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1. 发明申请

US20050158907A1 Image sensor device and method of fabricating the same 审中-公开
公开(公告)号：US20050158907A1
公开(公告)日：2005-07-21
申请号：US10893674
申请日：2004-07-15
申请人： Jhy-Jyi Sze , Min-Hua Tsai , Tzung-Han Tan , Hsin-Ping Wu , Chia-Huei Lin
发明人： Jhy-Jyi Sze , Min-Hua Tsai , Tzung-Han Tan , Hsin-Ping Wu , Chia-Huei Lin
IPC分类号： H01L21/00 , H01L21/44 , H01L21/762 , H01L27/146 , H01L31/0232
CPC分类号： H01L27/14687 , H01L21/76224 , H01L27/1463 , H01L27/14643
摘要： A method of fabricating an image sensor device is disclosed. In the method, a substrate having a plurality of trenches therein is provided. A first anti-reflective layer is formed on the surfaces of the trenches. An insulating layer is filled in the trenches for forming a plurality of shallow trench isolation regions. At least one photo sensitive region is formed within the substrate between neighboring shallow trench isolation regions. A second anti-reflective layer is formed at least covering the photo sensitive region. Because the first anti-reflective layer is formed on the surfaces of the trenches, and the second anti-reflective layer is formed on the photo sensitive region, the sensitivity of the image sensor device is improved.

2. 发明申请

US20050158897A1 Image sensor device and method of fabricating the same 审中-公开
标题翻译：图像传感器装置及其制造方法
公开(公告)号：US20050158897A1
公开(公告)日：2005-07-21
申请号：US10761992
申请日：2004-01-21
申请人： Jhy-Jyi Sze , Min-Hua Tsai , Tzung-Han Tan , Hsin-Ping Wu , Chia-Huei Lin
发明人： Jhy-Jyi Sze , Min-Hua Tsai , Tzung-Han Tan , Hsin-Ping Wu , Chia-Huei Lin
IPC分类号： H01L21/00 , H01L21/44 , H01L21/762 , H01L27/146 , H01L31/0232
CPC分类号： H01L27/14687 , H01L21/76224 , H01L27/1463 , H01L27/14643
摘要： A method of fabricating an image sensor device is disclosed. In the method, a substrate having a plurality of trenches therein is provided. A first anti-reflective layer is formed on the surfaces of the trenches. An insulating layer is filled in the trenches for forming a plurality of shallow trench isolation regions. At least one photo sensitive region is formed within the substrate between neighboring shallow trench isolation regions. A second anti-reflective layer is formed at least covering the photo sensitive region. Because the first anti-reflective layer is formed on the surfaces of the trenches, and the second anti-reflective layer is formed on the photo sensitive region, the sensitivity of the image sensor device is improved.
摘要翻译：公开了一种制造图像传感器装置的方法。在该方法中，提供其中具有多个沟槽的基板。第一抗反射层形成在沟槽的表面上。在沟槽中填充绝缘层以形成多个浅沟槽隔离区域。在相邻的浅沟槽隔离区域之间的衬底内形成至少一个光敏区域。形成至少覆盖光敏区域的第二抗反射层。因为第一抗反射层形成在沟槽的表面上，并且第二抗反射层形成在光敏区域上，所以提高了图像传感器装置的灵敏度。

3. 发明授权

US07737479B2 Image sensor 有权
标题翻译：图像传感器
公开(公告)号：US07737479B2
公开(公告)日：2010-06-15
申请号：US12147481
申请日：2008-06-27
申请人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
发明人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
IPC分类号： H01L31/062
CPC分类号： H01L27/14623 , H01L27/14627 , H01L27/14634 , H01L27/14685 , H01L27/14687 , H01L27/14689
摘要： An image sensor, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
摘要翻译：一种图像传感器，其中在包括像素阵列区域，光学黑色区域和覆盖像素阵列区域中的感光单元阵列的逻辑区域的半导体衬底上形成平坦化层，形成图案化金属层在对应于像素阵列区域和逻辑区域的平坦化层上，而不是光学黑色区域。在钝化层形成之后并且在低于约400℃的温度下形成滤色器阵列之前，在光学黑色区域中形成光学黑色层，并且优选地包含金属材料。

4. 发明授权

US07547573B2 Image sensor and method of manufacturing the same 有权
标题翻译：图像传感器及其制造方法
公开(公告)号：US07547573B2
公开(公告)日：2009-06-16
申请号：US11461457
申请日：2006-08-01
申请人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
发明人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
IPC分类号： H01L21/00
CPC分类号： H01L27/14623 , H01L27/14627 , H01L27/14634 , H01L27/14685 , H01L27/14687 , H01L27/14689
摘要： An image sensor and a method of manufacturing the same, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
摘要翻译：一种图像传感器及其制造方法，其中在包括像素阵列区域，光学黑色区域和逻辑区域的半导体衬底上形成平坦化层以覆盖像素阵列区域中的感光单元阵列在对应于像素阵列区域和逻辑区域而不是光学黑色区域的平坦化层上形成图案化的金属层。在钝化层形成之后并且在低于约400℃的温度下形成滤色器阵列之前，在光学黑色区域中形成光学黑色层，并且优选地包含金属材料。

5. 发明申请

US20080265354A1 Image sensor 有权
标题翻译：图像传感器
公开(公告)号：US20080265354A1
公开(公告)日：2008-10-30
申请号：US12147481
申请日：2008-06-27
申请人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
发明人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
IPC分类号： H01L31/0232
CPC分类号： H01L27/14623 , H01L27/14627 , H01L27/14634 , H01L27/14685 , H01L27/14687 , H01L27/14689
摘要： An image sensor, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
摘要翻译：一种图像传感器，其中在包括像素阵列区域，光学黑色区域和覆盖像素阵列区域中的感光单元阵列的逻辑区域的半导体衬底上形成平坦化层，形成图案化金属层在对应于像素阵列区域和逻辑区域的平坦化层上，而不是光学黑色区域。在钝化层形成之后并且在低于约400℃的温度下形成滤色器阵列之前，在光学黑色区域中形成光学黑色层，并且优选地包含金属材料。

6. 发明申请

US20080032438A1 Image sensor and method of manufacturing the same 有权
标题翻译：图像传感器及其制造方法
公开(公告)号：US20080032438A1
公开(公告)日：2008-02-07
申请号：US11461457
申请日：2006-08-01
申请人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
发明人： Tzeng-Fei Wen , Giuseppe Rossi , Ju-Hsin Yen , Chia-Huei Lin , Jhy-Jyi Sze , Chien-Yao Huang , Teng-Yuan Ko , Nien-Tsu Peng
IPC分类号： H01L21/00
CPC分类号： H01L27/14623 , H01L27/14627 , H01L27/14634 , H01L27/14685 , H01L27/14687 , H01L27/14689
摘要： An image sensor and a method of manufacturing the same, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
摘要翻译：一种图像传感器及其制造方法，其中在包括像素阵列区域，光学黑色区域和逻辑区域的半导体衬底上形成平坦化层以覆盖像素阵列区域中的感光单元阵列在对应于像素阵列区域和逻辑区域而不是光学黑色区域的平坦化层上形成图案化的金属层。在钝化层形成之后并且在低于约400℃的温度下形成滤色器阵列之前，在光学黑色区域中形成光学黑色层，并且优选地包含金属材料。

7. 发明授权

US07214998B2 Complementary metal oxide semiconductor image sensor layout structure 有权
标题翻译：互补金属氧化物半导体图像传感器布局结构
公开(公告)号：US07214998B2
公开(公告)日：2007-05-08
申请号：US11161174
申请日：2005-07-26
申请人： Hsin-Ping Wu , Chia-Huei Lin
发明人： Hsin-Ping Wu , Chia-Huei Lin
IPC分类号： H01L31/00
CPC分类号： H01L27/14645 , H01L27/14603 , H01L27/14621 , H01L27/14627 , H01L27/1463
摘要： A complementary metal oxide semiconductor (CMOS) image sensor layout structure is described. The CMOS image sensor layout structure includes a substrate, a plurality of light sensing devices, a plurality of transistors and a plurality of color-filtering film layers. The substrate has a pixel array region comprising a plurality of pixels. Each pixel has a light sensing region and an active device region. The pixels are isolated from one another by isolation structures and the light sensing regions have different sizes. The light sensing devices are defined separately within the respective light sensing regions. The transistors are disposed within the respective active device region. The color-filtering film layers are disposed separately above the pixels to form a color-filtering array.
摘要翻译：描述了互补金属氧化物半导体（CMOS）图像传感器布局结构。 CMOS图像传感器布置结构包括基板，多个光感测装置，多个晶体管和多个滤色膜层。衬底具有包括多个像素的像素阵列区域。每个像素具有光感测区域和有源器件区域。像素通过隔离结构彼此隔离，并且光感测区域具有不同的尺寸。光感测装置在相应的光感测区域内分开限定。晶体管设置在相应的有源器件区域内。滤色膜层分别设置在像素之上，以形成滤色阵列。

8. 发明申请

US20070026564A1 METHOD FOR FORMING MICROLENSES OF DIFFERENT CURVATURES AND FABRICATING PROCESS OF SOLID-STATE IMAGE SENSOR 审中-公开
标题翻译：固态图像传感器形成不同曲线和制作工艺的微观方法
公开(公告)号：US20070026564A1
公开(公告)日：2007-02-01
申请号：US11160776
申请日：2005-07-08
申请人： Hsin-Ping Wu , Chia-Huei Lin
发明人： Hsin-Ping Wu , Chia-Huei Lin
IPC分类号： H01L21/00
CPC分类号： H01L27/14685 , G02B3/0012 , G02B3/0056 , G02B5/201 , H01L27/14621 , H01L27/14627
摘要： A method for forming microlenses of different curvatures is described, wherein a transparent photosensitive layer is formed on a substrate having a planar upper surface. A photomask is used to pattern the photosensitive layer, wherein the photomask has at least two patterns of different transparencies thereon such that at least two islands of different thicknesses are defined from the photosensitive layer. Then, the at least two islands are heated and softened to form at least two microlenses of different curvatures.
摘要翻译：描述了用于形成不同曲率的微透镜的方法，其中在具有平坦的上表面的基板上形成透明感光层。使用光掩模来对感光层进行图案化，其中光掩模在其上具有至少两种不同透明度的图案，使得从感光层限定不同厚度的至少两个岛。然后，至少两个岛被加热并软化以形成不同曲率的至少两个微透镜。

9. 发明申请

US20070008421A1 METHOD FOR FORMING MICROLENSES OF DIFFERENT CURVATURES AND FABRICATING PROCESS OF SOLID-STATE IMAGE SENSOR 有权
标题翻译：固态图像传感器形成不同曲线和制作工艺的微观方法
公开(公告)号：US20070008421A1
公开(公告)日：2007-01-11
申请号：US11160739
申请日：2005-07-07
申请人： Hsin-Ping Wu , Chia-Huei Lin
发明人： Hsin-Ping Wu , Chia-Huei Lin
IPC分类号： H04N5/225
CPC分类号： H01L27/14627 , H01L27/14645 , H01L27/14685
摘要： A method for forming microlenses of different curvatures is described, wherein a substrate having at least a first and a second areas different in height is provided. A transparent photosensitive layer having a planar surface is formed on the substrate and then patterned into at least two islands of different thicknesses respectively over the first area and the second area. The at least two islands are heated and softened to form at least two microlenses of different curvatures respectively over the first area and the second area, wherein the higher an area is, the smaller the curvature of the corresponding microlens is.
摘要翻译：描述了一种用于形成不同曲率的微透镜的方法，其中提供了至少具有高度不同的第一和第二区域的基板。在基板上形成具有平坦表面的透明感光层，然后在第一区域和第二区域上分别形成至少两个不同厚度的岛。至少两个岛被加热并软化以在第一区域和第二区域上分别形成不同曲率的至少两个微透镜，其中区域越高，相应微透镜的曲率越小。

10. 发明授权

US07736939B2 Method for forming microlenses of different curvatures and fabricating process of solid-state image sensor 有权
标题翻译：用于形成不同曲率的微透镜的方法和固态图像传感器的制造过程
公开(公告)号：US07736939B2
公开(公告)日：2010-06-15
申请号：US11160739
申请日：2005-07-07
申请人： Hsin-Ping Wu , Chia-Huei Lin
发明人： Hsin-Ping Wu , Chia-Huei Lin
IPC分类号： H01L21/00
CPC分类号： H01L27/14627 , H01L27/14645 , H01L27/14685
摘要： A method for forming microlenses of different curvatures is described, wherein a substrate having at least a first and a second areas different in height is provided. A transparent photosensitive layer having a planar surface is formed on the substrate and then patterned into at least two islands of different thicknesses respectively over the first area and the second area. The at least two islands are heated and softened to form at least two microlenses of different curvatures respectively over the first area and the second area, wherein the higher an area is, the smaller the curvature of the corresponding microlens is.
摘要翻译：描述了一种用于形成不同曲率的微透镜的方法，其中提供了至少具有高度不同的第一和第二区域的基板。在基板上形成具有平坦表面的透明感光层，然后在第一区域和第二区域上分别形成至少两个不同厚度的岛。至少两个岛被加热并软化以在第一区域和第二区域上分别形成不同曲率的至少两个微透镜，其中区域越高，相应微透镜的曲率越小。

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