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    • 1. 发明授权
    • Method of fabricating a semiconductor device including formation of contact holes
    • 制造包括形成接触孔的半导体器件的方法
    • US07892918B2
    • 2011-02-22
    • US12170115
    • 2008-07-09
    • Ji-Yoon LeeHyuck-Chai Jung
    • Ji-Yoon LeeHyuck-Chai Jung
    • H01L21/8242
    • H01L27/10888H01L21/76895H01L27/10885
    • A wiring structure in a semiconductor device includes a first insulation layer formed on a substrate having first and second contact regions, and first and second pads extending through the first insulation layer and contacting the first and the second contact regions. The first and the second pads are higher than the first insulation layer. A blocking layer pattern is formed on the first insulation layer between the first and the second pads, the blocking layer pattern being higher than the first and the second pads. A second insulation layer is formed on the blocking layer pattern and the first and the second pads. A bit line structure is formed on the second insulation layer, the bit line structure electrically contacting the second pad. A third insulation layer is formed on the second insulation layer and the bit line structure. A plug extends through the second and the third insulation layers and contacts the first pad.
    • 半导体器件中的布线结构包括形成在具有第一和第二接触区域的衬底上的第一绝缘层,以及延伸穿过第一绝缘层并且接触第一和第二接触区域的第一和第二焊盘。 第一和第二焊盘高于第一绝缘层。 在第一和第二焊盘之间的第一绝缘层上形成阻挡层图案,阻挡层图案高于第一和第二焊盘。 在阻挡层图案和第一和第二焊盘上形成第二绝缘层。 位线结构形成在第二绝缘层上,位线结构与第二焊盘电接触。 在第二绝缘层和位线结构上形成第三绝缘层。 插头延伸穿过第二绝缘层和第三绝缘层并接触第一焊盘。
    • 4. 发明授权
    • Semiconductor device having a well structure for improving soft error rate immunity and latch-up immunity and a method of making such a device
    • 具有用于提高软错误率抗扰度和闭锁抗扰度的良好结构的半导体器件和制造这种器件的方法
    • US07294889B2
    • 2007-11-13
    • US10961927
    • 2004-10-08
    • Hyuck-Chai Jung
    • Hyuck-Chai Jung
    • H01L29/76
    • H01L27/0921H01L21/823892Y10S257/903
    • A semiconductor device with improved soft error rate immunity and latch-up immunity and a method of forming the same. The device includes first wells of first conductivity type and second well of second conductivity type formed in the semiconductor substrate of first conductivity type. First conductivity type MOSFETs including source/drain of first conductivity type are formed in the second well, and second conductivity type MOSFETs including source/drain of second conductivity type in the first well. A third well of second conductivity type is formed at a region under the first wells and the drain of the second conductivity type MOSFETs. The first well is connected to the semiconductor substrate between the first well and the third well.
    • 具有提高的软错误率抗扰度和闭锁抗扰度的半导体器件及其形成方法。 该器件包括形成在第一导电类型的半导体衬底中的第一导电类型的第一阱和第二导电类型的第二阱。 在第二阱中形成包括第一导电类型的源极/漏极的第一导电类型的MOSFET,以及在第一阱中包括第二导电类型的源极/漏极的第二导电类型的MOSFET。 第二导电类型的第三阱形成在第一导电型MOSFET的第一阱和漏极下方的区域。 第一阱在第一阱和第三阱之间连接到半导体衬底。
    • 5. 发明授权
    • Electrostatic discharge protective circuit for semiconductor device
    • 半导体器件静电放电保护电路
    • US6084272A
    • 2000-07-04
    • US263527
    • 1999-03-05
    • Hyuck-Chai Jung
    • Hyuck-Chai Jung
    • H01L21/8238H01L27/02H01L27/092H01L27/01H01L27/12
    • H01L27/0266H01L27/0288
    • An electrostatic discharge protective circuit including a semiconductor substrate, an input/output pad formed on the semiconductor substrate, a PMOS transistor formed on the semiconductor substrate and having a drain connected to the input/output pad, a first n+ diffusion layer formed in the semiconductor substrate and separated from the drain of the PMOS transistor at a predetermined interval while being connected to a Vcc terminal, a deep n+ diffusion layer formed between the drain of the PMOS transistor and the first n+ diffusion layer, an NMOS transistor formed on the semiconductor substrate and having a drain connected to the input/output pad, and second n+ diffusion layers formed around the NMOS transistor in the semiconductor substrate and connected to a Vss terminal.
    • 一种静电放电保护电路,包括半导体衬底,形成在所述半导体衬底上的输入/输出焊盘,形成在所述半导体衬底上并具有连接到所述输入/输出焊盘的漏极的PMOS晶体管,形成在所述半导体衬底中的第一n +扩散层 衬底,并且在连接到Vcc端子处以预定间隔从PMOS晶体管的漏极分离,形成在PMOS晶体管的漏极和第一n +扩散层之间的深n +扩散层,形成在半导体衬底上的NMOS晶体管 并且具有连接到输入/输出焊盘的漏极,以及形成在半导体衬底中的NMOS晶体管周围并连接到Vss端子的第二n +扩散层。
    • 8. 发明授权
    • Method for forming structure of wires for a semiconductor device
    • 用于形成用于半导体器件的导线结构的方法
    • US6008115A
    • 1999-12-28
    • US997587
    • 1997-12-23
    • Hyuck-Chai Jung
    • Hyuck-Chai Jung
    • H01L27/108H01L21/28H01L21/768H01L21/8242H01L21/00H01L21/425H01L21/4763
    • H01L21/76843H01L21/76802H01L21/76877
    • Disclosed are a method for forming a structure of wires for a semiconductor device in which pads are formed for contact in cell regions as well as core regions and periphery regions where cell aspect ratios are very high, and a structure of wires so formed. The semiconductor device includes a semiconductor substrate arranged into cell regions and periphery and/or core regions, the periphery and/or core regions having a well formed in the semiconductor substrate, the semiconductor substrate being arranged into active regions and field regions, the semiconductor device also having field insulating layers in the field regions, plural gate structures on portions of the semiconductor substrate in the active regions, and impurity regions in the semiconductor substrate between the gate structures. The method includes the steps of: forming an interlayer insulating structure on the semiconductor device; forming contact holes through the interlayer insulating structure to expose the impurity regions; lining contact-hole-portions of the interlayer insulating layer with portions of a barrier layer, respectively, such that the portions of the barrier layer contact the impurity regions; forming conductive pads on the portions of the barrier layer such that remainders of the contact holes are filled; and forming a wire layer on each one of the conductive pads.
    • 公开了一种用于形成用于半导体器件的布线结构的方法,其中形成用于在单元区域中接触的焊盘以及单元宽高比非常高的芯区域和外围区域以及如此形成的导线的结构。 半导体器件包括布置在单元区域和外围和/或芯区域中的半导体衬底,其中外围和/或芯区域在半导体衬底中形成良好,半导体衬底被布置成有源区域和场区域,半导体器件 在场区域中也具有场绝缘层,在有源区域中的半导体衬底的部分上的多个栅极结构以及栅极结构之间的半导体衬底中的杂质区域。 该方法包括以下步骤:在半导体器件上形成层间绝缘结构; 通过所述层间绝缘结构形成接触孔以暴露所述杂质区域; 分别将层间绝缘层的接触孔部分与阻挡层的部分层叠,使得阻挡层的部分与杂质区接触; 在所述阻挡层的所述部分上形成导电焊盘,使得所述接触孔的剩余部分被填充; 以及在每个导电焊盘上形成导线层。