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1. 发明授权

US08456086B2 Microcavity plasma devices with non-uniform cross-section microcavities 有权
标题翻译：具有非均匀横截面微腔的微腔等离子体装置
公开(公告)号：US08456086B2
公开(公告)日：2013-06-04
申请号：US12682941
申请日：2008-10-27
申请人： J. Gary Eden , Sung-Jin Park , Kwang Soo , Andrew J. Price
发明人： J. Gary Eden , Sung-Jin Park , Kwang Soo , Andrew J. Price
IPC分类号： H01J17/49
CPC分类号： H01J11/18 , C25D11/12 , C25D11/26 , H01J9/241 , H01J61/82
摘要： An embodiment of the invention IS an array of microcavity plasma devices The array includes a first metal film electrode with a plurality of non-uniform cross-section microcavities therein that are encapsulated in oxide A second electrode is a thin metal foil encapsulated in oxide that is bonded to the first electrode A packaging layer contains gas or vapor in the non-uniform cross-section microcavities To make such device, photoresist is patterned to encapsulate the anodized foil or film except on a top surface at desired positions of microcavities A second anodization or electrochemical etching is conducted to form the non-uniform cross-section sidewall microcavities cavities After removing photoresist and metal oxide, a final anodization lines the walls of the microcavities with metal oxide and fully encapsulates the metal electrodes with metal oxide.
摘要翻译：本发明的实施例是微腔等离子体装置的阵列。阵列包括其中封装在氧化物中的多个非均匀横截面微腔的第一金属膜电极。第二电极是封装在氧化物中的薄金属箔，键合到第一电极包装层在不均匀的横截面微腔中包含气体或蒸汽。为了制造这种器件，将光致抗蚀剂图案化以将阳极氧化的箔或膜除外在微腔的所需位置处的顶表面上。第二阳极氧化或进行电化学蚀刻以形成不均匀的横截面侧壁微腔在去除光致抗蚀剂和金属氧化物之后，最终的阳极氧化用金属氧化物引导微腔的壁，并用金属氧化物完全封装金属电极。

2. 发明申请

US20110109224A1 MICROCAVITY PLASMA DEVICES WITH NON-UNIFORM CROSS-SECTION MICROCAVITIES 有权
标题翻译：具有非均匀性交叉显微镜的MICROCAVITY等离子体装置
公开(公告)号：US20110109224A1
公开(公告)日：2011-05-12
申请号：US12682941
申请日：2008-10-27
申请人： J. Gary Eden , Sung-Jin Park , Kwang Soo , Andrew J. Price
发明人： J. Gary Eden , Sung-Jin Park , Kwang Soo , Andrew J. Price
IPC分类号： H01J17/49 , H01J9/24
CPC分类号： H01J11/18 , C25D11/12 , C25D11/26 , H01J9/241 , H01J61/82
摘要： An embodiment of the invention IS an array of microcavity plasma devices The array includes a first metal film electrode with a plurality of non-uniform cross-section microcavities therein that are encapsulated in oxide A second electrode is a thin metal foil encapsulated in oxide that is bonded to the first electrode A packaging layer contains gas or vapor in the non-uniform cross-section microcavities To make such device, photoresist is patterned to encapsulate the anodized foil or film except on a top surface at desired positions of microcavities A second anodization or electrochemical etching is conducted to form the non-uniform cross-section sidewall microcavities cavities After removing photoresist and metal oxide, a final anodization lines the walls of the microcavities with metal oxide and fully encapsulates the metal electrodes with metal oxide
摘要翻译：本发明的实施例是微腔等离子体装置的阵列。阵列包括其中封装在氧化物中的多个非均匀横截面微腔的第一金属膜电极。第二电极是封装在氧化物中的薄金属箔，键合到第一电极包装层在不均匀的横截面微腔中包含气体或蒸汽。为了制造这种器件，将光致抗蚀剂图案化以将阳极氧化的箔或膜除外在微腔的所需位置处的顶表面上。第二阳极氧化或进行电化学蚀刻以形成不均匀的横截面侧壁微腔在除去光致抗蚀剂和金属氧化物之后，最后的阳极氧化用金属氧化物引导微腔的壁，并用金属氧化物完全封装金属电极

3. 发明授权

US08362699B2 Interwoven wire mesh microcavity plasma arrays 有权
标题翻译：交织丝网微腔等离子体阵列
公开(公告)号：US08362699B2
公开(公告)日：2013-01-29
申请号：US12682973
申请日：2008-10-27
申请人： J. Gary Eden , Sung-Jin Park , Andrew J. Price , Jason D. Readle , Clark J. Wagner
发明人： J. Gary Eden , Sung-Jin Park , Andrew J. Price , Jason D. Readle , Clark J. Wagner
IPC分类号： H01J17/49 , H01J9/00
CPC分类号： H01J17/49 , H01J61/06 , H01J61/305 , H01J61/52 , H01J61/82
摘要： Embodiments of the invention provide for large arrays of microcavity plasma devices that can be made inexpensively, and can produce large area but thin displays or lighting sources Interwoven metal wire mesh, such as interwoven Al mesh, consists of two sets of wires which are interwoven in such a way that the two wire sets cross each other, typically at πght angles (90 degrees) although other patterns are also available Fabrication is accomplished with a simple and inexpensive wet chemical etching process The wires in each set are spaced from one another such that the finished mesh forms an array of openings that can be, for example, square, rectangular or diamond-shaped The size of the openings or microcavities is a function of the diameter of the wires in the mesh and the spacing between the wires in the mesh used to form the array of microcavity plasma devices.
摘要翻译：本发明的实施例提供了可以廉价制造并且可以生产大面积但薄的显示器或照明源的微腔等离子体装置的大阵列。交织的金属丝网如交织的Al网由两组电线组成，尽管其他图案也是可用的，这两种线组彼此交叉的方式，通常是直角（90度）通过简单和便宜的湿式化学蚀刻工艺完成。每组中的导线彼此间隔开，使得完成的网格形成可以是例如正方形，矩形或菱形的开口阵列。开口或微腔的尺寸是网中线的直径和网中线之间的间距的函数用于形成微腔等离子体装置阵列。

4. 发明申请

US20110260609A1 INTERWOVEN WIRE MESH MICROCAVITY PLASMA ARRAYS 有权
标题翻译： INTERWOVEN网线微波等离子体阵列
公开(公告)号：US20110260609A1
公开(公告)日：2011-10-27
申请号：US12682973
申请日：2008-10-27
申请人： J. Gary Eden , Sung-Jin Park , Andrew J. Price , Jason D. Readle , Clark J. Wagner
发明人： J. Gary Eden , Sung-Jin Park , Andrew J. Price , Jason D. Readle , Clark J. Wagner
IPC分类号： H01J17/49 , C23C28/04 , B65B63/08 , C25D11/02
CPC分类号： H01J17/49 , H01J61/06 , H01J61/305 , H01J61/52 , H01J61/82
摘要： Embodiments of the invention provide for large arrays of microcavity plasma devices that can be made inexpensively, and can produce large area but thin displays or lighting sources Interwoven metal wire mesh, such as interwoven Al mesh, consists of two sets of wires which are interwoven in such a way that the two wire sets cross each other, typically at πght angles (90 degrees) although other patterns are also available Fabrication is accomplished with a simple and inexpensive wet chemical etching process The wires in each set are spaced from one another such that the finished mesh forms an array of openings that can be, for example, square, rectangular or diamond-shaped The size of the openings or microcavities is a function of the diameter of the wires in the mesh and the spacing between the wires in the mesh used to form the array of microcavity plasma devices.
摘要翻译：本发明的实施例提供了可以廉价制造并且可以生产大面积但薄的显示器或照明源的微腔等离子体装置的大阵列。交织的金属丝网如交织的Al网由两组电线组成，尽管其他图案也是可用的，这两种线组彼此交叉的方式，通常是直角（90度）通过简单和便宜的湿式化学蚀刻工艺完成。每组中的导线彼此间隔开，使得完成的网格形成可以是例如正方形，矩形或菱形的开口阵列。开口或微腔的尺寸是网中线的直径和网中线之间的间距的函数用于形成微腔等离子体装置阵列。

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