专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US6063234A Temperature sensing system for use in a radio frequency environment 失效
标题翻译：用于无线电频率环境的温度传感系统
公开(公告)号：US6063234A
公开(公告)日：2000-05-16
申请号：US927030
申请日：1997-09-10
申请人： Jian Janson Chen , William S. Kennedy
发明人： Jian Janson Chen , William S. Kennedy
IPC分类号： G01K7/00 , C23F1/02
CPC分类号： G01K7/00
摘要： The invention relates to a temperature sensing system that accurately measures temperatures of articles or areas using a contact sensor even in a high radio frequency environment. The temperature sensing system includes a sensor probe that contacts with an article or area that is to have its temperature monitored, and a control circuit to amplify signals from the sensor probe. When significant amounts of radio frequency (RF) interference are present, the temperature sensing can be provided with RF shielding, RF filtering, isolated amplifying and/or multiple stages of low pass filtering that suppress the RF interference. The temperature sensing system is particularly well suited for monitoring and measuring temperatures within semiconductor manufacturing equipment, such as etching, deposition, and other processing chambers.
摘要翻译：本发明涉及一种温度感测系统，即使在高频无线电频率环境中也能使用接触传感器精确测量物品或区域的温度。温度感测系统包括与要监测其温度的物品或区域接触的传感器探头，以及用于放大来自传感器探头的信号的控制电路。当存在大量的射频（RF）干扰时，可以提供RF屏蔽，RF滤波，隔离放大和/或抑制RF干扰的多级低通滤波的温度感测。温度感测系统特别适用于监测和测量半导体制造设备内的温度，例如蚀刻，沉积和其它处理室。

IPRDB

热门服务

关于我们

友情链接

联系方式