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    • 9. 发明授权
    • Probe station for on-wafer-measurement under EMI-shielding
    • 探测台用于EMI屏蔽下的晶圆测量
    • US08344744B2
    • 2013-01-01
    • US12818442
    • 2010-06-18
    • Axel SchmidtBotho HirschfeldStojan KanevAndrej RumiantsevMichael Teich
    • Axel SchmidtBotho HirschfeldStojan KanevAndrej RumiantsevMichael Teich
    • G01R31/00
    • G01R31/2886G01R1/18
    • An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
    • 提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。 该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。 在壳体内部和卡盘附近,布置了一个信号前置放大器,其信号端口面向卡盘与支撑表面电连接,其中信号前置放大器可以通过定位装置与卡盘一起移动,使其保持其位置 在定位期间相对于卡盘是恒定的。 信号前置放大器通过测量电缆连接到壳体外部的测量单元。