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    • 2. 发明授权
    • Method of coating a substrate with a coating material by vibrating
charged particles with a electric field
    • 通过用电场振动带电粒子用涂料涂覆基材的方法
    • US5445852A
    • 1995-08-29
    • US145521
    • 1993-11-04
    • Isao Sugai
    • Isao Sugai
    • C23C26/00B05B5/08B05D1/00C23C24/00B05D1/04B05D3/02B05D7/22
    • B05B5/087B05D1/002B05D1/007C23C24/00
    • A method of coating a substrate, including the steps of: providing a space between an anode substrate constituting an anode and a cathode substrate constituting a cathode using an insulating member inserted between the anode substrate and the cathode substrate, supplying the providing space with particles of a coating material, preferably a metal or a metallic compound, evacuating the space, and generating an electric field in the evacuated space to cause vibration of the particles to coat the anode substrate and the cathode substrate with the particles of the coating material. According to the substrate coating method of the present invention, a coating with a high purity having excellent adhesion to a substrate and a uniform thickness can be formed on a substrate at normal temperatures at a high efficiency. Furthermore, according to the substrate coating method of the present invention, a coating can be formed on a substrate at a low electric power. Additionally, according to the substrate coating method of the present invention, a uniform coating can be formed on a substrate having a complicated shape.
    • 一种涂布基板的方法,包括以下步骤:使用插入在阳极基板和阴极基板之间的绝缘构件在构成阳极的阳极基板和阴极基板之间提供空间,向该提供空间供给粒子 涂覆材料,优选金属或金属化合物,抽空空间,并在抽空空间中产生电场,引起颗粒的振动,用涂料的颗粒涂覆阳极基板和阴极基板。 根据本发明的基板涂布方法,可以在常温下高效率地在基板上形成具有对基板的优异粘合性和均匀厚度的高纯度涂层。 此外,根据本发明的基板涂布方法,可以在低功率下在基板上形成涂层。 此外,根据本发明的基板涂布方法,可以在具有复杂形状的基板上形成均匀的涂层。