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1. 发明授权

US06779394B2 Apparatus and method for thermal management of a mass flow controller 有权
标题翻译：质量流量控制器的热管理装置和方法
公开(公告)号：US06779394B2
公开(公告)日：2004-08-24
申请号：US10032258
申请日：2001-12-21
申请人： Jesse Ambrosina , Isao Suzuki , Ali Shajii
发明人： Jesse Ambrosina , Isao Suzuki , Ali Shajii
IPC分类号： G01F168
CPC分类号： G01F1/6847 , G01F1/684 , G01F5/00 , G01F15/04 , G05D7/0635
摘要： A thermal mass flow controller includes a sensor assembly, a valve assembly, and mass flow controller housing. A thermal ground limits the conductive thermal path between the mass flow controller housing and the sensor assembly and, due to the limited cross-section of the thermal ground, substantially eliminates externally imposed thermal gradients within the sensor assembly. The controller also includes a thermally dissipative element that conducts thermal energy along a path from the valve assembly away from the sensor assembly.
摘要翻译：热质量流量控制器包括传感器组件，阀组件和质量流量控制器壳体。热接地限制质量流量控制器壳体和传感器组件之间的导电热路径，并且由于热地面的有限横截面，基本上消除了传感器组件内的外部施加的热梯度。该控制器还包括热耗散元件，其沿着从阀组件远离传感器组件的路径传导热能。

2. 发明申请

US20120174992A1 Apparatus and Method for Pressure Fluctuation Insensitive Mass Flow Control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US20120174992A1
公开(公告)日：2012-07-12
申请号：US13425784
申请日：2012-03-21
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： F16K31/12
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/776
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

3. 发明申请

US20060214127A1 Parallel plate valve assembly 审中-公开
标题翻译：平行板阀组件
公开(公告)号：US20060214127A1
公开(公告)日：2006-09-28
申请号：US11089681
申请日：2005-03-25
申请人： Ali Shajii , Jesse Ambrosina , Leonard Myatt , Matthew Besen
发明人： Ali Shajii , Jesse Ambrosina , Leonard Myatt , Matthew Besen
IPC分类号： F16K31/44
CPC分类号： F16K31/52
摘要： A valve assembly including a first plate having a first surface defining a port, a second plate received over the first plate such that the port of the first plate is substantially closed by a first surface of the second plate, wherein the second plate is movable away from the first plate to open the port, and a fixed member spaced from a second surface of the second plate, the second surface facing away from the first surface of the second plate. A first linkage has opposing first and second ends, and the first end is positioned adjacent the second surface of the second plate, and a second linkage has opposing first and second ends, and the first end is pivotally connected to the second end of the first linkage and the second end of the second linkage is positioned adjacent the fixed member.
摘要翻译：一种阀组件，包括具有限定出口的第一表面的第一板，容纳在第一板上的第二板，使得第一板的端口基本上被第二板的第一表面封闭，其中第二板可移动从所述第一板打开所述端口，以及与所述第二板的第二表面间隔开的固定构件，所述第二表面背离所述第二板的所述第一表面。第一连杆具有相对的第一和第二端，并且第一端定位成邻近第二板的第二表面，并且第二连杆具有相对的第一和第二端，并且第一端枢转地连接到第一和第二端的第二端并且第二连杆的第二端定位成与固定构件相邻。

4. 发明授权

US06932098B2 Apparatus and method for pressure fluctuation insensitive mass flow control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US06932098B2
公开(公告)日：2005-08-23
申请号：US10806974
申请日：2004-03-23
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina , Donald K. Smith , William R. Clark
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina , Donald K. Smith , William R. Clark
IPC分类号： G01F1/66 , G01F1/684 , G01F1/696 , G01F1/86 , G01F5/00 , G01F25/00 , G05D7/06
CPC分类号： G01F15/024 , G01F1/684 , G01F1/6965 , G01F1/86 , G01F5/00 , G01F25/0053 , G05D7/0635 , Y10T137/0379 , Y10T137/0396 , Y10T137/7759 , Y10T137/776 , Y10T137/7761 , Y10T137/87354
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

5. 发明授权

US06766260B2 Mass flow ratio system and method 有权
标题翻译：质量流量比系统和方法
公开(公告)号：US06766260B2
公开(公告)日：2004-07-20
申请号：US10037882
申请日：2002-01-04
申请人： Jesse Ambrosina , Nicholas E. Kottenstette , Ali Shajii
发明人： Jesse Ambrosina , Nicholas E. Kottenstette , Ali Shajii
IPC分类号： G06F1900
CPC分类号： G01F1/68 , Y10T137/0363 , Y10T137/2529 , Y10T137/2657 , Y10T137/7761 , Y10T137/87877
摘要： A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.
摘要翻译：一种用于分割单个质量流的系统，包括适于接收单个质量流的入口和连接到入口的至少两条流动管线。每个流动管线包括流量计和阀。该系统还包括被编程为接收通过用户界面的期望流量比的控制器，接收指示来自流量计的测量流量的信号，基于所测量的流量计算通过流动管线的流量的实际比率，并将实际与所需比例的比值。如果实际比例不等于期望的比率，则控制器还被编程为计算通过至少一个流线的期望流量，并且向至少一个阀提供指示期望流量的信号。

6. 发明授权

US07552015B2 Apparatus and method for displaying mass flow controller pressure 有权
标题翻译：显示质量流量控制器压力的装置和方法
公开(公告)号：US07552015B2
公开(公告)日：2009-06-23
申请号：US10178586
申请日：2002-06-24
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： G01F7/00
CPC分类号： G01F25/0007 , G01F1/6847 , G01F5/00 , G05D7/0635 , Y10T137/0379 , Y10T137/7761
摘要： A mass flow controller includes a pressure sensor that senses pressure within the mass flow controller and displays the pressure. The pressure display may be local, mounted directly to the mass flow controller, or it may be connected through a link to the mass flow controller for remote display.
摘要翻译：质量流量控制器包括感测质量流量控制器内的压力并显示压力的压力传感器。压力显示可以是本地的，直接安装到质量流量控制器，或者它可以通过链接连接到质量流量控制器用于远程显示。

7. 发明申请

US20080091306A1 APPARATUS AND METHOD FOR PRESSURE FLUCTUATION INSENSITIVE MASS FLOW CONTROL 有权
标题翻译：压力波动敏感质量流量控制的装置和方法
公开(公告)号：US20080091306A1
公开(公告)日：2008-04-17
申请号：US11950966
申请日：2007-12-05
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/776
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

8. 发明授权

US08738187B2 Apparatus and method for pressure fluctuation insensitive mass flow control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US08738187B2
公开(公告)日：2014-05-27
申请号：US13425784
申请日：2012-03-21
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： G05D11/00
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/776
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

9. 发明授权

US07136767B2 Apparatus and method for calibration of mass flow controller 有权
公开(公告)号：US07136767B2
公开(公告)日：2006-11-14
申请号：US10178119
申请日：2002-06-24
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： G01F25/00
CPC分类号： G01F1/684 , G01F1/6965 , G01F1/86 , G01F5/00 , G01F25/0053 , G05D7/0635
摘要： A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.

10. 发明申请

US20060173642A1 Apparatus and method for pressure fluctuation insensitive mass flow control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US20060173642A1
公开(公告)日：2006-08-03
申请号：US11304456
申请日：2005-12-15
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： G01F25/00
CPC分类号： G01F15/024 , G01F1/684 , G01F1/6965 , G01F1/86 , G01F5/00 , G01F25/0053 , G05D7/0635 , Y10T137/0379 , Y10T137/0396 , Y10T137/7759 , Y10T137/776 , Y10T137/7761 , Y10T137/87354
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

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