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    • 3. 发明授权
    • Apparatus for measuring slant angle of solid immersion lens
    • 用于测量固体浸没透镜的倾斜角度的装置
    • US06693705B2
    • 2004-02-17
    • US10163135
    • 2002-06-04
    • Yeung Joon SohnGee Pyeong HanYark Yeon KimTae Youb KimMun Cheol PaekKyoung Ik Cho
    • Yeung Joon SohnGee Pyeong HanYark Yeon KimTae Youb KimMun Cheol PaekKyoung Ik Cho
    • G01B900
    • G01B11/26
    • The present invention relates to an apparatus for measuring a slant angle in a solid immersion lens. In a near-field optical data storage head for storing/reading data using a solid immersion lens (SIL), a parallel light is formed within the plane of the solid immersion lens and the slant angle of the parallel light is then measured using the angle measurement principle of the autocollimator in order to measure the slant angle of the solid immersion lens. For this, the present invention includes an optical system for generating the parallel light within the solid immersion lens, and a unit for measuring the slant angle of the solid immersion lens using a location detection unit. An incident light becomes the parallel light by the optical system and the curved face of the solid immersion lens. The reflected light is also focused on the location detection unit. The location detection unit converts the reflection angle of the reflecting light into a location value to calculate the angle value.
    • 本发明涉及一种用于测量固体浸没透镜中的倾斜角度的装置。 在用于使用固体浸没透镜(SIL)存储/读取数据的近场光学数据存储头中,在固体浸没透镜的平面内形成平行光,然后使用角度测量平行光的倾斜角度 自动准直仪的测量原理是为了测量固体浸没透镜的倾斜角度。 为此,本发明包括用于在固体浸没透镜内产生平行光的光学系统和用于使用位置检测单元来测量固体浸没透镜的倾斜角度的单元。 入射光通过光学系统和固体浸没透镜的曲面变成平行光。 反射光也聚焦在位置检测单元上。 位置检测单元将反射光的反射角转换为位置值以计算角度值。