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1. 发明申请

US20050287755A1 Capacitor assemblies 有权
标题翻译：电容器组件
公开(公告)号：US20050287755A1
公开(公告)日：2005-12-29
申请号：US11156908
申请日：2005-06-20
申请人： Jens Bachmann , Bernd Foste , Klaus Goller , Jakob Kriz
发明人： Jens Bachmann , Bernd Foste , Klaus Goller , Jakob Kriz
IPC分类号： H01L27/08 , H01L21/339 , H01L21/20
CPC分类号： H01L27/0805
摘要： A method for fabricating a capacitor arrangement which includes at least three electrodes is described. The capacitor arrangement is fabricated using a number of lithography methods that is smaller than the number of electrodes. A capacitor arrangement extending over more than two or more interlayers between metallization layers has a high capacitance per unit area and can be fabricated in a simple way is also described. The circuit arrangement has a high capacitance per unit area and can be fabricated in a simple way. An electrode layer is first patterned using a dry-etching process and residues of the electrode layer are removed using a wet-chemical process, making it possible to fabricate capacitors with excellent electrical properties.
摘要翻译：描述了一种制造包括至少三个电极的电容器装置的方法。使用小于电极数量的多种光刻方法制造电容器布置。在金属化层之间延伸超过两个或更多个中间层的电容器布置具有每单位面积的高电容，并且可以以简单的方式制造。电路布置具有每单位面积的高电容，并且可以以简单的方式制造。首先使用干蚀刻工艺对电极层进行图案化，并且使用湿化学工艺除去电极层的残余物，使得可以制造具有优异电性能的电容器。

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