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1. 发明申请

US20100294922A1 Automated calibration methodology for VUV metrology system 有权
标题翻译： VUV测量系统的自动校准方法
公开(公告)号：US20100294922A1
公开(公告)日：2010-11-25
申请号：US12454837
申请日：2009-05-22
申请人： JEFFREY B. HURST , MATTHEW WELDON , PHILLIP WALSH , CRISTIAN RIVAS , DALE A. HARRISON
发明人： JEFFREY B. HURST , MATTHEW WELDON , PHILLIP WALSH , CRISTIAN RIVAS , DALE A. HARRISON
IPC分类号： G12B13/00
CPC分类号： G01N21/278 , G01N2021/335
摘要： A calibration pad having multiple calibration sites is provided. A particular calibration site may be utilized until that particular site has been determined to have become unacceptable for further use, for example from contamination, in which case the calibration processes may then move to use a different calibration site(s) on the calibration pad(s). A variety of techniques may be utilized to provide the determination that a site is no longer acceptable for use. Movement may thus occur over time from site to site for use in a calibration process. A variety of criteria may be established to determine when to move to another site. Though the designation of a site as “bad” may be based upon measured reflectance data, other criteria may also be used. For example, the number of times a site has been exposed to light may be the criteria for designating a site as bad. Alternatively the cumulative exposure of a site may be the criteria. Further, the plurality of calibration sites that are provided on the single calibration pad may be pre-evaluated so as to initially screen out unacceptable calibration sites prior to use. The techniques provided may be utilized in calibration processes which utilize a single calibration sample or processes which require a plurality of calibration samples.
摘要翻译：提供具有多个校准位置的校准垫。可以使用特定的校准位点，直到该特定位点被确定为不可接受以进一步使用，例如来自污染，在这种情况下，校准过程然后可以移动到在校准垫上使用不同的校准位点 s）。可以使用各种技术来提供站点不再可接受使用的确定。因此，随着时间的推移，运动可能会在现场到现场进行，以用于校准过程。可以建立各种标准来确定何时移动到另一个站点。虽然将站点指定为“不良”可以基于测量的反射率数据，但是也可以使用其他标准。例如，站点暴露于光线的次数可能是指定站点不佳的标准。或者，站点的累积曝光可以是标准。此外，可以预先评估设置在单个校准垫上的多个校准位置，以便在使用之前最初屏蔽不可接受的校准位置。提供的技术可以用于利用单个校准样品或需要多个校准样品的过程的校准过程。

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