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1. 发明申请

US20120133762A1 METHOD AND SYSTEM FOR DETECTING AND CLASSIFYING A DEFECT OF A SUBSTRATE 审中-公开
标题翻译：检测和分类基板缺陷的方法和系统
公开(公告)号：US20120133762A1
公开(公告)日：2012-05-31
申请号：US13384909
申请日：2010-02-26
申请人： Jean-Philippe Schweitzer , Huifen Li , Xiaofeng Lin , Xiaofeng Guo , Feng Guo , Xiaowei Sun
发明人： Jean-Philippe Schweitzer , Huifen Li , Xiaofeng Lin , Xiaofeng Guo , Feng Guo , Xiaowei Sun
IPC分类号： H04N7/18
CPC分类号： G01N21/896 , G01N2021/8967
摘要： A method and system for detecting and classifying a defect of a substrate, the system including a first channel, including a first illuminating unit to irradiate a light to a substrate and a first imaging unit to take images by sensing a light from the substrate when it is irradiated; a second channel, including a second illuminating unit to irradiate a light to the substrate and a second imaging unit to take images by sensing a light from the substrate when it is irradiated; an image constructing module to construct two images of the substrate using the images of the first and second imaging units respectively; and an image processing module to detect, when the substrate has a defect, that the defect is a defect on or in the substrate, based on a relationship of positions where the defect of the substrate appears in the two images of the substrate.
摘要翻译：一种用于检测和分类衬底缺陷的方法和系统，所述系统包括第一通道，所述第一通道包括用于将光照射到衬底的第一照明单元和第一成像单元，以通过感测来自所述衬底的光来拍摄图像被照射第二通道，包括用于将光照射到所述基板的第二照明单元和第二成像单元，以在被照射时感测来自所述基板的光来拍摄图像; 图像构造模块，用于分别使用第一和第二成像单元的图像来构造基板的两个图像; 以及图像处理模块，用于基于衬底的缺陷在衬底的两个图像中出现缺陷的位置的关系来检测衬底有缺陷时缺陷是衬底上或衬底中的缺陷。

2. 发明申请

US20110310244A1 SYSTEM AND METHOD FOR DETECTING A DEFECT OF A SUBSTRATE 审中-公开
标题翻译：用于检测基板缺陷的系统和方法
公开(公告)号：US20110310244A1
公开(公告)日：2011-12-22
申请号：US13203526
申请日：2010-02-26
申请人： Jean-Philippe Schweitzer , Huifen Li , Xiaofeng Lin , Feng Guo , Xiaofeng Guo
发明人： Jean-Philippe Schweitzer , Huifen Li , Xiaofeng Lin , Feng Guo , Xiaofeng Guo
IPC分类号： H04N7/18
CPC分类号： G01N21/896 , G01N21/898 , G01N2021/8854 , G01N2021/8874 , H02S50/15
摘要： A system and a method for detecting defects of a substrate are provided. The system includes: a first illuminating component, disposed at one side of the substrate and adapted to emit diffused light to the substrate; a first imaging component, disposed at the other side of the substrate and adapted to scan the substrate by sensing light emitted by the first illuminating component and transmitted through the substrate, the first illuminating component and the first imaging component constructing a first detection channel; and a transport module, adapted to produce relative motion between the substrate, and the first illuminating component and the first imaging component.
摘要翻译：提供了一种用于检测基板缺陷的系统和方法。该系统包括：第一照明部件，设置在基板的一侧并适于向基板发射漫射光; 第一成像部件，设置在所述基板的另一侧，并且适于通过感测由所述第一照明部件发射并透射通过所述基板的所述基板扫描所述基板，所述第一照明部件和所述第一成像部件构成第一检测通道; 以及传输模块，其适于在所述基板与所述第一照明部件与所述第一成像部件之间产生相对运动。

3. 发明申请

US20120105624A1 METHOD AND DEVICE FOR DEFECT INSPECTION IN SEPARATED TRANSPARENT AND/OR SEMI-TRANSPARENT BODY 审中-公开
标题翻译：分离透明和/或半透明体内缺陷检查的方法和装置
公开(公告)号：US20120105624A1
公开(公告)日：2012-05-03
申请号：US13381422
申请日：2010-07-02
申请人： Xiaofeng Lin , Jean-Philippe Schweitzer , Huifen Li , Wenhua Deng , Haifeng Chen , Dazhi Chen
发明人： Xiaofeng Lin , Jean-Philippe Schweitzer , Huifen Li , Wenhua Deng , Haifeng Chen , Dazhi Chen
IPC分类号： H04N7/18
CPC分类号： G01N21/958 , G01N21/9009
摘要： An apparatus and a method for detecting a defect of a separated low rigidity transparent or translucent body, wherein an image acquiring device includes: a first conveyer and a second conveyer to convey a separated low rigidity transparent or translucent body; a transparent bridge disposed between a first conveyer and a second conveyer along a transport path of the separated low rigidity transparent or translucent body, the transparent bridge having a top surface; an illuminating unit disposed on one side of the transparent bridge and configured to project diffusive light onto the top surface of the transparent bridge by transmitting through the transparent bridge; and an image pickup unit disposed on the other side of the transparent bridge and configured to receive light projected from the illuminating unit and transmitting through the separated low rigidity transparent or translucent body to form an image when the separated low rigidity transparent or translucent body enters the top surface of the transparent bridge. With the apparatus and the method, it is possible to detect a defect of the separated low rigidity transparent or translucent body.
摘要翻译：一种用于检测分离的低刚性透明或半透明体的缺陷的装置和方法，其中图像获取装置包括：第一传送器和第二传送器，用于传送分离的低刚性透明或半透明体; 透明桥，其沿着分离的低刚性透明或半透明体的输送路径设置在第一输送机和第二输送机之间，透明桥具有顶表面; 照明单元，其设置在所述透明桥的一侧，并且被配置为通过透过所述透明桥将漫射光投射到所述透明桥的顶表面上; 以及图像拾取单元，其设置在所述透明桥的另一侧，并且被配置为接收从所述照明单元投影的光并且在所分离的低刚性透明或半透明体进入所述透明半导体时透过所述分离的低刚性透明体或半透明体形成图像透明桥顶面。利用该装置和方法，可以检测分离的低刚性透明或半透明体的缺陷。

4. 发明授权

US09110035B2 Method and system for detecting defects of transparent substrate 有权
标题翻译：检测透明基板缺陷的方法和系统
公开(公告)号：US09110035B2
公开(公告)日：2015-08-18
申请号：US13266308
申请日：2010-05-14
申请人： Yuan Zheng , Jean-Philippe Schweitzer , Xiaofeng Lin , Dazhi Chen
发明人： Yuan Zheng , Jean-Philippe Schweitzer , Xiaofeng Lin , Dazhi Chen
IPC分类号： H04N7/18 , G01N21/896 , G01N21/88 , G06K9/00
CPC分类号： G01N21/896 , G01N21/88 , G01N2021/8825 , G06K9/00 , H04N7/18
摘要： A method and a system for detecting defects of a transparent substrate are provided. The system includes: a plurality of detection channels, each of which includes an illumination component for providing illumination to the substrate and an imaging component for scanning the substrate to provide image of the substrate; a transport module, for producing relative motion between the substrate and the illumination components and the imaging components included in the plurality of detection channels; and a controlling module, for controlling the illumination components and the imaging components included in the plurality of detection channels so that at least two illumination components of the illumination components included in the plurality of detection channels provide illumination to the substrate alternately, and the imaging component included in any of the plurality of detection channels scans the substrate when the illumination component included in that detection channel illuminates the substrate, wherein the imaging components included in at least two detection channels of the plurality of detections channels are the same imaging component. The method and system described by the present invention is capable of discriminating real defects from fake defects which enables substrate to be inspected with free of cleaning.
摘要翻译：提供了一种用于检测透明基板的缺陷的方法和系统。该系统包括：多个检测通道，每个检测通道包括用于向基板提供照明的照明部件和用于扫描基板以提供基板的图像的成像部件; 传输模块，用于在所述基板和所述照明部件之间产生相对运动和所述多个检测通道中包括的成像部件; 以及控制模块，用于控制包括在多个检测通道中的照明部件和成像部件，使得包括在多个检测通道中的照明部件的至少两个照明部件交替地向基板提供照明，并且成像部件当所述检测通道中包括的照射元件照亮所述基板时，包括在所述多个检测通道中的任一个中的所述检测通道中的任一个扫描所述基板，其中，所述多个检测通道中的至少两个检测通道中包括的成像部件是相同的成像部件。本发明描述的方法和系统能够区分真实的缺陷和假缺陷，从而使基片无需清洗即可被检查。

5. 发明申请

US20120044344A1 METHOD AND SYSTEM FOR DETECTING DEFECTS OF TRANSPARENT SUBSTRATE 有权
标题翻译：检测透明基板缺陷的方法和系统
公开(公告)号：US20120044344A1
公开(公告)日：2012-02-23
申请号：US13266308
申请日：2010-05-14
申请人： Yuan Zheng , Jean-Philippe Schweitzer , Xiaofeng Lin , Dazhi Chen
发明人： Yuan Zheng , Jean-Philippe Schweitzer , Xiaofeng Lin , Dazhi Chen
IPC分类号： H04N7/18
CPC分类号： G01N21/896 , G01N21/88 , G01N2021/8825 , G06K9/00 , H04N7/18
摘要： A method and a system for detecting defects of a transparent substrate are provided. The system includes: a plurality of detection channels, each of which includes an illumination component for providing illumination to the substrate and an imaging component for scanning the substrate to provide image of the substrate; a transport module, for producing relative motion between the substrate and the illumination components and the imaging components included in the plurality of detection channels; and a controlling module, for controlling the illumination components and the imaging components included in the plurality of detection channels so that at least two illumination components of the illumination components included in the plurality of detection channels provide illumination to the substrate alternately, and the imaging component included in any of the plurality of detection channels scans the substrate when the illumination component included in that detection channel illuminates the substrate, wherein the imaging components included in at least two detection channels of the plurality of detections channels are the same imaging component. The method and system described by the present invention is capable of discriminating real defects from fake defects which enables substrate to be inspected with free of cleaning.
摘要翻译：提供了一种用于检测透明基板的缺陷的方法和系统。该系统包括：多个检测通道，每个检测通道包括用于向基板提供照明的照明部件和用于扫描基板以提供基板的图像的成像部件; 传输模块，用于在所述基板和所述照明部件之间产生相对运动和所述多个检测通道中包括的成像部件; 以及控制模块，用于控制多个检测通道中包括的照明部件和成像部件，使得包括在多个检测通道中的照明部件的至少两个照明部件交替地向基板提供照明，并且成像部件当所述检测通道中包括的照射元件照亮所述基板时，包括在所述多个检测通道中的任一个中的所述检测通道中的任一个扫描所述基板，其中，所述多个检测通道中的至少两个检测通道中包括的成像部件是相同的成像部件。本发明描述的方法和系统能够区分真实的缺陷和假缺陷，从而使基片无需清洗即可被检查。

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