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1. 发明授权

US08867114B2 Vibrating mirror element 有权
标题翻译：振动镜元件
公开(公告)号：US08867114B2
公开(公告)日：2014-10-21
申请号：US13520411
申请日：2010-12-24
申请人： Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Naoki Inoue
发明人： Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Naoki Inoue
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.
摘要翻译：该振动镜元件（100）包括镜部（10），悬臂的第一驱动部（41），包括形成在第一方向的第一侧上的第一固定端（41a）和第一自由端（41b）），其形成在其第二侧上并线性延伸，能够以倾斜状态支撑所述镜部（10）的第一反射镜支撑部（46），悬臂的第二驱动部（51），包括第二固定端形成在第一方向的第二侧上的第一自由端（51b）和形成在第一方向上的第二自由端（51b），其相对于反射镜的中心与第一驱动部分对称并且线性延伸，并且第二反射镜支撑部分（56）相对于反射镜的中心与第一反射镜支撑部分对称，并且能够以倾斜状态支撑反射镜部分。

2. 发明授权

US08482832B2 Vibrating mirror element 有权
标题翻译：振动镜元件
公开(公告)号：US08482832B2
公开(公告)日：2013-07-09
申请号：US12614817
申请日：2009-11-09
申请人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Naoki Inoue
发明人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Naoki Inoue
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.
摘要翻译：该振动镜元件包括反射光的反射镜部分，连接到用于以振动方式支撑镜部分的反射镜部分的可扭转变形的光束部分，以及具有连接部分的驱动部分，用于驱动镜部分通过扭转变形梁部分。驱动部分的连接部分的宽度比平面图中连接部分以外的驱动部分的宽度小。

3. 发明申请

US20100149615A1 Vibrating Mirror Element 有权
标题翻译：振动镜元件
公开(公告)号：US20100149615A1
公开(公告)日：2010-06-17
申请号：US12614817
申请日：2009-11-09
申请人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Naoki Inoue
发明人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Naoki Inoue
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.
摘要翻译：该振动镜元件包括反射光的反射镜部分，连接到用于以振动方式支撑镜部分的反射镜部分的可扭转变形的光束部分，以及具有连接部分的驱动部分，用于驱动镜部分通过扭转变形梁部分。驱动部分的连接部分的宽度比平面图中连接部分以外的驱动部分的宽度小。

4. 发明申请

US20130163061A1 Vibrating Mirror Element 审中-公开
标题翻译：振动镜元件
公开(公告)号：US20130163061A1
公开(公告)日：2013-06-27
申请号：US13820327
申请日：2011-08-19
申请人： Isaku Kanno , Naoki Inoue , Manabu Murayama
发明人： Isaku Kanno , Naoki Inoue , Manabu Murayama
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G02B7/1821 , G02B26/101
摘要： A vibrating mirror element including a detection electrode to detect driving and capable of being easily manufactured is provided. This vibrating mirror element includes a mirror portion and a driving portion driving the mirror portion, and the driving portion has a drive electrode to deform the driving portion by application of a voltage to drive the driving portion and a detection electrode to detect the amount of deformation of the driving portion, both arranged therein.
摘要翻译：提供了一种包括检测电极以检测驱动并且易于制造的振动镜元件。该振动镜元件包括镜部分和驱动镜部分的驱动部分，驱动部分具有驱动电极，通过施加电压使驱动部分变形以驱动驱动部分和检测电极以检测变形量的驱动部分。

5. 发明授权

US08098415B2 Vibrating mirror element 有权
标题翻译：振动镜元件
公开(公告)号：US08098415B2
公开(公告)日：2012-01-17
申请号：US12503511
申请日：2009-07-15
申请人： Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Hitoshi Fujii
发明人： Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Hitoshi Fujii
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , B81B3/004 , B81B2201/042 , B81B2203/0109 , G02B26/101 , H04N1/1017 , H04N1/193 , H04N2201/0428 , H04N2201/0458
摘要： A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.
摘要翻译：振动镜元件包括基底构件，由金属制成的基底，与镜部一体地形成，可动部分从两侧可摆动地支撑镜部分并用作下电极;以及安装部分，其支撑可移动部分并安装在基底构件上，设置在基板的可动部分上并通过施加周期性电压振动镜部分的压电膜和设置在压电膜上的上电极。

6. 发明授权

US08416484B2 Vibrating mirror element 有权
标题翻译：振动镜元件
公开(公告)号：US08416484B2
公开(公告)日：2013-04-09
申请号：US12612947
申请日：2009-11-05
申请人： Isaku Kanno , Manabu Murayama , Hitoshi Fujii
发明人： Isaku Kanno , Manabu Murayama , Hitoshi Fujii
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.
摘要翻译：该振动镜元件包括以振动方式支撑反射镜部分的一对第一光束部分，分别与一对第一光束部分连接的一对第二光束部分和与该对第二光束部分连接的一对驱动部分分别。镜部分布置在由一对第二光束部分和一对驱动部分围绕的区域中。一对第一光束部分的宽度和一对第二光束部分的宽度变得比一对驱动部分的宽度小。

7. 发明申请

US20100142023A1 Vibrating Mirror Element 有权
标题翻译：振动镜元件
公开(公告)号：US20100142023A1
公开(公告)日：2010-06-10
申请号：US12612947
申请日：2009-11-05
申请人： Isaku KANNO , Manabu Murayama , Hitoshi Fujii
发明人： Isaku KANNO , Manabu Murayama , Hitoshi Fujii
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.
摘要翻译：该振动镜元件包括以振动方式支撑反射镜部分的一对第一光束部分，分别与一对第一光束部分连接的一对第二光束部分和与该对第二光束部分连接的一对驱动部分分别。镜部分布置在由一对第二光束部分和一对驱动部分围绕的区域中。一对第一光束部分的宽度和一对第二光束部分的宽度变得比一对驱动部分的宽度小。

8. 发明授权

US08917434B2 Vibrating mirror element and method for manufacturing vibrating mirror element 有权
标题翻译：振动镜元件及其制造方法
公开(公告)号：US08917434B2
公开(公告)日：2014-12-23
申请号：US13519580
申请日：2010-12-20
申请人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Hitoshi Fujii
发明人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Hitoshi Fujii
IPC分类号： G02B26/08 , G02B26/10
CPC分类号： G02B26/0841 , G02B26/0858 , G02B26/101
摘要： There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element (100) includes a mirror portion (10), a deformable driving portion (41, 43, 45, 51, 53, 55), and a support portion (42, 44, 46, 52, 54, 56) connected with a first connecting portion (41c, 43d, 45d, 51c, 53d, 55d) of the driving portion on the side of a first end portion (42a, 44a, 46a, 52a, 54a, 56a), while the thickness of the support portion is larger than the thickness of the driving portion.
摘要翻译：提供了能够抑制支撑部的弯曲变形的振动镜元件。该振动镜元件（100）包括镜部分（10），可变形驱动部分（41,43,45,51,53,55）和支撑部分（42,44,46,52,54,56）与第一端部（42a，44a，46a，52a，54a，56a）侧的驱动部分的第一连接部分（41c，43d，45d，51c，53d，55d）连接，支撑部分大于驱动部分的厚度。

9. 发明申请

US20120320440A1 Vibrating Mirror Element and Method for Manufacturing Vibrating mirror Element 有权
标题翻译：振动镜元件及振动镜元件制造方法
公开(公告)号：US20120320440A1
公开(公告)日：2012-12-20
申请号：US13519580
申请日：2010-12-20
申请人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Hitoshi Fujii
发明人： Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Hitoshi Fujii
IPC分类号： G02B26/10 , B29D11/00
CPC分类号： G02B26/0841 , G02B26/0858 , G02B26/101
摘要： There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element (100) includes a mirror portion (10), a deformable driving portion (41, 43, 45, 51, 53, 55), and a support portion (42, 44, 46, 52, 54, 56) connected with a first connecting portion (41c, 43d, 45d, 51c, 53d, 55d) of the driving portion on the side of a first end portion (42a, 44a, 46a, 52a, 54a, 56a), while the thickness of the support portion is larger than the thickness of the driving portion.
摘要翻译：提供了能够抑制支撑部的弯曲变形的振动镜元件。该振动镜元件（100）包括镜部分（10），可变形驱动部分（41,43,45,51,53,55）和支撑部分（42,44,46,52,54,56）与第一端部（42a，44a，46a，52a，54a，56a）侧的驱动部分的第一连接部分（41c，43d，45d，51c，53d，55d）连接，支撑部分大于驱动部分的厚度。

10. 发明申请

US20100014143A1 Vibrating Mirror Element 有权
标题翻译：振动镜元件
公开(公告)号：US20100014143A1
公开(公告)日：2010-01-21
申请号：US12503511
申请日：2009-07-15
申请人： Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Hitoshi Fujii
发明人： Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Hitoshi Fujii
IPC分类号： G02B26/08 , G02B26/10
CPC分类号： G02B26/0858 , B81B3/004 , B81B2201/042 , B81B2203/0109 , G02B26/101 , H04N1/1017 , H04N1/193 , H04N2201/0428 , H04N2201/0458
摘要： A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.
摘要翻译：振动镜元件包括基底构件，由金属制成的基底，与镜部一体地形成，可动部分从两侧可摆动地支撑镜部分并用作下电极;以及安装部分，其支撑可移动部分并安装在基底构件上，设置在基板的可动部分上并通过施加周期性电压振动镜部分的压电膜和设置在压电膜上的上电极。

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