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    • 5. 发明申请
    • Source for Inorganic Layer and Method for Controlling Heating Source Thereof
    • 无机层来源及其加热源控制方法
    • US20110151106A1
    • 2011-06-23
    • US13037150
    • 2011-02-28
    • Min Jae JeongDo Geun KimYoung Mook Choi
    • Min Jae JeongDo Geun KimYoung Mook Choi
    • C23C16/52
    • C23C14/243C23C14/545
    • A deposition source for an inorganic layer and a method for controlling a heating source thereof capable of improving a deposition efficiency, preventing condensation of a nozzle, and/or precisely controlling the temperature by minimizing the time that is needed to reach a stabilization of a deposition rate. The deposition source includes: a heating unit including a heating source for applying heat to a crucible; a housing for isolating the heat emitted from the heating unit; an outer wall for anchoring the crucible; and a nozzle unit for spraying the deposition materials evaporated from the crucible. The heating unit includes a first unit and a second unit. The crucible is positioned between the first unit and the second unit, and the heating unit includes a first power source for supplying electric power to the first unit and a second power source for supplying electric power to the second unit.
    • 一种用于无机层的沉积源及其控制加热源的方法,其能够通过最小化达到沉积稳定所需的时间来提高沉积效率,防止喷嘴冷凝和/或精确地控制温度 率。 沉积源包括:加热单元,其包括用于向坩埚施加热量的加热源; 用于隔离从加热单元发出的热量的壳体; 用于锚定坩埚的外壁; 以及用于喷射从坩埚蒸发的沉积材料的喷嘴单元。 加热单元包括第一单元和第二单元。 坩埚位于第一单元和第二单元之间,并且加热单元包括用于向第一单元供电的第一电源和用于向第二单元供电的第二电源。
    • 6. 发明授权
    • Linear type deposition source
    • 线型沉积源
    • US07905961B2
    • 2011-03-15
    • US11515388
    • 2006-08-31
    • Min Jae JeongDo Geun KimHee Cheol Kang
    • Min Jae JeongDo Geun KimHee Cheol Kang
    • C23C16/00
    • C23C14/243
    • A linear type deposition source capable of improving a heating efficiency and reducing a heating temperature by using a plate-type heating source and/or improving a cooling efficiency by including a cooling jacket having a cooling water line in a housing. The linear type deposition source includes: a crucible arranged in a deposition chamber, the crucible being for evaporating materials included in the crucible; a heating source for applying heat to the crucible; a housing for isolating the heat emitted from the heating source; an outer wall for anchoring the crucible; and a nozzle unit for spraying the materials evaporated from the crucible. In this deposition source, the heating source is a plate-type heating source, and the housing has a cooling water line so cooling water can flow through the cooling water line.
    • 一种能够通过使用板式加热源来提高加热效率和降低加热温度的线性型沉积源和/或通过在壳体中具有冷却水管线的冷却套来提高冷却效率。 线性型沉积源包括:坩埚,布置在沉积室中,该坩埚用于蒸发包含在坩埚中的材料; 用于向坩埚施加热量的加热源; 用于隔离从所述加热源发出的热量的壳体; 用于锚定坩埚的外壁; 以及用于喷射从坩埚蒸发的材料的喷嘴单元。 在该沉积源中,加热源是板式加热源,壳体具有冷却水管线,因此冷却水可以流过冷却水管线。
    • 8. 发明申请
    • Source for inorganic layer and method for controlling heating source thereof
    • 无机层来源及其加热源的控制方法
    • US20070077357A1
    • 2007-04-05
    • US11514318
    • 2006-08-30
    • Min Jae JeongDo Geun KimYoung Mook Choi
    • Min Jae JeongDo Geun KimYoung Mook Choi
    • C23C16/00
    • C23C14/243C23C14/545
    • A deposition source for an inorganic layer and a method for controlling a heating source thereof capable of improving a deposition efficiency, preventing condensation of a nozzle, and/or precisely controlling the temperature by minimizing the time that is needed to reach a stabilization of a deposition rate. The deposition source includes: a heating unit including a heating source for applying heat to a crucible; a housing for isolating the heat emitted from the heating unit; an outer wall for anchoring the crucible; and a nozzle unit for spraying the deposition materials evaporated from the crucible. The heating unit includes a first unit and a second unit. The crucible is positioned between the first unit and the second unit, and the heating unit includes a first power source for supplying electric power to the first unit and a second power source for supplying electric power to the second unit.
    • 一种用于无机层的沉积源及其控制加热源的方法,其能够通过最小化达到沉积稳定所需的时间来提高沉积效率,防止喷嘴冷凝和/或精确地控制温度 率。 沉积源包括:加热单元,其包括用于向坩埚施加热量的加热源; 用于隔离从加热单元发出的热量的壳体; 用于锚定坩埚的外壁; 以及用于喷射从坩埚蒸发的沉积材料的喷嘴单元。 加热单元包括第一单元和第二单元。 坩埚位于第一单元和第二单元之间,并且加热单元包括用于向第一单元供电的第一电源和用于向第二单元供电的第二电源。
    • 9. 发明授权
    • Vapor deposition source and vapor deposition apparatus having the same
    • 蒸气沉积源及其蒸镀装置
    • US07914621B2
    • 2011-03-29
    • US11342681
    • 2006-01-31
    • Do Geun KimMyung Soo HuhSeok Heon JeongHee Cheol KangKazuo Furuno
    • Do Geun KimMyung Soo HuhSeok Heon JeongHee Cheol KangKazuo Furuno
    • C23C16/00
    • C23C14/243C23C14/24
    • A vapor deposition source has a reduced size by disposing a crucible, a heating portion, and a nozzle portion in one defined space. A vapor deposition apparatus deposits deposition materials on a substrate using the vapor deposition source. The vapor deposition source includes a housing, and the crucible is mounted in the housing for vaporizing the deposition materials. The heating portion is installed adjacent to the crucible in the housing for heating the crucible. The nozzle portion injects the vaporized deposition materials into a substrate disposed at an exterior of the housing through an injection nozzle. The vapor deposition source is manufactured in a smaller and lightweight form in comparison with conventional vapor deposition sources in which a crucible and a nozzle portion are arranged in different spaces. The diameter and number of injection nozzles of the invention are restricted to block radiant heat discharged from the vapor deposition source, so that deposition materials are uniformly deposited. Furthermore, the output power of a conveyer for conveying the vapor deposition source is reduced. In addition, a plurality of vapor deposition sources is arranged in a line to perform concentrated deposition of deposition materials so that quality of the resultant product is improved.
    • 气相沉积源通过在一个限定的空间内设置坩埚,加热部分和喷嘴部分而具有减小的尺寸。 气相沉积设备使用蒸镀源将沉积材料沉积在基板上。 气相沉积源包括壳体,并且坩埚安装在壳体中以使沉积材料蒸发。 加热部分安装在坩埚附近,用于加热坩埚。 喷嘴部分通过注射喷嘴将蒸发的沉积材料注入设置在外壳外部的基板中。 与其中坩埚和喷嘴部分布置在不同空间中的常规气相沉积源相比,气相沉积源以更小和轻质的形式制造。 本发明的注射喷嘴的直径和数量被限制为阻挡从蒸镀源排出的辐射热,从而均匀地沉积沉积材料。 此外,用于输送气相沉积源的输送机的输出功率降低。 此外,多个气相沉积源被排列成一行,以进行沉积材料的浓缩沉积,从而提高所得产品的质量。
    • 10. 发明授权
    • Film tray for fabricating flexible display
    • 用于制造柔性显示器的胶片托盘
    • US07834451B2
    • 2010-11-16
    • US11512649
    • 2006-08-29
    • Kyu Sung LeeDo Geun KimKwan Seop SongHee Cheol Kang
    • Kyu Sung LeeDo Geun KimKwan Seop SongHee Cheol Kang
    • H01L23/34
    • C23C14/50C23C14/042H01L51/0008H01L51/0097H01L51/56H01L2251/5338
    • A film tray for fabricating a flexible display, the film tray preventing a flexible substrate or film from sagging. The film tray includes a support plate and at least one pair of clamps, each clamp of the at least one pair of clamps located along an opposite edge of the support plate to fix a flexible film. A first clamp of the at least one pair clamps is aligned with a second clamp of the least one pair of clamps. Each clamp includes an open-shut part adapted to be opened to receive the flexible substrate or film and adapted to be shut to fix the flexible substrate or film and a support part separated from the open-shut part by a predetermined space to support the flexible substrate or film at a predetermined level when the open-shut part is closed.
    • 一种用于制造柔性显示器的胶片托盘,该胶片托盘防止柔性基底或胶片下垂。 薄膜托盘包括支撑板和至少一对夹具,所述至少一对夹具的每个夹具沿着支撑板的相对边缘设置以固定柔性膜。 至少一对夹具的第一夹具与至少一对夹具的第二夹具对齐。 每个夹具包括适于打开以接收柔性基底或膜并且适于关闭以将柔性基底或膜固定的开闭部分和与开闭部分隔开预定空间的支撑部分,以支撑柔性基底 基板或薄膜在开闭部分闭合时处于预定水平。