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    • 1. 发明授权
    • Single-chip two-axis magnetic field sensor
    • 单芯片双轴磁场传感器
    • US09575143B2
    • 2017-02-21
    • US14110106
    • 2012-05-23
    • James Geza DeakInsik JinWeifeng ShenXiaofeng LeiSongsheng Xue
    • James Geza DeakInsik JinWeifeng ShenXiaofeng LeiSongsheng Xue
    • G01R33/09
    • G01R33/098
    • The present invention discloses a design for a single-chip dual-axis magnetic field sensor, based on magnetic tunnel junction (MTJ) elements and permanent magnets integrated on a semiconductor substrate to produce two types of sensor bridges that detect orthogonal magnetic field components. The orthogonal magnetic field component detection capability results from the different types of sensor bridges that can be produced by varying the shape of the MTJ elements and the bias fields that can be created by permanent magnets. Because the permanent magnets can create orthogonal bias fields on the different sensor bridges, it is possible to use a single pinned layer to set direction for both sensor bridges. This is advantageous because it permits the two-axis sensor to be fabricated on a single semiconductor chip without the need for specialized processing technology such as local heating, or deposition of multiple magnetoresistive films with different pinned layers setting directions.
    • 本发明公开了一种基于磁性隧道结(MTJ)元件和集成在半导体衬底上的永磁体的单芯片双轴磁场传感器的设计,以产生检测正交磁场分量的两种传感器桥。 正交磁场分量检测能力来自可以通过改变MTJ元件的形状和由永磁体产生的偏置场来产生的不同类型的传感器桥。 因为永磁体可以在不同传感器桥上产生正交偏置场,所以可以使用单个固定层来设置两个传感器桥的方向。 这是有利的,因为它允许在单个半导体芯片上制造双轴传感器,而不需要诸如局部加热或具有不同钉扎层设置方向的多个磁阻膜的沉积等专门的处理技术。
    • 8. 发明申请
    • SINGLE-CHIP TWO-AXIS MAGNETIC FIELD SENSOR
    • 单芯片双轴磁场传感器
    • US20140035573A1
    • 2014-02-06
    • US14110106
    • 2012-05-23
    • James Geza DeakInsik JinWeifeng ShenXiaofeng LeiSongsheng Xue
    • James Geza DeakInsik JinWeifeng ShenXiaofeng LeiSongsheng Xue
    • G01R33/09
    • G01R33/098
    • The present invention discloses a design for a single-chip dual-axis magnetic field sensor, based on magnetic tunnel junction (MTJ) elements and permanent magnets integrated on a semiconductor substrate to produce two types of sensor bridges that detect orthogonal magnetic field components. The orthogonal magnetic field component detection capability results from the different types of sensor bridges that can be produced by varying the shape of the MTJ elements and the bias fields that can be created by permanent magnets. Because the permanent magnets can create orthogonal bias fields on the different sensor bridges, it is possible to use a single pinned layer to set direction for both sensor bridges. This is advantageous because it permits the two-axis sensor to be fabricated on a single semiconductor chip without the need for specialized processing technology such as local heating, or deposition of multiple magnetoresistive films with different pinned layers setting directions.
    • 本发明公开了一种基于磁性隧道结(MTJ)元件和集成在半导体衬底上的永磁体的单芯片双轴磁场传感器的设计,以产生检测正交磁场分量的两种传感器桥。 正交磁场分量检测能力来自可以通过改变MTJ元件的形状和由永磁体产生的偏置场来产生的不同类型的传感器桥。 因为永磁体可以在不同传感器桥上产生正交偏置场,所以可以使用单个固定层来设置两个传感器桥的方向。 这是有利的,因为它允许在单个半导体芯片上制造双轴传感器,而不需要诸如局部加热或具有不同钉扎层设置方向的多个磁阻膜的沉积等专门的处理技术。