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    • 1. 发明授权
    • Shape measurement apparatus and method
    • 形状测量装置及方法
    • US08279448B2
    • 2012-10-02
    • US12676245
    • 2008-08-19
    • Jae-wan KimTae-bong EomJong-ahn KimChu-shik Kang
    • Jae-wan KimTae-bong EomJong-ahn KimChu-shik Kang
    • G01B11/02H01S3/13
    • G01B11/2441
    • A shape measurement apparatus and method using a laser interferometer are disclosed. The shape measurement apparatus includes a plurality of laser devices, which generate beams, emit a beam of a specific frequency from among the generated beams, and output interference signals for detecting wavelengths of the generated beams, and a controller for detecting the wavelengths of the generated beams from the outputted interference signals, and controlling the laser devices on the basis of the detected wavelengths. The optical unit projects the beam of the laser device on a target object, and generates an interference pattern of the object. Several shutters are closed and opened. If the shutters are closed, they prevent the beam of each laser device to be projected on the optical unit. An image pickup unit captures the interference pattern.
    • 公开了一种使用激光干涉仪的形状测量装置和方法。 形状测量装置包括多个激光装置,其产生光束,从所生成的光束中发射特定频率的光束,并输出用于检测所生成的光束的波长的干涉信号;以及控制器,用于检测所产生的光束的波长 来自所输出的干扰信号的光束,并且基于检测到的波长来控制激光器件。 光学单元将激光装置的光束投射在目标物体上,并产生物体的干涉图案。 几个百叶窗关闭并打开。 如果快门关闭,则可以防止每个激光装置的光束投射到光学单元上。 摄像单元捕获干涉图案。
    • 2. 发明申请
    • SHAPE MEASUREMENT APPARATUS AND METHOD
    • 形状测量装置和方法
    • US20100182614A1
    • 2010-07-22
    • US12676245
    • 2008-08-19
    • Jae-wan KimTae-bong EomJong-ahn KimChu-shik Kang
    • Jae-wan KimTae-bong EomJong-ahn KimChu-shik Kang
    • G01B11/24
    • G01B11/2441
    • A shape measurement apparatus and method using a laser interferometer are disclosed. The shape measurement apparatus includes a plurality of laser devices, which generate beams, emit a beam of a specific frequency from among the generated beams, and output interference signals for detecting wavelengths of the generated beams, and a controller for detecting the wavelengths of the generated beams from the outputted interference signals, and controlling the laser devices on the basis of the detected wavelengths. The optical unit projects the beam of the laser device on a target object, and generates an interference pattern of the object. Several shutters are closed and opened. If the shutters are closed, they prevent the beam of each laser device to be projected on the optical unit. An image pickup unit captures the interference pattern.
    • 公开了一种使用激光干涉仪的形状测量装置和方法。 形状测量装置包括多个激光装置,其产生光束,从所生成的光束中发射特定频率的光束,并输出用于检测所生成的光束的波长的干涉信号;以及控制器,用于检测所产生的光束的波长 来自所输出的干扰信号的光束,并且基于检测到的波长来控制激光器件。 光学单元将激光装置的光束投射在目标物体上,并产生物体的干涉图案。 几个百叶窗关闭并打开。 如果快门关闭,则可以防止每个激光装置的光束投射到光学单元上。 摄像单元捕获干涉图案。