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1. 发明授权

US4914742A Thin film orthogonal microsensor for air flow and method 失效
标题翻译：用于空气流动的薄膜正交微传感器和方法
公开(公告)号：US4914742A
公开(公告)日：1990-04-03
申请号：US129204
申请日：1987-12-07
申请人： Robert E. Higashi , James O. Holmen , Steven D. James , Robert G. Johnson , Jeffrey A. Ridley
发明人： Robert E. Higashi , James O. Holmen , Steven D. James , Robert G. Johnson , Jeffrey A. Ridley
IPC分类号： G01P5/12 , B81B3/00 , B81C1/00 , G01F1/68 , G01F1/684 , G01F1/692 , H01L21/308
CPC分类号： G01F1/6845 , H01L21/308 , H01H2001/0089 , Y10T428/12528
摘要： A microbridge air flow sensor which has a sealed etched cavity beneath the silicon nitride diaphragm so that the cavity is not susceptible to contamination from residual films or other material accumulating within the cavity. The cavity thermally isolates the heater and detectors which are encapsulated in the diaphragm. The cavity is fabricated by front side etching of the silicon wafer. Narrow slots are made through the silicon nitride diaphragm to expose a thin film (400 angstrom) rectangle of aluminum. A first etch removes the aluminum leaving a 400 angstrom very shallow cavity under the diaphragm. Anisotropic etch is then introduced into the shallow cavity to etch the silicon pit.

2. 发明授权

US4784721A Integrated thin-film diaphragm; backside etch 失效
标题翻译：集成薄膜隔膜; 背面蚀刻
公开(公告)号：US4784721A
公开(公告)日：1988-11-15
申请号：US158824
申请日：1988-02-22
申请人： James O. Holmen , Steven D. James , Jeffrey A. Ridley
发明人： James O. Holmen , Steven D. James , Jeffrey A. Ridley
IPC分类号： G01F1/684 , H01L21/306 , H01L29/84 , B44C1/22 , C03C15/00 , C23F1/00
CPC分类号： H01L21/30608 , G01F1/6845 , Y10T29/49103
摘要： A microbridge air flow sensor having a silicon nitride diaphragm formed on the surface of a single crystal silicon wafer. A rectangular 500 angstrom thick sacrificial layer was deposited on the silicon surface before the silicon nitride to define the exact position of the diaphragm. A series of etches from the backside of the wafer is performed to fabricate the device. A first silicon anisotropic etch from the backside is stopped at the sacrificial layer. A sacrificial layer selective etch is applied from the backside first pit to the sacrificial layer to remove all of the rectangular sacrificial layer. Anisotropic etch is again applied into the space created by the removed sacrificial layer whereby the second etch attacks the silicon exposed by the removal of the sacrificial layer and etches downward forming a second anisotropic etch pit. Thus all the etches are from the backside of the silicon wafer.
摘要翻译：具有形成在单晶硅晶片的表面上的氮化硅膜的微桥空气流量传感器。在氮化硅之前在硅表面上沉积矩形的500埃厚的牺牲层以限定隔膜的确切位置。进行从晶片背面的一系列蚀刻以制造该器件。在牺牲层处停止来自背面的第一硅各向异性蚀刻。从背面的第一凹坑施加牺牲层选择性蚀刻到牺牲层以去除所有的矩形牺牲层。各向异性蚀刻再次施加到由去除的牺牲层产生的空间中，由此第二蚀刻攻击通过去除牺牲层而暴露的硅，并向下蚀刻形成第二各向异性蚀刻坑。因此，所有的蚀刻都来自硅晶片的背面。

3. 发明授权

US4895616A Method for making thin film orthogonal microsensor for air flow 失效
标题翻译：制造薄膜正交微传感器用于气流的方法
公开(公告)号：US4895616A
公开(公告)日：1990-01-23
申请号：US342010
申请日：1989-04-24
申请人： Robert E. Higashi , James O. Holmen , Steven D. James , Robert G. Johnson , Jeffrey A. Ridley
发明人： Robert E. Higashi , James O. Holmen , Steven D. James , Robert G. Johnson , Jeffrey A. Ridley
IPC分类号： G01F1/684 , H01L21/308
CPC分类号： G01F1/6845 , H01L21/308 , H01H2001/0089
摘要： A microbridge air flow sensor which has a sealed etched cavity beneath the silicon nitride diaphragm so that the cavity is not susceptible to contamination from residual films or other material accumulating within the cavity. The cavity thermally isolates the heater and detectors which are encapsulated in the diaphragm. The cavity is fabricated by front side etching of the silicon wafer. Narrow slots are made through the silicon nitride diaphragm to expose a thin film (400 angstrom) rectangle of aluminum. A first etch removes the aluminum leaving a 400 angstrom very shallow cavity under the diaphragm. Anisotropic etch is then introduced into the shallow cavity to etch the silicon pit.
摘要翻译：一种微桥空气流量传感器，其在氮化硅隔膜下方具有密封的蚀刻腔，使得空腔不容易受到残留膜或积聚在空腔内的其他材料的污染。腔体热隔离了封装在隔膜中的加热器和检测器。通过硅晶片的正面蚀刻来制造空腔。窄槽通过氮化硅膜制成，以露出铝的薄膜（400埃）矩形。第一次蚀刻除去在隔膜下方留下400埃非常浅的空腔的铝。然后将各向异性蚀刻引入浅空腔中以蚀刻硅凹坑。

4. 发明授权

US4956793A Method and apparatus for measuring the density of fluids 失效
标题翻译：测量流体密度的方法和装置
公开(公告)号：US4956793A
公开(公告)日：1990-09-11
申请号：US211014
申请日：1988-06-24
申请人： Ulrich Bonne , Steven D. James
发明人： Ulrich Bonne , Steven D. James
IPC分类号： G01N9/00 , G01N9/04 , G01N25/18 , G01N25/20
CPC分类号： G01N9/04 , G01N25/18
摘要： The specific gravity, l, of a fluid of interest is determined based on thermal conductivity, k, and specific heat, c.sub.p, of the fluid of interest. An embodiment uses proximately positioned resistive heater and thermal sensor elements coupled by the fluid of interest. Pulses of electrical energy are applied to the heater of a level and duration such that both a transient change and a substantially steady-state temperature occur in the sensor. The k of the fluid of interest is determined based upon sensor output at steady-state elevated temperature, c.sub.p of the fluid of interest is determined based upon the rate of change of sensor output during a time interval of transient temperature change in the sensor, and l is determined from k and c.sub.p.

5. 发明授权

US5857459A Boxless measurement of thoracic gas volume 失效
标题翻译：无胸腔测量胸腔积气量
公开(公告)号：US5857459A
公开(公告)日：1999-01-12
申请号：US800655
申请日：1997-02-04
申请人： Michael G. Snow , Steven D. James
发明人： Michael G. Snow , Steven D. James
IPC分类号： A61B5/08 , A61B5/091 , A61M16/00
CPC分类号： A61B5/091 , A61B5/0809
摘要： A portable apparatus for measuring the thoracic lung volume of a patient without enclosing the patient in a sealed chamber, comprising first and second impedance belts, a flow meter, shutter and a microprocessor-based controller. The flow meter includes pressure transducers for measuring the change in volume and pressure as the patient respires therethrough. The change in thoracic cage volume of the patient's lungs is directly correlated with the change of impedance in the belts. The thoracic lung volume is then determined from a measured barometric pressure, the measured change in pressure and the measured volume change in the thoracic cage volume utilizing a correction factor to determine the thoracic cage volume.
摘要翻译：一种便携式装置，用于测量患者的胸腔肺容积，而不将患者包围在密封室中，包括第一和第二阻抗带，流量计，快门和基于微处理器的控制器。流量计包括用于测量患者通过其呼吸的体积和压力变化的压力传感器。患者肺部胸笼体积变化与皮带阻抗变化直接相关。然后从测量的大气压力，测量的压力变化和胸腔笼体积中测量的体积变化利用校正因子来确定胸腔笼体积来确定胸肺体积。

6. 发明授权

US5676131A System for protecting sample line in respiratory gas analyzer 失效
标题翻译：用于保护呼吸气体分析仪中样品管线的系统
公开(公告)号：US5676131A
公开(公告)日：1997-10-14
申请号：US678347
申请日：1996-07-11
申请人： David M. Anderson , Steven D. James , Thor A. Larson
发明人： David M. Anderson , Steven D. James , Thor A. Larson
IPC分类号： A61B5/083 , A61M16/00
CPC分类号： A61B5/083 , A61M2230/43
摘要： A method and apparatus is described for preventing contamination of a gas analyzer of respiratory gas exchange analyzing equipment due to a patient's saliva. The method involves determining a resistance value of the inspired respiratory gas flow in a sample line leading to the gas analyzer. This is determined by calculating the absolute pressure in the line at the gas analyzer. The pressure difference from atmospheric pressure is then divided by the sample flow rate to obtain a resistance value. A microprocessor in the equipment compares the calculated resistance of the flow with a previously stored reference threshold resistance. If the calculated resistance exceeds the predetermined threshold, the microprocessor sends a signal to a vacuum pump used to draw the respiratory gases through the gas analyzer. The vacuum pump is immediately shut down when the calculated resistance exceeds the predetermined resistance threshold and, hence, any saliva in the sample line is not drawn into the gas analyzer.
摘要翻译：描述了一种用于防止由于患者唾液引起的呼吸气体交换分析设备的气体分析仪的污染的方法和装置。该方法包括确定通向气体分析器的样品管线中受启发的呼吸气体流量的电阻值。这是通过计算气体分析仪中的管线中的绝对压力来确定的。然后将与大气压力的压力差除以样品流量以获得电阻值。设备中的微处理器将流量的计算电阻与先前存储的参考阈值电阻进行比较。如果计算的电阻超过预定阈值，则微处理器将信号发送到用于通过气体分析仪吸入呼吸气体的真空泵。当计算的电阻超过预定电阻阈值时，真空泵立即关闭，因此，样品管线中的任何唾液都不会吸入气体分析仪。

7. 发明授权

US06631638B2 Fluid flow sensor 有权
标题翻译：流体流量传感器
公开(公告)号：US06631638B2
公开(公告)日：2003-10-14
申请号：US09772677
申请日：2001-01-30
申请人： Steven D. James , William G. Kunik
发明人： Steven D. James , William G. Kunik
IPC分类号： B01F168
CPC分类号： G01P13/02 , G01F1/6845 , G01P5/12
摘要： A flow sensor for determining the velocity and direction of a fluid flow including a substrate, a heat source located on the substrate, and a first and a second heat sensor located on the substrate to detect at least a portion of heat generated by the heat source. The first and second heat sensors and the heat source are arranged in a non-linear orientation.
摘要翻译：一种用于确定流体流的速度和方向的流量传感器，包括基板，位于基板上的热源，以及位于基板上的第一和第二热传感器，用于检测由热源产生的热量的至少一部分。第一和第二热传感器和热源以非线性方向排列

8. 发明授权

US4682503A Microscopic size, thermal conductivity type, air or gas absolute pressure sensor 失效
标题翻译：显微镜尺寸，导热型，空气或气体绝对压力传感器
公开(公告)号：US4682503A
公开(公告)日：1987-07-28
申请号：US863892
申请日：1986-05-16
申请人： Robert E. Higashi , Steven D. James , Robert G. Johnson , Ernest A. Satren
发明人： Robert E. Higashi , Steven D. James , Robert G. Johnson , Ernest A. Satren
IPC分类号： G01L11/00 , G01L21/12 , G01N27/18
CPC分类号： G01L11/002 , G01L21/12 , G01N27/18
摘要： A microscopic size absolute pressure sensor for air or gas of the thermal conductivity type, a silicon nitride covered silicon microchip has an elongated V-groove anisotropically etched in the silicon with a heated silicon nitride bridge element extending over the surface of the V-groove.
摘要翻译：用于导热类型的空气或气体的微尺寸绝对压力传感器，氮化硅覆盖硅微芯片具有在硅中各向异性蚀刻的细长V形槽，其中加热的氮化硅桥接元件在V形槽的表面上延伸。

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