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    • 3. 发明授权
    • Magnetron sputtering apparatus
    • 磁控溅射装置
    • US07115194B2
    • 2006-10-03
    • US10786547
    • 2004-02-26
    • Takayuki Iseki
    • Takayuki Iseki
    • C23C14/35
    • H01J37/3455C23C14/35H01J37/3408
    • A magnetron sputtering apparatus 1 is composed of a vacuum chamber 2, a target 3, a cathode 4 that holds the target 3 in the vacuum chamber 2, a substrate 5, an anode 6 that holds the substrate 5 and is allocated above the cathode 4 so as to face the substrate 5 toward the target 3 on the cathode 4, a permanent magnet 71 that generates magnetic field 141 and is allocated under the cathode 4, and a rotation controller 12 for rotating the permanent magnet 71 so as to pivot on a center axis of the target 3. The permanent magnet 71 is further composed of a base 8, a first permanent magnet 91 that is fixed on the base 8 in the middle and a second permanent magnet 101 in a ring shape that is fixed in an external circumferential area of the base 8 so as to surround the first permanent magnet 91, wherein a magnetic polarity of the second permanent magnet 101 is inverse with respect to that of the first permanent magnet 91 and magnetic field strength of the second permanent magnet 101 is weaker than that of the first permanent magnet 91, and further an upper portion of the permanent magnet 71 is in a cylindrical shape of which top portion is cut diagonally.
    • 磁控管溅射装置1由真空室2,靶3,保持真空室2中的靶3的阴极4,基板5,保持基板5并分配在阴极4上方的阳极6 为了朝向阴极4上的靶3面对基板5,产生磁场141并分配在阴极4下方的永磁体71和用于使永磁体71旋转以便在其上枢转的旋转控制器12 永磁体71还包括基座8,固定在中间的基座8上的第一永久磁铁91和固定在外部的环状的第二永久磁铁101 围绕第一永磁体91的基部8的周向区域,其中第二永磁体101的磁极性相对于第一永磁体91的磁极性反而相对于第二永磁体101的磁场强度较弱 与第一永久磁铁91相比,永久磁铁71的上部还是其顶部被对角地切割的圆​​筒形状。
    • 7. 发明授权
    • Crosslinking curable resin composition
    • 交联固化性树脂组合物
    • US5356754A
    • 1994-10-18
    • US950500
    • 1992-09-25
    • Kenji KushiKen-ichi InukaiTakayuki IsekiSeiya Koyanagi
    • Kenji KushiKen-ichi InukaiTakayuki IsekiSeiya Koyanagi
    • C08G65/332G03F7/027G03F7/033G03C1/73
    • C08G65/3322G03F7/027G03F7/033C08G2650/16C08G2650/20C08L2312/00
    • A photopolymerizable or radiation polymerizable alkaline developing crosslinking curable resin composition possessing superior antiplating properties and a short stripping period, in which the stripped plate is not easily dissolved in the stripping fluid, and which is comprising:(a) 5-30 parts by weight of at least one compound possessing in one molecule on the average 1.5 or more (meth)acryloyloxy groups, which is obtained by reacting (meth)acrylic acid with a reaction product formed by adding, to a polyatomic alcohol possessing 3 or more OH groups in one molecule, an alkylene oxide containing propylene oxide in an amount of 67% molar or greater in an amount of 5-12 moles per mole of OH group in the aforementioned polyatomic alcohol,(b) 5-30 parts by weight of at least one crosslinkable monomer other than that stated above in (a) , possessing in one molecule 2 or more ethylenically unsaturated groups,(c) 45-75 parts by weight of a thermoplastic polymer for use as a binder, the thermoplastic polymer in turn being formed of 15-35 wt % of at least one .alpha., .beta.-unsaturated carboxyl group containing a monomer having 3-15 carbon atoms, and 65-85 wt % of another copolymerizable monomer, and(d) 0-10 parts by weight of a photopolymerization initiator.
    • 一种可光聚合或可辐照聚合的碱性显影交联可固化树脂组合物,其具有优异的抗剥落性能和短的剥离时间,其中剥离板不容易溶解在剥离液中,并且其包含:(a)5-30重量份 至少一种在一个分子中具有平均1.5个或更多个(甲基)丙烯酰氧基的化合物,其通过使(甲基)丙烯酸与通过在一个具有3个或更多个OH基团的多原子醇中加入形成的反应产物 分子,在上述多原醇中每摩尔OH基团为5-12摩尔量的67摩尔%以上的环氧丙烷的环氧烷烃,(b)5-30重量份的至少一种可交联的 具有上述(a)中所述的单体,在一个分子中具有2个或更多个烯属不饱和基团,(c)45-75重量份用作粘合剂的热塑性聚合物,其它 另外,塑性聚合物又由15-35重量%的至少一种含有3-15个碳原子的单体的α,β-不饱和羧基和65-85重量%的另一个可共聚单体形成,和(d)0- 10重量份的光聚合引发剂。
    • 10. 发明授权
    • Surface acoustic wave actuator and deflector employing the same
    • 表面声波致动器和采用其的偏转器
    • US06949868B2
    • 2005-09-27
    • US10743156
    • 2003-12-23
    • Takayuki Iseki
    • Takayuki Iseki
    • H02N2/00G02B26/08H01L41/09H01L41/08
    • H02N2/08G02B26/0858H02N2/0055H02N2/028H02N2/046
    • A surface acoustic wave actuator has a mover arranged on a first surface of a piezoelectric board and comb-shaped electrodes formed on the first surface. High frequencies are applied to the comb-shaped electrodes to generate Rayleigh waves that move the mover. In the surface acoustic wave actuator, the com-shaped electrodes include first to fourth electrodes formed on the first surface of the piezoelectric board, the first and third comb-shaped electrodes being on each side of the mover on an X-axis, the second and fourth comb-shaped electrodes being on each side of the mover on a Y-axis. The mover at least has a permanent magnet. The surface acoustic wave actuator further has a unit to selectively apply a high frequency to at least one of two electrodes one selected from the first and third comb-shaped electrodes and the other from the second and fourth comb-shaped electrodes. The surface acoustic wave actuator also has a mover holder facing the mover with the piezoelectric board interposed therebetween. The mover holder at least has a magnetic material configured to hold the mover.
    • 表面声波致动器具有布置在压电板的第一表面上的移动器和形成在第一表面上的梳状电极。 高频被施加到梳状电极以产生移动移动器的瑞利波。 在表面声波致动器中,com形电极包括形成在压电板的第一表面上的第一至第四电极,第一和第三梳状电极在X轴上位于移动器的每一侧上,第二 并且第四梳状电极在Y轴的移动体的每一侧上。 动子至少有永久磁铁。 表面声波致动器还具有选择性地向从第一和第三梳状电极中选择的两个电极和从第二和第四梳状电极中选择的两个电极中的至少一个选择性施加高频的单元。 表面声波致动器还具有面向移动器的移动器保持器,其间插入压电板。 移动器支架至少具有构造成保持动子的磁性材料。