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    • 5. 发明授权
    • Electron gun abnormality detecting device and electron gun abnormality detecting method
    • 电子枪异常检测装置和电子枪异常检测方法
    • US09304078B2
    • 2016-04-05
    • US14431221
    • 2013-09-25
    • JFE STEEL CORPORATION
    • Tomohiko ItoJunichi YotsujiShigehiro TakajoHiroi YamaguchiKazuhiro HanazawaYasunari Koga
    • G01J4/00G01N21/21G01R33/032H01J29/48
    • G01N21/21G01N2201/062G01R33/032H01J29/48
    • An electron gun abnormality detecting device for detecting an abnormality in first and second electron guns of a magnetic domain refining device for an electrical steel sheet includes: a magnetooptic element configured to contact with and separate from an inspection region set to include a boundary between a magnetic domain discontinuity generated by irradiation of a surface of the electrical steel sheet with an electron beam by the first electron gun and a magnetic domain discontinuity generated by irradiation thereof with an electron beam by the second electron gun, and configured to detect a steel sheet magnetic domain structure in the inspection region as an optical property; a light source configured to irradiate the magnetooptic element with linearly polarized light; and a detector configured to detect polarized light rotated by the steel sheet magnetic domain structure transferred to the magnetooptic element.
    • 一种用于检测用于电工钢板的磁畴精炼装置的第一和第二电子枪的异常的电子枪异常检测装置包括:磁光元件,其被配置为与检查区域接触并分离,所述检查区域被设置为包括磁性 通过第一电子枪用电子束照射电工钢板的表面产生的畴不连续性,以及通过用第二电子枪用电子束照射产生的磁畴不连续性,并且构造成检测钢板磁畴 检查区域的结构为光学性质; 光源,被配置为用线性偏振光照射所述磁光元件; 以及检测器,被配置为检测由转移到磁光元件的钢板磁畴结构旋转的偏振光。