 atom % and are high-temperature metals and high-temperature metal nitrides with the nitrides being than 2.0 atom %.
    • 基板上的铜层具有铜种子层和界面。 铜种子层含有不溶于铜的不溶物质。 界面形成在铜籽晶层和基底之间。 铜层取代了常规的屏障,并且具有显着改善的热稳定性,以获得一些性能,例如微细微结构,高热稳定性和优异的低电阻率。 通过溅射工艺在真空和清洁的气氛中通过氩气或氩气和微量氮的混合物的操作气体形成铜籽晶层。 当衬底上的铜层退火时形成界面。 铜种子层中的不溶物质为0.5〜3.5原子%的范围,为氮化物为2.0原子%以下的高温金属和高温金属氮化物。
    • 9. 发明申请
    • Method for in-gas micro/nanoimprinting of bulk metallic glass
    • 散装金属玻璃的气体微/纳米压印方法
    • US20080099175A1
    • 2008-05-01
    • US11790860
    • 2007-04-27
    • Jinn P. ChuHadi WijayaChun-Ling ChiangChih-Wei Wu
    • Jinn P. ChuHadi WijayaChun-Ling ChiangChih-Wei Wu
    • B22D25/02
    • B22D17/2245B22D21/00C22C45/00
    • A method for in-gas micro/nanoimprinting of bulk metallic glass includes steps of preparing a die, heating the bulk metallic glass and in-gas micro/nanoimprinting of the bulk metallic glass. In the step of preparing a die, the die has a micro/nano structure having multiple depressions and a flow channel connected to the depressions. In the step of heating the bulk metallic glass, the bulk metallic glass is heated to a temperature between a glass transition temperature and a crystallization temperature of the bulk metallic glass. In the step of in-gas micro/nanoimprinting, the bulk metallic glass is forced into the die in presence of gas to imprint a complementing micro/nano structure on the bulk metallic glass. Because the die has a flow channel to allow air or gas to escape from the micro/nano structure of the die, the micro/nanoimprinting can be performed in presence of air or gas.
    • 本体金属玻璃的气体微/纳米压印的方法包括制备模具,加热块体金属玻璃和散装金属玻璃的气体微/纳米压印的步骤。 在制备模具的步骤中,模头具有具有多个凹陷的微/纳米结构和与凹陷相连的流动通道。 在加热块状金属玻璃的步骤中,将块状金属玻璃加热至玻璃化转变温度和块状金属玻璃的结晶温度之间的温度。 在气体微/纳米压印的步骤中,在存在气体的情况下将大块金属玻璃强制进入模具,以在体金属玻璃上印刷互补的微/纳米结构。 因为模具具有允许空气或气体从模具的微/纳米结构逸出的流动通道,所以微/纳米压印可以在存在空气或气体的情况下进行。