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1. 发明授权

US08689359B2 Apparatus and method for investigating surface properties of different materials 有权
标题翻译：用于研究不同材料表面性质的装置和方法
公开(公告)号：US08689359B2
公开(公告)日：2014-04-01
申请号：US12666745
申请日：2008-06-26
申请人： Ivo W. Rangelow , Tzvetan Ivanov , Burkhard Volland , Teodor Gotszalk , Miroslaw Woszczyna , Jerzy Mielczarski , Yanko Sarov
发明人： Ivo W. Rangelow , Tzvetan Ivanov , Burkhard Volland , Teodor Gotszalk , Miroslaw Woszczyna , Jerzy Mielczarski , Yanko Sarov
IPC分类号： G01Q20/04 , G01Q70/10 , G01Q60/26 , G01Q70/06 , G01Q70/12
CPC分类号： G01Q20/04 , G01Q10/045 , G01Q10/065 , G01Q60/26 , G01Q60/38 , G01Q70/06 , G01Q70/10 , G01Q70/12
摘要： The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.
摘要翻译：本发明涉及一种用于研究不同材料的表面性质的装置和方法，其使得可以以简化和更快的剪切力方法进行原子力显微镜。根据本发明的装置的特征在于相对于样品的表面垂直定向自动致动悬臂的测量头。压阻传感器和双压电晶片致动器优选地被直流隔离。测量头是特别是碳纳米管的形式。多个悬臂可以以悬臂阵列的形式布置，其特征在于单独的预弯曲悬臂的梳状布置。根据本发明的方法通过快速反馈信号来区分，因为使用供应致动器的DC信号的变化来调节测量尖端和待研究表面之间的距离。

2. 发明申请

US20110047662A1 APPARATUS AND METHOD FOR INVESTIGATING SURFACE PROPERTIES OF DIFFERENT MATERIALS 有权
标题翻译：用于调查不同材料表面特性的装置和方法
公开(公告)号：US20110047662A1
公开(公告)日：2011-02-24
申请号：US12666745
申请日：2008-06-26
申请人： Ivo W. Rangelow , Tzvetan Ivanov , Burkhard Volland , Teodor Gotszalk , Miroslaw Woszczyna
发明人： Ivo W. Rangelow , Tzvetan Ivanov , Burkhard Volland , Teodor Gotszalk , Miroslaw Woszczyna
IPC分类号： G01Q60/24
CPC分类号： G01Q20/04 , G01Q10/045 , G01Q10/065 , G01Q60/26 , G01Q60/38 , G01Q70/06 , G01Q70/10 , G01Q70/12
摘要： The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.
摘要翻译：本发明涉及一种用于研究不同材料的表面性质的装置和方法，其使得可以以简化和更快的剪切力方法进行原子力显微镜。根据本发明的装置的特征在于相对于样品的表面垂直定向自动致动悬臂的测量头。压阻传感器和双压电晶片致动器优选地被直流隔离。测量头是特别是碳纳米管的形式。多个悬臂可以以悬臂阵列的形式布置，其特征在于单独的预弯曲悬臂的梳状布置。根据本发明的方法通过快速反馈信号来区分，因为使用供应致动器的DC信号的变化来调节测量尖端和待研究表面之间的距离。

3. 发明授权

US08056402B2 Nanoprobe tip for advanced scanning probe microscopy comprising a layered probe material patterned by lithography and/or FIB techniques 失效
标题翻译：用于高级扫描探针显微镜的纳米针尖，包括通过光刻和/或FIB技术图案化的分层探针材料
公开(公告)号：US08056402B2
公开(公告)日：2011-11-15
申请号：US12114121
申请日：2008-05-02
申请人： Michael Hecker , Ehrenfried Zschech , Piotr Grabiec , Pawel Janus , Teodor Gotszalk
发明人： Michael Hecker , Ehrenfried Zschech , Piotr Grabiec , Pawel Janus , Teodor Gotszalk
IPC分类号： G01B5/28
CPC分类号： G01Q70/14
摘要： By forming an appropriate material layer, such as a metal-containing material, on a appropriate substrate and patterning the material layer to obtain a cantilever portion and a tip portion, a specifically designed nano-probe may be provided. In some illustrative aspects, additionally, a three-dimensional template structure may be provided prior to the deposition of the probe material, thereby enabling the definition of sophisticated tip portions on the basis of lithography, wherein, alternatively or additionally, other material removal processes with high spatial resolution, such as FIB techniques, may be used for defining nano-probes, which may be used for electric interaction, highly resolved temperature measurements and the like. Thus, sophisticated measurement techniques may be established for advanced thermal scanning, strain measurement techniques and the like, in which a thermal and/or electrical interaction with the surface under consideration is required. These techniques may be advantageously used for failure localization and local analysis during the fabrication of advanced integrated circuits.
摘要翻译：通过在合适的基材上形成合适的材料层（例如含金属的材料）并图案化材料层以获得悬臂部分和尖端部分，可以提供特别设计的纳米探针。在一些说明性方面，另外，可以在沉积探针材料之前提供三维模板结构，从而能够在光刻的基础上定义复杂的尖端部分，其中替代地或另外地，其它材料去除过程与可以使用诸如FIB技术的高空间分辨率来定义可用于电相互作用，高度分辨的温度测量等的纳米探针。因此，可以针对先进的热扫描，应变测量技术等建立复杂的测量技术，其中需要与所考虑的表面的热和/或电相互作用。这些技术可有利地用于高级集成电路制造期间的故障定位和局部分析。

4. 发明申请

US20090114000A1 NANOPROBE TIP FOR ADVANCED SCANNING PROBE MICROSCOPY COMPRISING A LAYERED PROBE MATERIAL PATTERNED BY LITHOGRAPHY AND/OR FIB TECHNIQUES 失效
标题翻译：用于高速扫描探针显微镜的纳米技术提示，包括由LITHOGRAPHY和/或FIB技术构成的层状探针材料
公开(公告)号：US20090114000A1
公开(公告)日：2009-05-07
申请号：US12114121
申请日：2008-05-02
申请人： Michael Hecker , Ehrenfried Zschech , Piotr Grabiec , Pawel Janus , Teodor Gotszalk
发明人： Michael Hecker , Ehrenfried Zschech , Piotr Grabiec , Pawel Janus , Teodor Gotszalk
IPC分类号： G01B5/28 , B05D5/12 , C23C14/00 , G03F7/20
CPC分类号： G01Q70/14
摘要： By forming an appropriate material layer, such as a metal-containing material, on a appropriate substrate and patterning the material layer to obtain a cantilever portion and a tip portion, a specifically designed nano-probe may be provided. In some illustrative aspects, additionally, a three-dimensional template structure may be provided prior to the deposition of the probe material, thereby enabling the definition of sophisticated tip portions on the basis of lithography, wherein, alternatively or additionally, other material removal processes with high spatial resolution, such as FIB techniques, may be used for defining nano-probes, which may be used for electric interaction, highly resolved temperature measurements and the like. Thus, sophisticated measurement techniques may be established for advanced thermal scanning, strain measurement techniques and the like, in which a thermal and/or electrical interaction with the surface under consideration is required. These techniques may be advantageously used for failure localization and local analysis during the fabrication of advanced integrated circuits.
摘要翻译：通过在合适的基材上形成合适的材料层（例如含金属的材料）并图案化材料层以获得悬臂部分和尖端部分，可以提供特别设计的纳米探针。在一些说明性方面，另外，可以在沉积探针材料之前提供三维模板结构，从而能够在光刻的基础上定义复杂的尖端部分，其中替代地或另外地，其它材料去除过程与可以使用诸如FIB技术的高空间分辨率来定义可用于电相互作用，高度分辨的温度测量等的纳米探针。因此，可以针对先进的热扫描，应变测量技术等建立复杂的测量技术，其中需要与所考虑的表面的热和/或电相互作用。这些技术可有利地用于高级集成电路制造期间的故障定位和局部分析。

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