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    • 1. 发明授权
    • Thermal liquid flow sensor and method of forming same
    • 热液流量传感器及其形成方法
    • US07892488B2
    • 2011-02-22
    • US11352774
    • 2006-02-10
    • Jamie W. SpeldrichScott E. BeckRichard W. GehmanMartin G. MurrayUlrich Bonne
    • Jamie W. SpeldrichScott E. BeckRichard W. GehmanMartin G. MurrayUlrich Bonne
    • G01N21/00G01F1/68
    • G01F1/6845G01F15/006
    • A thermal liquid flow sensor and method of forming same. The sensor has a substrate and one or more sensing elements, disposed on the substrate, for sensing a property of a liquid. The liquid flow sensor, which can be for example a microsensor having a microbrick® structure, has a hydrophilic layer which is disposed on the substrate and covers the sensing element(s). The hydrophilic layer is preferably formed from a spin on glass material, such as for example a silicate or phosphosilicate. A silicon nitride layer can be disposed on the sensing element(s) and interpose the substrate and the hydrophilic layer. The silicon nitride layer can be oxidized, for example, by means of plasma oxidation or oxygen ion implantation so to form the hydrophilic layer thereon. A variety of other hydrophilic compounds can be utilized to form the hydrophilic layer such as, gold, palladium and diamond like carbon.
    • 一种热液体流量传感器及其形成方法。 传感器具有衬底和设置在衬底上的一个或多个感测元件,用于感测液体的性质。 液体流量传感器可以是例如具有微结构的微传感器,其具有设置在基板上并覆盖感测元件的亲水层。 亲水层优选由旋涂在玻璃材料上形成,例如硅酸盐或磷硅酸盐。 氮化硅层可以设置在感测元件上并插入衬底和亲水层。 氮化硅层可以例如通过等离子体氧化或氧离子注入来氧化,从而在其上形成亲水层。 可以使用各种其它亲水性化合物来形成亲水层,例如金,钯和类似于金刚石的碳。
    • 3. 发明授权
    • Indirect flow measurement through a breath-operated inhaler
    • 通过呼吸式吸入器进行间接流量测量
    • US06904907B2
    • 2005-06-14
    • US10300442
    • 2002-11-19
    • Jamie W. SpeldrichMartin G. MurrayRichard Gehman
    • Jamie W. SpeldrichMartin G. MurrayRichard Gehman
    • A61M15/00A61M16/00A61M11/00
    • A61M15/009A61M2016/0039
    • Indirect airflow measurement through breath-operated device is accomplished by incorporating an airflow sensor into the inhaler device along a low resistance channel disposed away from the exhaust chamber of the device and having an input port in airflow communication with a low resistance channel and output input port and low resistance channel are formed in the main housing body of the device, and further incorporating an output port formed near the exhaust changer near the mouthpiece assembly, the output port also in airflow communication with the low resistance channel. A method of measuring airflow in an inhalation device is also described that measures air flowing through the low resistance channel. Another aspect of the invention provides a method that allows for the closure of the devices' airflow ports, by allowing for the rotation of the mouthpiece assembly from open to closed positions relative to the inhaling device's main housing body and towards handle assembly.
    • 通过呼吸操作装置的间接气流测量是通过将气流传感器沿着设置在远离设备的排气室的低阻力通道吸入器装置中并具有与低电阻通道和输出输入端口气流连通的输入端口来实现的 并且在该装置的主壳体上形成有低阻力通道,并且在该吹口组件附近还具有形成于靠近该排气变换器的输出口,该输出口还与该低阻力通道气流连通。 还描述了测量吸入装置中的气流的方法,其测量流过低阻力通道的空气。 本发明的另一方面提供了一种允许通过允许接口组件相对于吸入装置的主壳体主体和朝向手柄组件从打开到关闭位置的旋转来关闭装置的气流端口的方法。
    • 4. 发明授权
    • Thermal isolation between heating and sensing for flow sensors
    • 用于流量传感器的加热和传感之间的隔热
    • US07278308B2
    • 2007-10-09
    • US11299118
    • 2005-12-08
    • Richard W. GehmanMichael G. MarchiniMartin G. Murray
    • Richard W. GehmanMichael G. MarchiniMartin G. Murray
    • G01F1/68
    • G01F1/6845G01F1/684
    • A flow sensor system includes a plurality of flow sensor chips, wherein each flow sensor chip among the plurality of flow sensor chips comprises a substrate, a heater element, a heater control circuit, and flow sensor component formed on the substrate, wherein the heater element is disposed separately from the heater control circuit on the substrate, wherein the heater control circuit is thermally isolated from the heater element and the flow sensor component. Additionally, an air gap can be formed between each sensor chip among the plurality of flow sensor chips, wherein the plurality of flow sensor chips comprises a flow sensor system in which each of the flow sensor chips are separated from one another by the air gap formed therebetween in order to reduce output distortion, response time, warm-up time, drift and noise associated with the plurality of flow sensor chips.
    • 流量传感器系统包括多个流量传感器芯片,其中多个流量传感器芯片中的每个流量传感器芯片包括形成在基板上的基板,加热器元件,加热器控制电路和流量传感器部件,其中加热元件 与基板上的加热器控制电路分开布置,其中加热器控制电路与加热器元件和流量传感器部件热隔离。 此外,可以在多个流量传感器芯片中的每个传感器芯片之间形成气隙,其中多个流量传感器芯片包括流量传感器系统,其中每个流量传感器芯片通过形成的气隙彼此分离 以便减少与多个流量传感器芯片相关联的输出失真,响应时间,预热时间,漂移和噪声。