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1. 发明申请

US20110232367A1 FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL 有权
标题翻译：流体储存和分配系统，包括流体储存和分配容器的动态流体监测
公开(公告)号：US20110232367A1
公开(公告)日：2011-09-29
申请号：US13155237
申请日：2011-06-07
申请人： James V. McManus , James A. Dietz , Steven M. Lurcott
发明人： James V. McManus , James A. Dietz , Steven M. Lurcott
IPC分类号： G01N7/00
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.
摘要翻译：一种用于在操作期间监测流体供应容器中的流体的监测系统，包括从流体供应容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器，（ii）可操作地耦合到所述一个或多个传感器以从其接收监测数据的数据采集模块，并且响应地生成输出与由一个或多个传感器监测的特性相关联，以及（iii）处理器和显示器，其与数据采集模块可操作地耦合并被布置成处理来自数据采集模块的输出并且响应地输出流体在流体中的图形表示供应船。

2. 发明授权

US07955797B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel 有权
标题翻译：流体储存和分配系统包括流体储存和分配容器的动态流体监测
公开(公告)号：US07955797B2
公开(公告)日：2011-06-07
申请号：US10972542
申请日：2004-10-25
申请人： James V. McManus , James A. Dietz , Steven M. Lurcott
发明人： James V. McManus , James A. Dietz , Steven M. Lurcott
IPC分类号： C12Q1/68
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.
摘要翻译：一种用于在操作期间监测流体供应容器中的流体的监测系统，包括从流体供应容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器，（ii）可操作地耦合到所述一个或多个传感器以从其接收监测数据的数据采集模块，并且响应地生成输出与由一个或多个传感器监测的特性相关联，以及（iii）处理器和显示器，其与数据采集模块可操作地耦合并被布置成处理来自数据采集模块的输出并且响应地输出流体在流体中的图形表示供应船。

3. 发明申请

US20080280380A1 Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel 有权
标题翻译：流体储存和分配系统，包括流体储存和分配容器的动态流体监测
公开(公告)号：US20080280380A1
公开(公告)日：2008-11-13
申请号：US11577864
申请日：2005-10-24
申请人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, JR.
发明人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, JR.
IPC分类号： H01L21/66 , B67D5/06 , G01L9/04 , B67D5/00
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.
摘要翻译：一种用于在操作期间监测流体供应容器（22,24,26,28,108）中的流体的监测系统（100），包括从所述流体供应容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器（114,126），（ii）可操作地耦合到一个的数据采集模块（40,132,146）或多个传感器以从其接收监测数据并且响应地产生与由所述一个或多个传感器监测的特性相关的输出，以及（iii）处理器（50,150）和显示器（52,150），其与所述数据采集模块并且被布置成处理来自数据采集模块的输出并且响应地输出流体供应容器中的流体的图形表示，计费凭证，使用报告和/或再供应请求。

4. 发明申请

US20110252883A1 FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL 有权
标题翻译：流体储存和分配系统，包括流体储存和分配容器的动态流体监测
公开(公告)号：US20110252883A1
公开(公告)日：2011-10-20
申请号：US13171434
申请日：2011-06-28
申请人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, JR.
发明人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, JR.
IPC分类号： G01F23/30
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.
摘要翻译：一种用于在操作期间监测流体供应容器中的流体的监测系统，包括从流体供应容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器，（ii）可操作地耦合到所述一个或多个传感器以从其接收监测数据的数据采集模块，并且响应地生成输出与由一个或多个传感器监测的特性相关联，以及（iii）处理器和显示器，其与数据采集模块可操作地耦合并被布置成处理来自数据采集模块的输出并且响应地输出流体在流体中的图形表示供应船，记帐单，使用报告和/或补货请求。

5. 发明授权

US08555705B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel 有权
公开(公告)号：US08555705B2
公开(公告)日：2013-10-15
申请号：US13171434
申请日：2011-06-28
申请人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, Jr.
发明人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, Jr.
IPC分类号： G01N33/487
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

6. 发明授权

US09097611B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel 有权
标题翻译：流体储存和分配系统包括流体储存和分配容器的动态流体监测
公开(公告)号：US09097611B2
公开(公告)日：2015-08-04
申请号：US13155237
申请日：2011-06-07
申请人： James V. McManus , James Dietz , Steven M. Lurcott
发明人： James V. McManus , James Dietz , Steven M. Lurcott
IPC分类号： B82Y10/00 , G01M3/32 , F17C11/00 , G01F22/02
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.
摘要翻译：一种用于在操作期间监测流体供应容器中的流体的监测系统，包括从流体供应容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器，（ii）可操作地耦合到所述一个或多个传感器以从其接收监测数据的数据采集模块，并且响应地生成输出与由一个或多个传感器监测的特性相关联，以及（iii）处理器和显示器，其与数据采集模块可操作地耦合并被布置成处理来自数据采集模块的输出并且响应地输出流体在流体中的图形表示供应船。

7. 发明授权

US07966879B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel 有权
标题翻译：流体储存和分配系统包括流体储存和分配容器的动态流体监测
公开(公告)号：US07966879B2
公开(公告)日：2011-06-28
申请号：US11577864
申请日：2005-10-24
申请人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, Jr.
发明人： James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank Dimeo, Jr.
IPC分类号： G01F23/00
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.
摘要翻译：一种用于在操作期间监测流体供应容器（22,24,26,28,108）中的流体的监测系统（100），包括从所述流体供应容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器（114,126），（ii）可操作地耦合到一个的数据采集模块（40,132,146）或多个传感器以从其接收监测数据并且响应地产生与由所述一个或多个传感器监测的特性相关的输出，以及（iii）处理器（50,150）和显示器（52,150），其与所述数据采集模块并且被布置成处理来自数据采集模块的输出并且响应地输出流体供应容器中的流体的图形表示，计费凭证，使用报告和/或再供应请求。

8. 发明授权

US6125131A Laser system utilizing sorbent-based gas storage and delivery system 失效
标题翻译：基于吸附剂的气体储存和输送系统的激光系统
公开(公告)号：US6125131A
公开(公告)日：2000-09-26
申请号：US80895
申请日：1998-05-18
申请人： George R. Brandes , Glenn M. Tom , James V. McManus
发明人： George R. Brandes , Glenn M. Tom , James V. McManus
IPC分类号： B01D53/04 , B01J4/02 , B01J20/18 , B01J20/20 , F17C11/00 , H01S3/20
CPC分类号： F17C11/007 , B01D53/0407 , B01J20/20 , F17C11/00 , B01D2253/308 , B01D2259/4525 , F17C2205/0338 , F17C2205/0391 , Y02C10/08 , Y02C20/10 , Y10S95/902
摘要： A laser system utilizing a fluid as the excitatory medium for stimulated light emission, wherein the fluid is supplied from a sorbent-based fluid storage and dispensing system coupled in fluid-supplying relationship with the laser apparatus. The laser may be an excimer laser utilizing as the laser working fluid a rare gas halide compound such as fluorides and/or chlorides of krypton, xenon and argon, as well as fluorine and/or chlorine per se. The laser system may alternatively be a far infrared gas laser utilizing a gas such as CO.sub.2, N.sub.2 O, CD.sub.3 OD, CH.sub.3 OD, CH.sub.3 OH, CH.sub.3 NH.sub.2, C.sub.2 H.sub.2 F.sub.2, HCOOH, CD.sub.3 I, CH.sub.3 F, and C.sup.13 H.sub.3 F. Laser systems of the present invention may be utilized in applications such as materials processing, measurement and inspection, reading, writing, and recording of information, holography, communications, displays, spectroscopy and analytical chemistry, remote sensing, surveying, marking, and alignment, surgical and medical applications, plasma diagnostics, laser weaponry, laser-induced nuclear fusion, isotope enrichment and atomic physics.
摘要翻译：一种利用流体作为刺激光发射的兴奋剂介质的激光系统，其中所述流体从与所述激光装置以流体供应关系耦合的基于吸附剂的流体储存和分配系统供应。激光可以是激光工作流体中使用诸如氟化物和/或氪，氙和氩的氟化物和/或氯化物的稀有卤化物化合物以及氟和/或氯本身的准分子激光。激光系统可以替代地是使用诸如CO 2，N 2 O，CD 3 OD，CH 3 OD，CH 3 OH，CH 3 NH 2，C 2 H 2 F 2，HCOOH，CD 3 I，CH 3 F和C 13 H 3 F的气体的远红外气体激光。本发明的激光系统可以用于诸如材料加工，测量和检查，读取，写入和记录信息，全息术，通信，显示，光谱学和分析化学，遥感，测量，标记和对准等应用中。外科和医疗应用，等离子体诊断，激光武器，激光诱导核聚变，同位素浓缩和原子物理学。

9. 发明授权

US5985008A Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium 失效
标题翻译：基于吸附剂的流体储存和分配系统，具有高效吸附剂介质
公开(公告)号：US5985008A
公开(公告)日：1999-11-16
申请号：US82373
申请日：1998-05-20
申请人： Glenn M. Tom , James V. McManus
发明人： Glenn M. Tom , James V. McManus
IPC分类号： B01J20/20 , F17C11/00 , B01D53/04
CPC分类号： B01J20/20 , F17C11/00
摘要： A solid-phase physical sorbent-based fluid storage and dispensing system, in which the sorbent is a particulate activated carbon of specific pore character. The sorbent may be washed, e.g., with hydrofluoric acid, to remove adverse trace metals and oxidic transition metal species therefrom.
摘要翻译：基于固相物理吸附剂的流体储存和分配系统，其中吸附剂是具有特定孔隙特征的颗粒活性炭。吸附剂可以例如用氢氟酸洗涤，以从其中除去不利的痕量金属和氧化过渡金属物质。

10. 发明授权

US5531971A Process for purifying semiconductor process gases to remove lewis acid and oxidant impurities therefrom 失效
标题翻译：净化半导体工艺气体以从其中除去路易斯酸和氧化剂杂质的方法
公开(公告)号：US5531971A
公开(公告)日：1996-07-02
申请号：US322315
申请日：1994-10-13
申请人： Glenn M. Tom , James V. McManus
发明人： Glenn M. Tom , James V. McManus
IPC分类号： B01D53/02 , B01D53/28 , B01D53/40 , B01D53/46 , B01J20/02 , B01J20/04 , B01J20/26 , E02F9/22 , F15B11/05 , F15B11/16 , F15B21/08 , B01D53/04
CPC分类号： E02F9/2235 , B01D53/28 , B01D53/40 , B01D53/46 , B01J20/02 , B01J20/28057 , B01J20/28078 , B01J20/321 , B01J20/3236 , E02F9/2282 , E02F9/2296
摘要： Scavenger compositions useful for purifying process gas streams, such as process gas streams, such as hydrogen, nitrogen, noble gases, diborane, and hydride gases from Groups IVA-VIA of the Periodic Table, such as arsine, phosphine, silane, germane, hydrogen selenide, and hydrogen telluride, and mixtures thereof, to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, such scavenger comprising a porous, high surface area inert support having thereon an active scavenging species, formed by the deposition on the support of a Group IA metal and pyrolysis thereof at a selected elevated temperature on said support. In another aspect, the present invention relates to a method of making a scavenger useful for purifying process gas streams, to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, and a process for purifying process gas streams to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, such process comprising contacting the impurity-containing process gas stream with a scavenger of the general type described above. In a further aspect, the invention relates to a method for using scavengers of the general type described above as back-diffusion scrubbers to protect the manufacturing process or gas supply system from inadvertent introduction of impurities, such method comprising contacting the impurity-containing process gas stream with a scavenger of the general type described above and providing in the scavenger bed one or more endpoint detectors so that back-diffusion events are observed.
摘要翻译：用于净化工艺气流的清除剂组合物，例如来自元素周期表IVA-VIA族的工艺气流，例如氢气，氮气，惰性气体，乙硼烷和氢化物气体，例如胂，膦，硅烷，锗烷，氢硒化物和碲化氢及其混合物，以从其中除去水，氧和其它氧化剂和路易斯酸杂质，这种清除剂包括其上具有活性清除物质的多孔高表面积惰性载体，其通过沉积在载体上而形成的IA族金属并在所述载体上在选定的升高温度下进行热解。另一方面，本发明涉及一种制备清除剂的方法，其用于净化工艺气流，从中除去水，氧和其它氧化剂和路易斯酸杂质，以及净化工艺气流以除去水，氧气的方法，和其它氧化剂和路易斯酸杂质，这种方法包括使含杂质的工艺气体流与上述一般类型的清除剂接触。在另一方面，本发明涉及一种使用上述一般类型的清除剂作为反向扩散洗涤器的方法，用于保护制造过程或气体供应系统不会意外引入杂质，这种方法包括使含杂质的工艺气体流与上述一般类型的清除剂并在清除床中提供一个或多个端点检测器，从而观察到反向扩散事件。

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