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    • 6. 发明授权
    • Miniaturized cantilever probe for scanning probe microscopy and fabrication thereof
    • 用于扫描探针显微镜的微型悬臂式探针及其制造
    • US08756710B2
    • 2014-06-17
    • US13601906
    • 2012-08-31
    • Weijie WangChanmin Quanmin Su
    • Weijie WangChanmin Quanmin Su
    • G01Q70/16
    • G01Q60/38G01Q70/00G01Q70/02G01Q70/08G01Q70/14G01Q70/16G01R1/06727
    • Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    • 悬臂探针由包括上基板,下基板,内层,第一分离层和第二分离层的多层结构形成,其中第一分离层位于上基板和内层之间,第二分离层 分离层位于下基板和内层之间,并且其中第一和第二分离层相对于第一和第二基板(内层)可差分蚀刻。 上基板是形成探针尖端的第一器件层。 内层是形成悬臂的第二装置层。 下基板是手柄层,从该手柄层形成手柄或基部。 任何层的图案化和蚀刻处理通过分离层与其他层隔离。
    • 8. 发明授权
    • Method of fabricating a probe device for a metrology instrument and a probe device produced thereby
    • 制造用于计量仪器的探针装置和由此制造的探针装置的方法
    • US08595860B2
    • 2013-11-26
    • US12345465
    • 2008-12-29
    • Weijie WangSteven Nagle
    • Weijie WangSteven Nagle
    • G12B21/08
    • G01Q60/38G01Q70/10
    • A method of producing a probe device for a metrology instrument such as an AFM includes providing a substrate and forming a tip stock extending upwardly from the substrate. The tip stock is preferably FIB milled to form a tip of the probe device. The tip preferably has a high aspect ratio, with a height that is at least about 1 micron for performing critical dimension (e.g., deep trench) atomic force microscopy. The stock is preferably pedestal shaped having a distal end that is substantially planar which can be machined into a tip in at least less than about 2 minutes. With the preferred embodiments, the FIB milling step can be completed in substantially fewer and less complicated steps than known techniques to produce a high aspect ratio tip suitable for DT-AFM in less than about one minute.
    • 制造诸如AFM的计量仪器的探针装置的方法包括提供基底并形成从基底向上延伸的尖端原料。 尖端坯料优选地被FIB铣削以形成探针装置的尖端。 尖端优选具有高纵横比,高度为至少约1微米,用于执行临界尺寸(例如,深沟槽)原子力显微镜。 该坯料优选为基座形状,其具有基本上为平面的远端,其可以至少小于约2分钟加工成尖端。 利用优选实施例,可以以比已知技术更少且更简单的步骤完成FIB研磨步骤,以在小于约一分钟内产生适用于DT-AFM的高纵横比尖端。