会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers
    • 用于顺序研磨和加载/卸载半导体晶片的装置和方法
    • US20060264156A1
    • 2006-11-23
    • US11494631
    • 2006-07-28
    • In Jeong
    • In Jeong
    • B24B51/00B24B7/30B24B29/00
    • B24B37/345B24B37/013B24B41/005B24B41/061B24B49/02B24B53/017
    • A chemical mechanical polishing (CMP) apparatus and method for polishing semiconductor wafers utilizes multiple wafer carriers that are transferred to different positions about a polishing pad to polish at least one semiconductor wafer while another semiconductor wafer is being loaded onto or unloaded from one of the wafer carriers. The different positions include multiple polishing positions and one or more loading/unloading positions. In some embodiments, the CMP apparatus is configured such that a semiconductor wafer is polished at a loading/unloading position. The CMP apparatus may also be configured to continuously polish one or more semiconductor wafers while the wafer carriers are being transferred to different positions. Thus, the CMP apparatus can continuously process the semiconductor wafers without significant idle periods. Consequently, in these embodiments, the efficiency of the CMP apparatus is significantly increased. Furthermore, the wafer carriers of the CMP apparatus are preferably restricted to a small area to decrease the footprint of the apparatus.
    • 用于抛光半导体晶片的化学机械抛光(CMP)装置和方法利用多个晶片载体,其转移到抛光垫周围的不同位置以抛光至少一个半导体晶片,而另一个半导体晶片被加载到晶片之一或从其中的一个晶片 承运人 不同的位置包括多个抛光位置和一个或多个装载/卸载位置。 在一些实施例中,CMP装置被配置为使得半导体晶片在装载/卸载位置被抛光。 CMP装置还可以被配置为在晶片载体被转移到不同位置的同时连续地抛光一个或多个半导体晶片。 因此,CMP装置可以连续地处理半导体晶片而没有显着的空闲周期。 因此,在这些实施例中,CMP装置的效率显着提高。 此外,CMP装置的晶片载体优选地被限制在小的面积以减小装置的占地面积。
    • 5. 发明申请
    • Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers
    • 用于顺序研磨和加载/卸载半导体晶片的装置和方法
    • US20080038992A1
    • 2008-02-14
    • US11713784
    • 2007-03-05
    • In Jeong
    • In Jeong
    • B24B51/00
    • B24B37/345B24B37/013B24B41/005B24B41/061B24B49/02B24B53/017
    • A chemical mechanical polishing (CMP) apparatus and method for polishing semiconductor wafers utilizes multiple wafer carriers that are transferred to different positions about a polishing pad to polish at least one semiconductor wafer while another semiconductor wafer is being loaded onto or unloaded from one of the wafer carriers. The different positions include multiple polishing positions and one or more loading/unloading positions. In some embodiments, the CMP apparatus is configured such that a semiconductor wafer is polished at a loading/unloading position. The CMP apparatus may also be configured to continuously polish one or more semiconductor wafers while the wafer carriers are being transferred to different positions. Thus, the CMP apparatus can continuously process the semiconductor wafers without significant idle periods. Consequently, in these embodiments, the efficiency of the CMP apparatus is significantly increased. Furthermore, the wafer carriers of the CMP apparatus are preferably restricted to a small area to decrease the footprint of the apparatus.
    • 用于抛光半导体晶片的化学机械抛光(CMP)装置和方法利用多个晶片载体,其转移到抛光垫周围的不同位置以抛光至少一个半导体晶片,而另一个半导体晶片被加载到晶片之一或从其中的一个晶片 承运人 不同的位置包括多个抛光位置和一个或多个装载/卸载位置。 在一些实施例中,CMP装置被配置为使得半导体晶片在装载/卸载位置被抛光。 CMP装置还可以被配置为在晶片载体被转移到不同位置的同时连续地抛光一个或多个半导体晶片。 因此,CMP装置可以连续地处理半导体晶片而没有显着的空闲周期。 因此,在这些实施例中,CMP装置的效率显着提高。 此外,CMP装置的晶片载体优选地被限制在小的面积以减小装置的占地面积。
    • 10. 发明申请
    • External electrode fluorescent lamp and manufacturing method thereof
    • 外部电极荧光灯及其制造方法
    • US20060002115A1
    • 2006-01-05
    • US11158008
    • 2005-06-22
    • In Jeong
    • In Jeong
    • F21K2/00
    • H01J65/046G02F1/133604H01J61/30
    • An external electrode fluorescent lamp includes an external electrode having an increased surface area. The external electrode fluorescent lamp includes a lamp tube, the lamp tube including a “W”-like shaped end portion, and a double-tube external electrode formed on an outer surface of the “W”-like shaped end portion, the double-tube external electrode including a first electrode on a concave outer surface of the “W”-like shaped end portion, and a second electrode formed on a non-concave outer surface of the “W”-like shaped end portion. Alternatively, the external electrode fluorescent lamp includes a lamp tube, the lamp tube having two end portions and an intermediate portion between the end portions and a diameter of the end portions being larger than a diameter of the intermediate portion, and external electrodes respectively formed on an outer surface of the end portions of the lamp tube.
    • 外部电极荧光灯包括具有增加的表面积的外部电极。 外部电极荧光灯包括灯管,灯管包括“W”形端部,以及形成在“W”形端部的外表面上的双管外电极, 管状外部电极,其包括在“W”形端部的凹形外表面上的第一电极,以及形成在“W”形端部的非凹面外表面上的第二电极。 或者,外部电极荧光灯包括灯管,灯管具有两个端部,端部之间的中间部分和端部的直径大于中间部分的直径,外部电极分别形成在 灯管的端部的外表面。