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    • 3. 发明申请
    • METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT DEVICE
    • 制造集成电路设备的方法
    • US20120178234A1
    • 2012-07-12
    • US13324035
    • 2011-12-13
    • Young-Ho LEEKeon-Soo KimSeong-Soon ChoJin-Hyun Shin
    • Young-Ho LEEKeon-Soo KimSeong-Soon ChoJin-Hyun Shin
    • H01L21/8239
    • H01L27/0629H01L27/11531H01L28/20
    • In an integrated circuit device and method of manufacturing the same, a resistor pattern is positioned on a device isolation layer of a substrate. The resistor pattern includes a resistor body positioned in a recess portion of the device isolation layer and a connector making contact with the resistor body and positioned on the device isolation layer around the recess portion. The connector has a metal silicide pattern having electric resistance lower than that of the resistor body at an upper portion. A gate pattern is positioned on the active region of the substrate and includes the metal silicide pattern at an upper portion. A resistor interconnection is provided to make contact with the connector of the resistor pattern. A contact resistance between the connector and the resistor interconnection is reduced.
    • 在集成电路器件及其制造方法中,电阻器图案位于衬底的器件隔离层上。 电阻器图案包括位于器件隔离层的凹部中的电阻体,以及与电阻体接触并连接在凹部的周围的器件隔离层上的连接器。 连接器具有在上部具有低于电阻体的电阻的金属硅化物图案。 栅极图案位于衬底的有源区上,并且在上部包括金属硅化物图案。 提供电阻器互连以与电阻器图案的连接器接触。 连接器和电阻器互连之间的接触电阻降低。
    • 4. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
    • 半导体器件及其制造方法
    • US20080224212A1
    • 2008-09-18
    • US11965559
    • 2007-12-27
    • Young-Ho LEEDong-Sun SheenSeok-Pyo Song
    • Young-Ho LEEDong-Sun SheenSeok-Pyo Song
    • H01L29/78H01L21/336
    • H01L29/6659H01L29/6653H01L29/6656H01L29/66628H01L29/7833
    • A method for fabricating a semiconductor device is provided. A first insulation layer and a second insulation layer are formed over the substrate having a gate. A spacer etching process is performed to form an etched first insulation layer and an etched second insulation layer. The etched first insulation layer partially protrudes from the substrate and contacts sidewalls of the gate. The etched second insulation layer is removed through a selective epitaxial growth (SEG) process that forms an epitaxial layer over the exposed substrate. One of facets of the epitaxial layer is formed on the protruding portion of the etched first insulation layer. A third insulation layer is formed on sidewalls of the etched first insulation layer and the one of the facets of the epitaxial layer is covered by the third insulation layer.
    • 提供一种制造半导体器件的方法。 在具有栅极的基板上形成第一绝缘层和第二绝缘层。 执行间隔蚀刻工艺以形成蚀刻的第一绝缘层和蚀刻的第二绝缘层。 蚀刻的第一绝缘层从衬底部分地突出并接触栅极的侧壁。 蚀刻的第二绝缘层通过选择性外延生长(SEG)工艺去除,该工艺在暴露的衬底上形成外延层。 在蚀刻的第一绝缘层的突出部分上形成外延层的一个面。 第三绝缘层形成在蚀刻的第一绝缘层的侧壁上,并且外延层的一个面被第三绝缘层覆盖。