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    • 1. 发明授权
    • Test handler
    • 测试处理程序
    • US06844717B2
    • 2005-01-18
    • US09975861
    • 2001-10-12
    • Jae-Gyun ShimSeung-Won JeonYun-Sung NaIn-Gu Jeon
    • Jae-Gyun ShimSeung-Won JeonYun-Sung NaIn-Gu Jeon
    • G01R31/28H01L21/00H01L21/677G01R31/26
    • H01L21/67236G01R31/2887G01R31/2893H01L21/67242H01L21/67778
    • The present invention discloses a test handler comprising a main body, a stocker including a user tray supplier and a user tray deliverer for loading plurality of user trays carrying the semiconductor device during devices tests, a plurality of test trays, a device loading means for transferring the devices in the user tray of the user tray supplier to the test tray, a first tray inverter changing the horizontal posture of the test tray, a soak chamber preparing a desired test temperature condition, a test chamber accomplishing tests, a de-soak chamber restoring the devices temperature, a second tray inverter inverting to the test tray of a horizontal posture, a device unloading means transferring the semiconductor devices on the test tray. The present invention can double the lot size in unit operation to improve equipment operation ratio. In more, the device loading time and unloading can be reduced so that the number of the devices treated in unit operation can be increased.
    • 本发明公开了一种测试处理器,包括主体,包括用户托盘供应器的储料器和用于在设备测试期间装载携带半导体器件的多个用户托盘的用户托盘输送器,多个测试托盘,用于传送的设备加载装置 用户托盘的用户托盘中的设备供应到测试托盘,第一托盘变换器改变测试托盘的水平姿势,准备所需测试温度条件的浸泡室,完成测试的测试室,脱泡室 恢复设备温度,第二托盘变换器反转到水平姿态的测试托盘,装置卸载装置将半导体器件传送到测试托盘上。 本发明可以使单位操作中的批量增加一倍,以提高设备运行率。 此外,可以减少装置加载时间和卸载,从而可以增加在单元操作中处理的装置的数量。